Wyko NT3300 Operating Instructions Manual Download | Manualshive

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OPERATING INSTRUCTIONS

FOR

Wyko NT3300

Optical 3D Profiling System

UCLA Nanoelectronics Research Facility

420 Westwood Plaza

14-131A Engineering IV Building

Los Angeles, CA 90095

Rev. 01/28/05

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Summary of Contents for NT3300

Page 1: ...OPERATING INSTRUCTIONS FOR Wyko NT3300 Optical 3D Profiling System UCLA Nanoelectronics Research Facility 420 Westwood Plaza 14 131A Engineering IV Building Los Angeles CA 90095 Rev 01 28 05 ...

Page 2: ...necessary to successfully acquire and interpret your measured data System The automated Wyko NT3300 system consists of two parts an operator control station and a motorized sample station figure on the front cover The sample station houses the optical lenses translation motors and computer The operator control tray shown in Fig 1 has a joystick for controlling the x y motorized stage and the motor...

Page 3: ...ode a piezoelectric transducer PZT within the IOA head precisely shifts the interference pattern six times each shift is captured to produce one frame of data These frames are then reconstructed to form a topographical map of the measured surface II Starting the Wyko 1 Check the logbook to verify that there are no documented problems with the Wyko 2 Make sure to sign the logbook BEFORE every use 3...

Page 4: ...e visible on this surface 9 Hold down the Tilt button and use the Tilt and Tip knobs to orient 3 4 fringes perpendicular to the step 10 Now setup the hardware for the final focusing by going under HARDWARE FILTER VSI then readjust your final focus and intensity The intensity should be set to just below the saturation limit of the CCD camera 11 Select the CALIBRATE box from the Measurement Options ...

Page 5: ...ded to avoid saturation using the slidebar Once you find the best focus at the TOP of the feature step dark fringes should now be visible on this surface 8 Hold down the Tilt button and use the Tilt and Tip knobs to orient 3 4 fringes perpendicular to the step 9 Now setup the hardware for the final focusing by going under HARDWARE FILTER VSI then readjust your final focus and intensity 10 After yo...

Page 6: ...he best focus on the mirrors surface Dark fringes should now be visible on this surface 9 Hold down the Tilt button and use the Tilt and Tip knobs to display 3 4 fringes 10 Now setup the hardware for the final focusing by going under HARDWARE FILTER PSI HIGH MAG then readjust your final focus and intensity The intensity should be set to just below the saturation limit of the CCD camera 11 Select t...

Page 7: ... FILTER PSI HIGH MAG then readjust your final focus and intensity The intensity should be set to just below the saturation limit of the CCD camera 11 Change any PSI Options at this time For multiple measurements under Averaging check the ON box For Modulation Threshold see definitions 11 After setting all options Select OK from the Measurement Options window 12 Close the intensity window 13 To mea...

Page 8: ...l four corners of your desired area to be measured Click Finish when done 5 You may have to re enter or re Teach the dimensions of your die if any part of the measurement area was outside the corners of the test pattern IV Turning off the Wyko If you will not be using the Wyko within the next hour or the time is after 5pm please shut down the machine as follows 1 Close Wyko Vision 3 22 2 Close win...

Page 9: ...Download Veeco Vision 3 43 www nanolab ucla edu downloads vision zip ...

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