Aerotech ANT20G Series, Руководство по оборудованию

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ANT20G Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ANT20G Model Numbering System
ANT Series Vertical Travel Stage
Radius of Rotation (Required)
-050 50 mm radius of rotation
-090 90 mm radius of rotation
-110 110 mm radius of rotation
-160 160 mm radius of rotation
Metrology (Required)
-PL1 Base performance
-PL2 High-accuracy performance, PLUS
Accessories (To be Ordered as a Separate Line)
ALIGN-PA10 XY assembly; 10 arc sec orthogonality
ALIGN-PA5 XY assembly; 5 arc sec orthogonality
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