![background image](http://html1.mh-extra.com/html/ulvac/dis-90/dis-90_instruction-manual_4492037001.webp)
Instruction Manual (Original Instructions)
Oil-free Scroll Vacuum Pump
DIS-90
Before use, be sure to fill in the blank spaces below for future repair and after-service.
Serial No.
Who sold it to you
Purchase date
When you began
operation
This instruction manual includes very important warnings, cautions and operating
procedure in order to operate this pump safely and efficiently.
Be sure to read this instruction manual thoroughly and fully understand before
operation.
After reading it, store it in a convenient place for immediate and future reading.
CA72161370
Summary of Contents for DIS-90
Page 28: ...27 8 2 Dimensions...
Page 29: ...28 8 3 Performance data Inlet Pressure Pa Pumping Speed L min...
Page 30: ...29 Memo...