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Automated IC Inspection Microscope

Automated IC Inspection Microscope L200A

Summary of Contents for Eclipse L200A

Page 1: ...Automated IC Inspection Microscope Automated IC Inspection Microscope L200A ...

Page 2: ...contamination free inspections Cursor keys LCD screen DIC adjustment knob Aperture keys Darkfield key Brightfield key Option keys Objective selection keys Enter key Menu key Focus dial Focus Coarse Fine changeover key AF MF changeover key Focus fine adjustment knob When AF is ON Lamp intensity Auto Manual changeover key Lamp intensity control knob Motorized remote control minimizes the chance of c...

Page 3: ...L860 Local PC DART Software Other Software Other Euipment Local Local RS232C Binary RS232C Binary RS232C SECS L200A DIC Confocal DUV Filing System Host Computer Auto In spection Machine 4 5 In combination with wafer loaders Of course the L200A can be configured with Nikon s NWL 860 series of wafer loaders and manual or motorized scanning stages to create a wafer inspection system at a minimum cost...

Page 4: ...n s renowned CFI60 optics are the fusion of CF design and infinity optics These new optics feature longer working distances and high N A s They also produce brighter images with more contrast and reduced flare Optical System A tilting trinocular eyepiece tube with a lower eyepoint designed to be closer to the operator allows you to sit in a more natural erect position Microscope controls located c...

Page 5: ...extuple universal nosepiece centarable Highly durable Stage 8x8 Stage Cross travel 205 x 205 mm Coarse fine movement changeover manual Wafer holders 4 8 in Mask holders 4 6 in Control Front panel Nosepiece rotation buttons Episcopic aperture diaphragm stop buttons Light intensity control knob Remote control LCD panel Magnification changeover Motorized Z axis Episcopic aperture diaphragm stop butto...

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