Pfeiffer Vacuum TMH 1601 P C Operating Instructions Manual Download Page 1

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Turbomolecular Drag Pumps

With Electronic Drive Units TC 600

800 506 BE/H (0503)

TMH 1601 P / TMU 1601 P
TMH 1601 P C / TMU 1601 P C

Betriebsanleitung • Operating Instructions

Summary of Contents for TMH 1601 P C

Page 1: ...Turbomolecular Drag Pumps With Electronic Drive Units TC 600 PM 800 506 BE H 0503 TMH 1601 P TMU 1601 P TMH 1601 P C TMU 1601 P C Betriebsanleitung Operating Instructions ...

Page 2: ... 12 3 12 Connecting The Temperature Management System TMS 12 3 13 Connections Diagram 13 4 Operations 14 4 1 Filling In The Lubricant 14 4 2 Before Switching ON 14 4 3 Switching ON 15 4 4 Gas Type Dependent Operations 15 4 5 Circulatory Lubrication 16 4 6 Switching OFF And Venting 16 4 7 Shutting Down For Longer Periods 16 4 8 Operations With The DCU 001 DCU 600 16 4 9 Operations With The Remote C...

Page 3: ...ssory The unit has been accredited protection class IP 30 When the unit is operated in environments which require other protection classes the necessary measures must be taken Protection class IP 54 is afforded by retro fitting a cover plate accessory to the TC 600 The mains connection must be subject to a safe connection to the PE protection class 1 If the turbopump and the TC 600 are operated se...

Page 4: ...1601 PC may only be used for the purpose of generating vacuum The Turbomolecular Pumps TMH TMU 1601 PC please see the rating plate are designed to pump corrosive gases and vapours Where corrosive gas processes are involved gas bonding and particels which can damage the surfaces of the pump can be produced The motor and bearing compartments have to be protected with sealing gas The turbopumps may o...

Page 5: ...greed by the manufacturer The connection to power units with earthing of a direct voltage pole Improper use will cause all claims for liability and guarantees to be forfeited 2 2 Differences Between The Pump Types TMH TMU 1601 P Standard version TMH TMU 1601 PCCorrosive gas processes version Feature TMH 1601 P TMU 1601 P TMH 1601 PC TMU 1601 PC High vacuum flange ISO K CF F High vacuum seal Elasto...

Page 6: ...lete set of M8 screws or underside of the pump with 4 screws M8 screws quality 8 8 WARNING 3 2 Installing The Pump Connecting The High Vacuum Side The utmost cleanliness must be observed when fitting all high vacuum parts Unclean components prolong the pumping time Use a splinter shield The use of a splinter shield please see Accessories in the high vacuum flange protects the turbopump against for...

Page 7: ...nwards CAUTION Permissible installation positions for the turbopump 11 Vacuum chamber The maximum loading capacity of the high vacuum flange is 2000 N equivalent to 200 kg Asymmetric loading on the high vacuum flange must be avoided If the pump is being installed horizontally The fore vacuum flange of the turbopump must be aligned vertically downwards maximum deviation 15 otherwise the turbopump c...

Page 8: ... in respect of the standard version turbopump The cooling water can be drawn either From the cooling water mains or From Recycled Water Cooling Unit TZK in closed circuit Cooling from the cooling water mains To prevent deposits collecting in the pump the cooling water must be filtered Minimum cooling water requirements Mechanically clean optically clear no turbidity no sediment chemically neutral ...

Page 9: ... RS 485 CAUTION The maximum pressure at the venting valve is 1 5 bar absolute Please refer to Operating Instructions PM 800 507 BN for details on Venting Valve TVF 005 CAUTION 3 6 Connecting The Casing Heating Unit Accessory Heating turbopumps and vacuum chambers accelerates the attainment of final pressures The heating period is dependent on the level of contamination and the required final press...

Page 10: ...Unit DCU 001 DCU 600 the remote plug 8d on the TC 600 should be disconnected and then proceed in accordance with Operating Instructions PM 800 477 BN CAUTION PLEASENOTE 3 8 Installing The Power Unit Voltage may only be supplied with the Pfeiffer Vacuum power units please see Accessories The use of other power units requires the prior agreement of the manufacturer and equalization with the valid sp...

Page 11: ...tp pu ut t l lo ow w O Ou ut tp pu ut t h hi ig gh h collective malfunction message malfunction free operations output can be loaded with 24 V 50 mA 10 Mass ground 3 9 Connecting The Sealing Gas Valve To protect the pump particularly where corrosive or dust producing processes are involved it is necessary to use sealing gas Connection is made via the sealing gas valve please see Accessories Please...

Page 12: ... be heated to a maximum of 90 C in the Holweck stages range with the heaters and temperature sensors TMS integrated in the middle casing During TMS operations the turbopump must be operated with water cooling During TMS operations the additional flange heating for the turbomolecular pump is not possible CAUTION PLEASENOTE WARNING The electrical connections are internally optically decoupled Descri...

Page 13: ...8 8P 8 5 8K8L MN8 8LOV X 5J dBCE eEQEDBL8L MN I8LO8K8dBCE eE O K F3 8 UF H H H A Q BM _SCR E_ CR CR8 _SCR K K H 8 O E_ CR CR8 BDTSLT P K K H V8 O OCQ1YASZ8 BDTSLT A Q BM BDTSLT 8PWL Mf IOV WgU X ASE CE A 8 h h 9 H dBCE eE SQR CR8 4831Y AETSCeE8 DD 1YE dBCE eE SQR CR8 483 LL A YA D OC ABR SQR CR8 8 5 8f8 8c8J C2K 8i8 8ej I I O H k E D F I H H CN1N CN1N E_ CR CR E_E A P H K I V8 O 38000K5 U8000 0 31...

Page 14: ...an permeate the fore vacuum chamber and cause contamination 4 2 Before Switching ON Sections 4 2 to 4 6 refer only to operating the pump in its condition on delivery without the DCU operatimg unit The bridges venting release motor TMP ON and pumping station ON are fitted in the remote control plug Please refer to Section 4 8 regarding the switching on with the Operating And Display Control Unit DC...

Page 15: ...missible power and gas friction is attained The power limitation serves to protect the pump against thermal over loading In order to avoid rotation speed fluctuations it is recommended to set in rotation speed setting mode the equilibrium frequency or a somewhat lower frequency There can be types of pump whereby there is no differentiation between the two gas modes settings PLEASENOTE WARNING Bl D...

Page 16: ...There is a danger of personal injury resulting from coming into contact with process gases Before removing a turbopump from the system first Vent the turbopump with a neutral gas or dry air Ensure that there is no residual process gas in the system nor in the feeder lines WARNING If the turbopump is to be shut down for more than a year Remove turbopump from the system Change the lubricant see Sect...

Page 17: ... test has been successfully completed duration approximately 20 seconds Heating Reset Heating optional Once the rotation speed switchpoint is attained the heating unit is switched on when the rotation speed switchpoint is fallen below the heating unit is switched off Reset The heating input has two functions please refer to the table in Section 3 10 point 5 Reset Standby The pump can be operated o...

Page 18: ...on speed switchpoint and results in the turbomolecular pump being switched off LED on the TC 600 glows red Collective malfunction L LE ED D C Ca au us se e glows green Power unit OK Function pumping station ON carried out flashes green Power unit OK Pumping station OFF blinks green Mains power supply failure glows red Collective malfunction for example start up time error excess temperature turbop...

Page 19: ...mal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient temperature too high Reduce ambient temperature Lubricant or lubricating pump dirty Carry out lubricant change as per Section 7 1 or clean the lubricating pump as per Section 7 2 Lubricant deficiency Check lubricant ...

Page 20: ...ubricating Pump If following a malfunction the pump does not accelerate to its operational rotation speed on account of insufficient lubri cant the lubricating pump must be cleaned The Electronic Drive Unit TC 600 must only then be disconnected from the turbopump when the pump is at a standstill and the TC 600 is disconnected from the power supply Drain lubricant and dispose of as described in Sec...

Page 21: ...es 18 Cooling plate 19 Hollow screw 19a Flat sealing 64 Lubricant reservoir 71 Lubricant filler screw 72 Lubricant drain screw 73 Sight glass 74 O ring 75 O ring 76 O ring 77 Lubricating pump 79 Floater 80 Pin 81 Flange 82 Securing screw 8 pieces 83 Plug 94 Contact 100 Flange 101 Seal 103 Sieve 9 9 9 H 9 K9 K 9 K9 K 9HK9I ...

Page 22: ...reparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Fill out the declaration of contamination In every case the Declaration of Contamination must be completed diligently and truthfully A copy of the completed declaration must accompany...

Page 23: ...0 1200 1100 1210 Hydrogen H2 l s 750 900 750 900 Compression ratio for N2 1011 109 He 2 107 1 105 H2 2 105 5 103 Maximum fore vacuum pressure N2 mbar 14 5 He mbar 12 4 5 H2 mbar 6 2 Maximum gas throughput1 2 3 with HV pressure of 0 1 mbar N2 mbarl s 22 24 Ar mbarl s 27 with nominal rotation speed water cooling N2 mbarl s 12 18 Ar mbarl s 7 12 with voltage range 90 132 VAC N2 mbarl s 9 15 Vertex po...

Page 24: ...rding to the temperature the values are available on request 5 In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure which is attained in a measuring dome 48 hours after baking out 6 See rating plate 7 With maximum gas throughput 8 Protection class IP 54 is afforded for the Electronic Drive Unit TC 600 by retro fitting a cover plate accessory Ø295 DN 200 CF F D...

Page 25: ...te plug 1 P 0920 668 E 17 USIT ring 1 P 3529 133 A 19a Flat sealing Cu 2 P 0995 294 71 Lubricant filler screw 1 N 3191 382 X 72 Lubricant drain screw 1 N 3191 382 X 73 Sight glass 1 PM 003 251 74 O ring 2 36 x 2 P 4070 594 PV 75 O ring 2 6 x 2 2 P 4070 088 PV 76 O ring 2 22 x 3 P 4070 384 PV 77 Lubricating pump 1 for F3 PM 083 449 AT 79 Floater 1 PM 033 306 X 87 O ring 1 44 x 3 P 4070 703 PV 101 O...

Page 26: ... TMH TMU 1601 P 24 VDC PM Z01 250 PM 800 543 BN C Co om mp po on ne en nt ts s f fo or r v ve en nt ti in ng g Venting Valve TVF 005 without current closed 24 VDC PM Z01 135 PM 800 507 BN Drying Unit TTV 001 PM Z00 121 PM 800 022 BN filled with zeolite Venting flange DN 10 ISO KF PM 033 737 T C Co om mp po on ne en nt ts s f fo or r h he ea at ti in ng g Casing Heating Water coolind required 230 V...

Page 27: ...ZA UL plug 208 V P 4564 309 ZF UL plug 115 V P 4564 309 ZE Operating and Display Control Unit DCU 001 PM 041 816 T PM 800 477 BN Relay box backing pump 5 A PM 041 937 AT PT 800 030 BN 20 A PM 041 938 T PT 800 030 BN PWM adapter box PM 051 028 U PM 800 563 BN Cover plate for TC 600 IP 54 PM 051 327 T PT 0024 BN Profibus DP gateway TIC 250 PM 051 257 T PM 800 599 BN Level converter RS 232 485 PM 051...

Page 28: ...vice of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to accept any equipment without a declaration This declaration can only be completed and signed by authorised and qualified staff 1 Description of component Equipment type model _________________________ Code No _______________...

Page 29: ...hat the product specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in accordance with the provision of EU Directive 98 37 EEC Annex II B We certify conformity with EU Electromagnetic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EEC Produkt Product TMH 1601 P...

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