Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe, Germany
Phone: +49 721 4846-0, Fax: +49 721 4846-1019, E-mail: [email protected]
MP134E
Q-522 Miniature Stage
User Manual
Version: 1.0.1
Date: 23.08.2019
This document describes the following
products:
Q-522.xyz
Q-Motion Miniature Linear Stage,
Piezoelectric Inertia Drive
x: Travel range
0
= 6.5 mm
1
= 13 mm
2
= 26 mm
y: Equipment with a sensor
0 = without sensor
3 = with sensor, sensor resolution 4 nm
4 = with sensor, sensor resolution 1 nm
z: Suitable for vacuum
0 = suitable to 0.1 hPa
U = suitable to 10
-9
hPa
