Aerotech AOM130 Series, Руководство пользователя, Страница: 12 / 28

Overview AOM130 User Manual
1.3. Vacuum Operation
Contact the factory for information regarding operation in a vacuum environment.
Preparation and considerations for operation in a vacuum environment:
l
Lubrication with vacuum-compatible lubricants
l
Use of materials, fasteners, and coatings with vacuum outgas performance compatible with the level of
vacuum specified
l
For high vacuum stages, elimination of situations that may allow gases to become temporarily trapped
during pump down
l
Extensive cleaning prior to assembly in a clean environment and packaging in a special polyethylene
bag
l
Use of components able to withstand elevated temperatures (non-operating) for bake-out performances
12 Chapter 1 www.aerotech.com