Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws
PZ244E
P54x Nanopositioner
User Manual
Version: 1.2.0
Date: 27.07.2020
This document describes the following products:
P541.2 / P542.2
XY nanopositioning system with large aperture
P-541.2xx, 100 µm × 100 µm
P-542.2xx, 200 µm × 200 µm
P-541.2DD, 45 µm × 45 µm, direct drive
P541.Z
Nanopositioner Z stage with large aperture
P-541.ZCD, 100 µm, direct position measuring
P-541.ZSL, 100 µm
P-541.Z0L, 150 µm
P541.T
Nanopositioner and tip/tilt stage with large
aperture
P-541.TCD, 100 µm / 0.8 mrad, parallel
metrology
P-541.TSL, 100 µm / 0.8 mrad
P-541.T0L, 150 µm / 1.2 mrad
Model-specific properties:
Integrated sensor:
Capacitive sensors: 2CD, 2CL, 2DD, ZCD, TCD
Strain gauge sensors: 2SL, ZSL, TSL
Without sensor: 20L, Z0L, T0L
Sensor / voltage connector:
D-sub 25W3 (m): 2CD, 2DD, TCD
D-sub 7W2 (m): ZCD
LEMO: 2CL, 2SL, 20L, ZSL, Z0L, TSL, T0L
