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No.29700-2-03-8 

 
 
 
 
 
 
 

 

 
 
 

 
 

High Vacuum Diaphragm Type 

Dry Vacuum Pump 

 
 
 
 
 

DTU-20x 

 

(X: A=100V, B=115V, C=200V, D=220V, E=230V) 

 

 
 
 
 
 

 

Request to Users 

Please read this manual thoroughly to ensure safe and 
effective use of the equipment. 
Keep this manual in a safe place. 
Due to periodic improvements in performance, the 
equipment described in this manual is subject to 
changes in dimensions and specifications without prior 
notice. 

 

 
 
 
 
 
 

ULVAC KIKO ,Inc. 

 

Instruction Manual

 

Summary of Contents for DTU-20 Series

Page 1: ...sers Please read this manual thoroughly to ensure safe and effective use of the equipment Keep this manual in a safe place Due to periodic improvements in performance the equipment described in this m...

Page 2: ...nd vacuum pumps Safety requirements Part2 Vacuum pumps IEC EN 61010 1 2010 A1 2019 Safety requirement for electrical equipment for measurement control and laboratory use Part1 General requirement foll...

Page 3: ...nformity with the following standards BS EN 1012 2 1996 A1 2009 Compressors and vacuum pumps Safety requirements Part2 Vacuum pumps BS IEC EN 61010 1 2010 A1 2019 Safety requirement for electrical equ...

Page 4: ...n 4 3 3 Installation location 4 3 4 Electric wiring 5 3 5 Fluctuations in the power voltage and frequency 5 3 6 Piping 6 3 7 Storage 6 4 Caution in Operation 7 4 1 Caution in Operation 7 4 2 When Ther...

Page 5: ...t information service bases and contact information Drawing List Fig 2 1 DTU 20 Appearance 3 Fig 3 1 Change region of the voltage and frequency 5 Fig 3 2 Piping Example for Evacuation of Container 6 T...

Page 6: ...pment correctly Read the section on Safe Use particularly closely Keep This Manual in a Safe Place After reading this manual be sure to keep it in a safe place which is readily accessible to others ne...

Page 7: ...ed to inlet and outlet x 2 3 Is the pump damaged in any way 4 Are any external screws or inlet and outlet pipes loose Are any components missing Contact your agent or the sales division of the manufac...

Page 8: ...r Incorrect handling of the equipment may result in death or serious injury to the operator Incorrect handling of the equipment may result in light or medium injuries to the operator or damage to the...

Page 9: ...or the human body like the noxious fume and the environment is exhausted in the vacuum with this pump There is causing the poisoning accident and the fatal accident at that time when the vehicle exha...

Page 10: ...s equipped with a cord having a grounding wire with an appropriate grounding plug the plug must be plugged into an outlet that is properly installed and grounded in accordance with all local codes and...

Page 11: ...this may result in the motor burning out or fire 10 Do not damage modify pull the power cord or place objects on it Damage to the cord may result in electric shock or fire 11 Always fully insert the...

Page 12: ...g components eg motor main shaft axial joints cooling fan while the pump is in operation may result in injury 6 The overload protector operates when the pump becomes excessively hot Touching it in thi...

Page 13: ...r compressed and gases into the pump will result in damage and prevent proper operation 7 Ingestion of rubbish and dust in the air entering the pump will interfere with its proper function If the air...

Page 14: ...pump It is recommended to wipe off chemicals attached regardless description in the followings Acetone Ethyl ether Ethyl acetate Flora and fauna oil etc 5 Never absorb the gas that mixed dust dust mo...

Page 15: ...owever the condensable gas remains in the pump chamber if large quantity of condensable gas is exhausted or after having exhausted condensable gas without opening a gas ballast valve because of a limi...

Page 16: ...2 Appearance Fig2 1 DTU 20 Appearance...

Page 17: ...No danger of fire i When Equipment is installed temperature in pump circumference shall not exceed 40 104 degF 3 3 Installation location Select a location where dust and moisture are small and install...

Page 18: ...the voltage change and frequency change in Domain A in main rated values it operates continuously and can be used practically convenient and to the voltage change and frequency change in Domain B it...

Page 19: ...f selecting the inlet pipe and exhaust pipe that are not from our products please select the exhaust pipe that has same or larger inner diameter length with the inlet pipe 6 When connecting a pipe to...

Page 20: ...perated at first turn off the pump power supply push to side and disconnect power cable Contact Ulvac or local agent Temperature of the pump is very high at this time Do not touch the pump by hand def...

Page 21: ...follow the procedure described below 1 Open the inlet port to atmosphere and repeat switch ON OFF two or three times until the pump starts If still it does not start warm up the ambient temperature t...

Page 22: ...and piping make the ultimate pressure higher 2 Ultimate pressure becomes higher in case there is resource of gas such as vacuum leakage in the vacuum route 5 2 Exhaust velocity Flow rate of the diaph...

Page 23: ...ion 1 Replacement of diaphragms 2 Replacement of valves 6 2 Maintenance During an operation of the vacuum pump check the following items at least once in 3 days 1 Generation of abnormal noise 2 Abnorm...

Page 24: ...s List Part name Quantity Material Reference life Diaphragm 4 Main body Synthetic rubber EPDM Parts exposing to gas PTFE 6 000 hr Valve 6 FFKM 6 000 hr Valve With hole 2 Bearing 1 set 15 000 hr Kalrez...

Page 25: ...air and there is a risk to go into the human body when breathing Confirm that pump power source is disconnected from outlet or terminal blocks before conducting replacement work without fail Confirm...

Page 26: ...pper and lower 1 Panel Both sides 6 Opposite side 13 mm 0 5 spanner insertion openings 4 positions 7 Casing cover 5 Handle 1 Replacement of diaphragm valves It is recommended to replace all sheets at...

Page 27: ...ntation as shown in right drawing Upper level pump head mounting direction Notch direction Mount the lower level valve in orientation as shown in left drawing Lower level pump head mounting direction...

Page 28: ...phragm and tighten with a spanner of opposite side 13 mm 0 5 lightly Afterwards tighten with a torque spanner in 4N m as final tightening 11 Align a direction of the pump head and attach it on the dia...

Page 29: ...right and switch plug terminal and ground simultaneously 19 Attach Handle 20 In the last confirm whether screws or valves besides the parts replaced are not left If anything left it would be conceiva...

Page 30: ...de inspection of pump head 15 Abnormal bearing 15 Replacement 6 4 16 Miscellaneous Damage of pump internal parts 16 Overhaul replacement of damaged parts 6 4 Pressure failed to drop 1 Pump is small fo...

Page 31: ...in the status that absorption gas pressure is high 1 Do not conduct continuous operation in vicinity of atmospheric pressure 2 Absorption gas is high temperature 2 Mount refrigerating machine such as...

Page 32: ...and inspection etc d Malfunctions caused by modifications or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused...

Page 33: ...US 13 L form nipple 1 PP 43 Setscrew 4 SUS 14 Valve retainer 1 1 Fluoroplastics 44 Pan machine screw 6 SUS 15 Valve retainer 2 1 Fluoroplastics 45 Setscrew 4 SUS 16 Gas ballast nipple 1 PP 46 Pan mach...

Page 34: ...Exploded view...

Page 35: ...Industrial Safety and Health Law designates particular substances as the materials to be notified 2 Usage Status Operation Method Approx hours per day years and months Continuous Operation Intermitte...

Page 36: ...C KIKO Inc https ulvac kiko com en Please contact us for products Service Base or other Inquiries from here ULVAC Inc Components Business HQ 2500 Hagisono Chigasaki Kanagawa 253 8543 Japan TEL 81 467...

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