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No.29700-2-03-8
High Vacuum Diaphragm Type
Dry Vacuum Pump
DTU-20x
(X: A=100V, B=115V, C=200V, D=220V, E=230V)
Request to Users
Please read this manual thoroughly to ensure safe and
effective use of the equipment.
Keep this manual in a safe place.
Due to periodic improvements in performance, the
equipment described in this manual is subject to
changes in dimensions and specifications without prior
notice.
ULVAC KIKO ,Inc.
Instruction Manual
Summary of Contents for DTU-20 Series
Page 16: ...2 Appearance Fig2 1 DTU 20 Appearance...
Page 34: ...Exploded view...