Koganei Flow FSU, Manual

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799
Not affected by piping resistance
A. S. OUT
S.W.OUT
ch
1 2 3 4
PSU
A single controller detects four points at the same time
A. S. OUT
S.W.OUT
ch
1 2 3 4
PSU
RS232C
Output Mode
Three types of sensor heads, depending on flow rate range
Connectable to a personal computer
●
Use a PC to perform flow rate setting, capture of flow rate
value, and reference flow rate setting.
●
Three types are available,
including
–500
〜
500 m
R
/min (ANR),
[–30.5 〜 30.5 in. 3 /min.]
–3
〜
3
R
/min (ANR),
[–0.11 〜 0.11 ft. 3 /min.]
and 0
〜
10
R
/min (ANR),
[0 〜 0.35 ft. 3 /min.]
.
●
Since the flow rate sensor head is not affected by piping
resistance, there is no restriction on mounting position.
Flow rate sensor
Pressure sensor
Measurement results using φ 1.8 [0.071 in.] tube
※ Based on Koganei test standard.
Measurement point 2
0.12
R
/min [0.0042 ft. 3 /min.]
−
95 kPa [
−
13.8 psi.]
Measurement point 1
0.11
R
/min [0.0039 ft. 3 /min.]
−
78 kPa [
−
11.3 psi.]
100 mm
[3.94 in.]
2000 mm [78.7 in.]
100 mm
[3.94 in.]
Measurement
point 1
Nozzle hole
diameter
0.1 mm [0.004 in.]
Measurement
point 2
Vacuum
source
− 98 kPa
[
−
14.2 psi.]
Switch
output
L（
R
/min）
L1
L2
Hysteresis
ON
t
Discharge to
atmospheric
pressure
Vacuum
valve ON
Workpiece
lifted by
vacuum
Vacuum
break
L（
R
/min）
L2
L1
Δ L
Reference flow rate capture
ON
t
Switch
output
Hysteresis
Discharge to
atmospheric
pressure
Vacuum
valve ON
Workpiece
lifted by
vacuum
Vacuum
break
L（
R
/min）
L1
L2
ON
t
Switch
output
Hysteresis
Hysteresis
Discharge to
atmospheric
pressure
Vacuum
valve ON
Workpiece
lifted by
vacuum
Vacuum
break
●
Window comparator mode 2
• When L1 has been set, this mode maintains it unchanged until reference
flow rate capture is performed again.
●
Window comparator mode 3
• Each time the L1 setting is deleted when switch output goes OFF, this
mode performs reference flow rate capture and sets L1.
Effective for situations where flow rate fluctuation is severe.
When using window comparator mode 3, use RS232C to perform
reference flow rate capture from outside.
■
Window comparator mode 4
• Mode for freely setting L1 and
L2.
■
Window comparator mode 2 and 3
• Modes for automatically
setting L1, using Δ L setting
and reference flow rate
capture. (L1
＝
Reference
flow rate
−Δ
L)
■
Window comparator mode 1
・ Mode for freely setting L1
and L2.
Note, however, that switch
output does not go ON while
flow rate is increasing.
Multi-channel Flow
Rate Sensor Controllers
The Flow rate sensor detects workpieces lifted by vacuum
that could not be detected by the pressure sensor.