Aerotech AGV-SPO Series, Руководство по оборудованию

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1.3. Basic Specifications
Table 1-3: AGV-SPO Series Specifications
AGV14SPO
Optical Performance
(1)
Beam Aperture 14 mm
Maximum Scan Angle ±20°
Beam Displacement 35 mm
Dither (Minimum Incremental Motion)
(2)
0.3 µrad
RMS
Accuracy 50 µrad pk-pk
Repeatability
(3)
0.6 µrad
RMS
Gain Error 0.05 mrad
Non-Linearity 0.005%
Dynamic Performance
Tracking Error 0 µsec
Peak Acceleration
(4,5)
60,000 m/s
2
Continuous Acceleration
(4,6)
20,000 m/s
2
Positioning Speed
(4)
50 m/s
Marking Speed
(4,7,8)
5 m/s
Jump & Settle Time, 1 mm Move
(4,9)
700 µsec
Stability
Long-Term Drift
(3)
Offset
10 µrad/12 hrs
15 µrad/24 hrs
Gain 10 ppm/24 hrs
Thermal Drift
Offset 20 µrad/°C
Gain 1 ppm/°C
Mechanical Specifications
Mass 5.1 kg
Material Aluminum (Black Anodize and Blue Paint)
Mean Time Before Failure 20,000 Hours
NOTE: All specifications are per axis unless noted.
(1) All angles are optical unless otherwise noted.
(2) Without -AC air cooling option.
(3) After an initial four hour warm-up, expect an ambient temperature variation of < ±0.5°.
(4) Typical performance with f = 160 mm F-Theta objective.
(5) Based on the maximum rated current of the motor.
(6) Based on the rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of
this value without water cooling.
(7) Achievable with <1% velocity error over continuous velocity portion of move.
(8) Marking speed is dependent on allowable tracking error.
(9) Settled to within 1% of move distance.
Table 1-4: AGV14SPO Series Mirror Specifications
Cooling Option
Wavelength Coating
-W1 -W4 -W6 -W8 -W9
Maximum CW
Laser Power (W)
No Cooling 200 200 50 50 50
Air Cooling 400 400 100 100 100
Air and Water Cooling 1200 1200 300 300 300
AGV-SPO Hardware Manual 1.3. Basic Specifications
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