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List of Figures

Figure 1-1:

Functional Principle of a 2-Axis Galvanometer Scanner

15

Figure 1-2:

Standard AGV-HP

16

Figure 1-3:

Standard AGV-HPO

16

Figure 2-1:

AGV10HP-BE1 Galvanometer Scanner Dimensions

27

Figure 2-2:

AGV10HP-BE2 Galvanometer Scanner Dimensions

28

Figure 2-3:

AGV10HPO-BE1 Galvanometer Scanner Dimensions

29

Figure 2-4:

AGV10HPO-BE2 Galvanometer Scanner Dimensions

30

Figure 2-5:

AGV14HP-BE1 Galvanometer Scanner Dimensions

31

Figure 2-6:

AGV14HP-BE2 Galvanometer Scanner Dimensions

32

Figure 2-7:

AGV14HPO-BE1 Galvanometer Scanner Dimensions

33

Figure 2-8:

AGV14HPO-BE2 Galvanometer Scanner Dimensions

34

Figure 2-9:

AGV20HP-BE1 Galvanometer Scanner Dimensions

35

Figure 2-10:

AGV20HP-BE2 Galvanometer Scanner Dimensions

36

Figure 2-11:

AGV20HPO-BE1 Galvanometer Scanner Dimensions

37

Figure 2-12:

AGV20HPO-BE2 Galvanometer Scanner Dimensions

38

Figure 2-13:

AGV30HP-BE1 Galvanometer Scanner Dimensions

39

Figure 2-14:

AGV30HPO-BE1 Galvanometer Scanner Dimensions

40

Figure 2-15:

Example of F-Theta Lens (Complete Assembly)

43

Figure 2-16:

Assembly of Focal Lens to Scan Head (AGV-HP(O))

44

Figure 2-17:

Air-Cooling (-AC) Locations

45

Figure 2-18:

Water Cooling (-WC) Locations

46

Figure 3-1:

Motor and Feedback Wiring

51

Figure 3-2:

-BE1 Galvo X-Axis Machine Direction (front)

53

Figure 3-3:

-BE1 Galvo Y-Axis Machine Direction (side)

53

Figure 3-4:

-BE2 Galvo X-Axis Machine Direction (front)

54

Figure 3-5:

-BE2 Galvo Y-Axis Machine Direction (side)

54

Figure 3-6:

Analog Encoder Phasing Reference Diagram

55

List of Figures

AGV-HP(O) Hardware Manual

4

www.aerotech.com

Содержание AGV-14 HP

Страница 1: ...Revision 2 00 AGV HP O Two Axis Galvo Scanner HARDWARE MANUAL...

Страница 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Страница 3: ...imensions 27 2 3 Securing the Scan Head to the Mounting Surface 41 2 4 Attaching the Focal Lens to the Scan Head 43 2 5 Air Requirements 45 2 6 Water Requirements 46 Chapter 3 Electrical Specification...

Страница 4: ...Figure 2 10 AGV20HP BE2 Galvanometer Scanner Dimensions 36 Figure 2 11 AGV20HPO BE1 Galvanometer Scanner Dimensions 37 Figure 2 12 AGV20HPO BE2 Galvanometer Scanner Dimensions 38 Figure 2 13 AGV30HP...

Страница 5: ...rror Specifications 22 Table 3 1 Motor and Feedback Connector Pinouts 49 Table 3 2 Mating Connector Part Numbers for the Motor and Feedback Connector 49 Table 3 3 Aerotech Motor and Feedback Cable Par...

Страница 6: ...This page intentionally left blank List of Tables AGV HP O Hardware Manual 6 www aerotech com...

Страница 7: ...e impaired l The life expectancy of the product could be decreased Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the moment of the safety note or if...

Страница 8: ...ional ground and safety precautions are required for applications that require access to the AGV HP O while it is energized DANGER Use of this product increases the risk of exposure to visible and or...

Страница 9: ...assigned a particular hazard level which is indicated by the Laser Class label that is affixed to the device near the location where laser radiation is emitted Brief descriptions of each of the vario...

Страница 10: ...a laser device that can generate a sufficiently intense beam a laser area will be produced that includes the aiming volume as well as the reflections from all objects that can be exposed to the radia...

Страница 11: ...appropriate shutter as per any and all applicable regulations in order to prevent unwanted emission of the laser beam Place the beam shutter between the laser source and the scan head refer to Figure...

Страница 12: ...This page intentionally left blank Laser Shutter AGV HP O Hardware Manual 12 www aerotech com...

Страница 13: ...machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national imp...

Страница 14: ...This page intentionally left blank EU Declaration of Incorporation AGV HP O Hardware Manual 14 www aerotech com...

Страница 15: ...diameter etc may be fed into the beam entrance aperture Contact the factory for mirror and coating details Depending on the options selected for the particular scan head the beam exit aperture may be...

Страница 16: ...Figure 1 2 Standard AGV HP Figure 1 3 Standard AGV HPO Chapter 1 Overview AGV HP O Hardware Manual 16 www aerotech com...

Страница 17: ...HPO Beam Entry Orientation Required AGV10HP O AGV14HP O AGV20HP O AGV30HP O BE1 Right side standard Right side standard Right side standard Right side standard BE2 Left side Left side Left side N A Wa...

Страница 18: ...3 mm 163 mm 255 mm Design Telecentric Telecentric L9 Wavelength 532 nm 1064 nm Focal Length 100 mm 170 mm Design L10 Wavelength 532 nm 1030 nm Focal Length 100 mm 100 mm Design Telecentric Telecentric...

Страница 19: ...55 mm Design L21 Wavelength 343 nm Focal Length 53 mm Design Telecentric L22 Wavelength 343 nm Focal Length 163 mm Design Telecentric L23 Wavelength 343 nm Focal Length 255 mm Design 1 Input beam diam...

Страница 20: ...lt in a 20 C 68 F environment Extreme temperature changes could cause a decrease in performance or permanent damage to the AGV HP O At a minimum the environmental temperature must be controlled to wit...

Страница 21: ...hrs 15 rad 24 hrs Gain 10 ppm 24 hrs Thermal Drift Offset 10 rad C Gain 1 ppm C Mechanical Specifications Mass AGV HP 4 1 kg 4 4 kg 5 1 kg 5 8 kg Mass AGV HPO 2 5 kg 2 6 kg 2 9 kg 3 1 kg Material Alu...

Страница 22: ...00 500 150 150 150 150 500 Air Cooling 10 mm 80 10 80 80 80 20 20 20 20 80 14 mm 400 50 400 400 400 100 100 100 100 400 20 mm 600 100 600 600 600 200 200 200 200 600 30 mm 1000 200 1000 1000 1000 300...

Страница 23: ...1 4 Vacuum Operation Contact the factory for information about operation in a vacuum environment AGV HP O Hardware Manual 1 4 Vacuum Operation www aerotech com 23...

Страница 24: ...This page intentionally left blank 1 4 Vacuum Operation AGV HP O Hardware Manual 24 www aerotech com...

Страница 25: ...ntact Aerotech Global Technical Support DANGER Use of this product increases the risk of exposure to visible and or invisible laser radiation l Do not stare into the laser beam put your body parts in...

Страница 26: ...owder free gloves when you handle optical components Lift only by the base of the scan head Carefully remove the AGV HP O from its protective shipping container Before operating the AGV HP O it is imp...

Страница 27: ...2 2 Dimensions Figure 2 1 AGV10HP BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 27...

Страница 28: ...Figure 2 2 AGV10HP BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 28 www aerotech com...

Страница 29: ...Figure 2 3 AGV10HPO BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 29...

Страница 30: ...Figure 2 4 AGV10HPO BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 30 www aerotech com...

Страница 31: ...Figure 2 5 AGV14HP BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 31...

Страница 32: ...Figure 2 6 AGV14HP BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 32 www aerotech com...

Страница 33: ...Figure 2 7 AGV14HPO BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 33...

Страница 34: ...Figure 2 8 AGV14HPO BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 34 www aerotech com...

Страница 35: ...Figure 2 9 AGV20HP BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 35...

Страница 36: ...Figure 2 10 AGV20HP BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 36 www aerotech com...

Страница 37: ...Figure 2 11 AGV20HPO BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 37...

Страница 38: ...Figure 2 12 AGV20HPO BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 38 www aerotech com...

Страница 39: ...Figure 2 13 AGV30HP BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 39...

Страница 40: ...Figure 2 14 AGV30HPO BE1 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 40 www aerotech com...

Страница 41: ...the AGV HP O housing If you must machine a surface to achieve a required flatness machine the mounting surface l Keep the use of shims to a minimum when you mount the AGV HP O to the mount ing surfac...

Страница 42: ...ith precision flatstones to remove any burrs or high spots 3 Clean the mounting flange and the mating surface of the scan head with the appropriate cleaners isopropyl alcohol for the scan head 4 Line...

Страница 43: ...igurations that include a focal lens For AGV HP O scan heads that are provided without a focal lens the user is responsible for supplying both the F Theta lens and the necessary lens adapter Contact t...

Страница 44: ...of the scan head 5 Make sure that the dowel pin in the lens adapter is aligned with the reference slot in the scan head and attach the lens adapter to the scan head using the appropriate hardware The...

Страница 45: ...this feature Gas must be delivered through a polyurethane air hose with an outer diameter OD of l AGV HP 6 mm OD 4 mm ID l AGV HPO 4 mm OD 2 mm ID Unless otherwise specified a gas flow rate of 20 SLPM...

Страница 46: ...ct the factory to discuss the specifics of your application A supply of coolant is necessary for AGV HP O models furnished with the WC water cooling option This feature requires a source of distilled...

Страница 47: ...nditions that are approved in this manual Electrical installation requirements will depend on the ordered product options Installation instructions in this section are for Aerotech products equipped w...

Страница 48: ...arrive from the factory completely wired and assembled The AGV scan heads contain galvano motors with dual analog encoder feedback Both the primary and secondary position feedback signals of each gal...

Страница 49: ...4 SIN1 Encoder Sine 1 15 COS1 Encoder Cosine 1 16 5V Common Ground 17 SIN2 Encoder Sine 2 18 COS2 Encoder Cosine 2 19 CCW LMT The limit signal that shows the maximum permitted machine travel in negati...

Страница 50: ...factory Contact your Aerotech representative if you have any questions on system configuration For cable drawings refer to the documentation that shipped with your system Table 3 3 Aerotech Motor and...

Страница 51: ...Figure 3 1 Motor and Feedback Wiring AGV HP O Hardware Manual 3 2 Motor and Feedback Wiring www aerotech com 51...

Страница 52: ...coder 1 Vpk pk into 120 Load differential signals SIN SIN COS COS are 5 V pk pk relative to ground Encoder Resolution 4096 lines revolution Motor Specifications AGV10HP O AGV14HP O AGV20HP O AGV30HP O...

Страница 53: ...ming direction of a stage is set by the controller that is used to move the stage The galvo motors for each axis have internal electrical limits for both positive and negative machine direction motion...

Страница 54: ...Figure 3 4 BE2 Galvo X Axis Machine Direction front Figure 3 5 BE2 Galvo Y Axis Machine Direction side 3 4 Limits Marker and Machine Direction AGV HP O Hardware Manual 54 www aerotech com...

Страница 55: ...3 5 Feedback Phasing Figure 3 6 Analog Encoder Phasing Reference Diagram AGV HP O Hardware Manual 3 5 Feedback Phasing www aerotech com 55...

Страница 56: ...This page intentionally left blank 3 5 Feedback Phasing AGV HP O Hardware Manual 56 www aerotech com...

Страница 57: ...Use the system application s and conditions duty cycle speed and environment to define the inspection interval Monthly inspections should include but not be limited to l Visually inspect the galvo co...

Страница 58: ...mponent lifetime The cleaning procedure for the AGV HP O is intended to help prolong the component lifetime IMPORTANT Wear clean powder free gloves when you handle optical components DANGER Make sure...

Страница 59: ...sensitive and should only be cleaned when it is absolutely necessary and only by experienced personnel In many cases minor imperfections in the surface of the mirror can be less harmful than the surfa...

Страница 60: ...ion 3 2 and the controller documentation Scanners oscillate or squeal Gains not optimized Refer to the controller documentation for tuning instructions Encoder signals not optimized Refer to the contr...

Страница 61: ...ation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerote...

Страница 62: ...rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site N...

Страница 63: ...lectrical Specifications and Installation with new motor specifications 1 04 Revision changes have been archived If you need a copy of this revision contact Aerotech Global Technical Support 1 03 1 02...

Страница 64: ...This page intentionally left blank Appendix B Revision History AGV HP O Hardware Manual 64 www aerotech com...

Страница 65: ...Recommended 57 cleaning the turning mirrors 59 compressed air 45 coolant 46 D Dimensions 27 Directive 2006 42 EC 13 E Electrical Installation 47 EN 60204 1 2010 13 EN ISO 12100 2010 13 EU 2015 863 13...

Страница 66: ...al number 26 Service and Inspection Schedule 57 solvents 57 stabilizing stage 26 stage stabilizing 26 T Table of Contents 3 Temperature Effects 20 Turning Mirrors 59 U Unpacking and Handling the Scan...

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