Mechanical Specifications and Installation
AGR Hardware Manual
2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to
and the documentation delivered with the stage.
N O T E :
If your AGR was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the AGR is started up
without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E :
For valid system performance, the mounting interface should be flat within 10 µm.
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure).
If cantilevered loads are applied, refer to
through
to find the maximum allowable load.
32
Chapter 2
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Содержание AGR Series
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