Aerotech ANT95LZ Series, Руководство по оборудованию

Страница: 19 / 50

1.3. Basic Specifications
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT95LZ Series Specifications
ANT95LZ-025 ANT95LZ-050
Travel 25 mm 50 mm
Accuracy
(1)
-PL1 ± 4.0 µm
-PL2 (-E1, -E2) ± 300 nm
-PL2 (-E4) ± 200 nm
Bidirectional Repeatability
(1)
± 75 nm
Resolution (Minimum
Incremental Motion)
-E1 2 nm
-E4 1 nm
Straightness
(1)
± 2.25 µm ± 3.0 µm
Flatness
(1)
± 3.5 µm ± 4.0 µm
Pitch 10 arc sec
Roll 10 arc sec
Yaw 5 arc sec
Maximum Speed
-E1, -E4 200 mm/s
-E2 145 mm/s
Maximum Acceleration (No Load) 1 g
In-Position Stability
(2)
-E1 <2 nm
-E4 <1 nm
Load Capacity (Vertical)
(3)
5 kg
Moving Mass 0.51 kg 0.69 kg
Stage Mass 2.11 kg 2.71 kg
Material Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Certified with each stage.
2. In-position stability is reported as 3-sigma value (requires a 1 Vpp encoder).
3. Payload specifications assume that the payload is centered on-axis.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
5. -PL2 performance requires the use of an Aerotech controller.
6. To ensure the achievement and repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information.
7. The air supply for the pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better.
Use nitrogen at 99.9% purity for best results. Supply pressure is determined by the amount of payload carried by the stage.
ANT95LZ Hardware Manual 1.3. Basic Specifications
www.aerotech.com 19