Aerotech AGV3D Series, Руководство по оборудованию

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Table 1-6: AGV3D-30 Spot Diameter Range (µm) within Field of View per Wavelength
Nominal Field of View
Nominal Working
Distance
343 nm 355 nm 515 nm
100 mm x 100 mm 83 mm 4.8 - 5.0 5.0 - 5.2 7.4 - 7.7
200 mm x 200 mm 221 mm 7.9 - 8.6 8.2 - 8.9 11.9 - 13.2
300 mm x 300 mm 358 mm 11.0 - 12.2 11.3 - 12.5 17.3 - 19.2
400 mm x 400 mm 495 mm 14.2 - 15.8 14.6 - 16.2 22.7 - 25.3
500 mm x 500 mm 632 mm 17.5 - 19.4 17.8 - 19.8 28.2 - 31.6
600 mm x 600 mm 770 mm 20.7 - 23.0 21 - 23.4 33.8 - 38.1
700 mm x 700 mm 907 mm 23.9 - 26.6 24.3 - 27 39.7 - 44.8
800 mm x 800 mm 1045 mm 27.0 - 30.1 27.5 - 30.6 45.7 - 51.8
1000 mm x 1000 mm 1320 mm 33.3 - 37.1 33.9 - 37.8 58.4 - 66.7
532 nm 1030 nm 1064 nm
100 mm x 100 mm 83 mm 7.7 - 7.9 14.6 - 14.7 15.0 - 15.2
200 mm x 200 mm 221 mm 12.2 - 13.6 22.4 - 24.7 23.3 - 25.7
300 mm x 300 mm 358 mm 17.8 - 19.8 32.3 - 35.9 33.4 - 37.0
400 mm x 400 mm 495 mm 23.3 - 26.0 42.2 - 47.1 43.5 - 48.5
500 mm x 500 mm 632 mm 28.9 - 32.4 52.2 - 58.4 53.8 - 60.1
600 mm x 600 mm 770 mm 34.6 - 38.9 62.3 - 69.8 64.1 - 71.7
700 mm x 700 mm 907 mm 40.5 - 45.6 72.6 - 81.4 74.5 - 83.5
800 mm x 800 mm 1045 mm 46.5 - 52. 82.8 - 93.0 84.9 - 95.3
1000 mm x 1000 mm 1320 mm 59.0 - 67.0 103.1 - 116.5 106.0 - 119.1
1550 nm 9.3 µm 10.6 µm
100 mm x 100 mm 83 mm 21.1 - 21.8 128.5 - 137.1 145.8 - 155.8
200 mm x 200 mm 221 mm 33.2 - 36.5 211.1 - 231.2 240.3 - 263.1
300 mm x 300 mm 358 mm 47.3 - 52.4 296.1 - 326.8 337.0 - 371.9
400 mm x 400 mm 495 mm 61.5 - 68.4 381.3 - 422. 433.9 - 481.0
500 mm x 500 mm 632 mm 75.8 - 84.5 466.5 - 518.6 531.0 - 590.3
600 mm x 600 mm 770 mm 90.1 - 100.7 552.0 - 614.9 628.3 - 699.9
700 mm x 700 mm 907 mm 104.5 - 116.0 637.6 - 711.4 725.8 - 809.8
800 mm x 800 mm 1045 mm 119.0 - 133.2 723.5 - 808.2 823.6 - 920.0
1000 mm x 1000 mm 1320 mm 148.0 - 166.0 895.9 - 1002.6 1019.9 - 1141.4
NOTES:
l
Spot diameter is expressed as 1/e 2 assuming a beam quality of M 2 = 1.
l
The working distance is measured from the bottom surface of the scan head.
l
Refer to Table 1-7 to determine which field configuration option is required to achieve a specific nominal field of
view for the desired wavelength.
l
Contact Aerotech for additional data.
AGV3D Hardware Manual 1.3. Basic Specifications
www.aerotech.com 23