JEOL JSM-T200 Instructions Manual Download

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Summary of Contents for JSM-T200

Page 1: ...7912003KP INSTRUC1 IONS I dEDL JSM T200 SCANNING MICROSCOPE No ISM T200 1 EP165001 JEOL LTD JEOL TECHNICS LTO Tokyo Japan...

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Page 3: ...rable to those obtainable by a large instrument can be readily obtained without any special skill These features together with the various advantages peculiar to the scanning microscope such as very l...

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Page 5: ...exposure marker 3 8 3 3 4 Astigmatism correcti on 3 9 3 3 5 Automa tic focus mode 3 10 3 4 FULL AUTO SEM image 3 10 3 5 Photography 3 11 3 5 1 Photographic recording systems 3 11 3 5 2 Photogr aphing...

Page 6: ...1 6 1 Column 6 1 6 1 1 Disassembly and reassembly 6 1 6 2 Cleaning 6 2 6 2 1 Cleaning materials tools etc 6 2 6 2 2 Cleaning frequency and procedures 6 3 6 2 3 Cleaning methods 6 3 APPENDICES A 1 Spec...

Page 7: ...specimens specimen thickness being of no consequence specimen preparation is easy In addition to which the depth of focus is large thereby enabling 3 D observation The operational principle of the sca...

Page 8: ...1 2 Electromotive force Fig 1 2 Specimen 1 Q Absorbed electrons Transmitted electrons Q J J g 2 CIJ J CIlQ I H Q Signals emitted by specimens T200...

Page 9: ...nd objective lens Mechanical 8 pole electromagnetic type Up to 10 m 25 kV in any direction electromagnetic joystick control Specimen stage twin stage Specimen stage I Eucentric specimen stage II Large...

Page 10: ...shutter and shutter button CSI l CSI 2 CSI 3 CSI 4 Visual TV scan 0 2 0 33 10 sec frame Line scan 0 2 0 33 10 sec frame Record 60 sec frame 35 x to 100 000x 23 steps series of 35 50 75 100 150 200 35...

Page 11: ...oration built in Service outlet built in 100 V 2 A used for operating optional attach ments The instrument can be wheeled on its own casters 100 V 50 60 Hz single phase 2 kVA basic instrument 1 2 kVA...

Page 12: ...nd weight o o o N t o o 2 000 600 1 100 I Distribution board I I KS2P30A GrOUnid terminal c Faucet Y Drain Water hose I I I I Line cable terminal Table height 750 mm Column r I Specimen stage I I J Op...

Page 13: ...2 1 CHAPTER 2 DESCRIPTION OF MAIN UNITS Column Checker anel Specimen stage Attachment housing Control panel Power switch Vacuum control switch Fig 2 1 General view of T200 T200...

Page 14: ...cover f screw Lar Eucentric specimen stage fixin screw Twin s Eucentric Front cover ecimen chamber WD selection switch Fig 2 2 Column and specimen stage Electron un Evacuation e Vacuum control switch...

Page 15: ...as follows o PUMP DOWN VENT Lights up and remains lit during column evacuation Lights up when the specimen chamber is exposed to the atmosphere 2 3 AUTOMATIC The following lamps light up indicating th...

Page 16: ...up when an accelerat ing voltage is applied to the electron gun and the respective lamps light up in accordance with the selected voltage The selected voltage is printed out on the film The respective...

Page 17: ...meter reading at each position 2 5 2 The POSITION selector enables the operator to monitor 21 voltages and currents including the above six main power supply voltages and various other operational par...

Page 18: ...ERO CHECK 2 POWER AC 200 V 3 VACUUM 6 V 4 LOAD CURR 200 JlA 5 CRT HT 20 kV 6 78 V 7 78 V 8 30 V 9 30 V 10 10 V 11 60 V 12 60 V 13 60 V 14 60 V 15 48 V 16 1100 V 17 CL CURR 2 A 18 OL CURR 2 A 19 15 V 2...

Page 19: ...f slow scan and TV scan images CD IIMAGEIISIZEI buttons EXP For image focusing astigmatism correction and exposure determi nation by Rapid Exposure Marker PHOTO For checking the photographing area FUL...

Page 20: ...kwise clicking position CONTRAST and IBRIGHTNESS controls These controls adjust the image contrast and brightness When the IMAGE SIZEI Expi button is depressed a rapid exposure marker appears on the C...

Page 21: ...OWER IIOFF I switch 2 If the microscope is going to be out of use for a prolonged period of time be sure to evacuate the column to prevent corrosion 2 Turn off the mains power switch wait 10 to 15 min...

Page 22: ...stub fixing screw Figs 3 2 and 3 3 Caution If the specimen surface is not flush with the holder rim the actual and displayed magnifications will differ difference increasing as the working distance is...

Page 23: ...w out the front cover after first setting the tilt control to 0 3 Set the eucentric stage Y control to 20 mm 4 Insert the specimen in the holder adjust the specimen height adjust screw so as to make t...

Page 24: ...the center of the specimen holder Specimen holder fixing screws xC Make the specimen surface y J Front J i flush with the holder rim r WD 48 rom J Specimen fixing screw use 1 5 rom hexagonal key wren...

Page 25: ...00 Checker panel ISEII switch Depress Control panel FILAMENT I control Fully counterclock wise IACCELERATING VOLTAGEI control 25 kV gOT SIZEI control 7 0 clock position ICONTRAST I control Set so that...

Page 26: ...ul tant waveform goes beyond the screen area lower the waveform by turning the IBRIGHTNESSI and or ICONTRAST I control s counterclockwise D J Note the height No electron beam With electron beam 5 Turn...

Page 27: ...I control so as to make the center bar accord with the center of the rapid exposure marker Contrast Brightness 10 Increase the magnification to the desired value and focus the image with the IMAGNIFIC...

Page 28: ...he brightness by turn ing the IBRIGHTNESSI control counterclockwise until the extreme left bar at the upper level aligns with the black level bar 2 Low contrast images In order to obtain a low contras...

Page 29: ...blurring directions are mutually perpendicular Once ascertained set the control to midway between the two positions That is position the control so that the new image blurring direction bisects the o...

Page 30: ...ating range of the automatic focus control circuit In this case use the IFOCUSII COARSEI or IFINEI control to focus the image 3 If the specimen surface is rough only the high points or crests are brou...

Page 31: ...roll film J135 ASA50 100 1 0 25 200 400 etc negative 12 20 Fig 3 11 24 or 36 exposures per roll Polaroid Land sheet film CSI 4 Type 51 high contrast ASA200 1 1 Type 52 wide latitude ASA400 Type 55 po...

Page 32: ...utter Fig 3 9 CS1 1 Aperture adjust Latch Lens fixing screw Manual shutter button Fig 3 10 CS I 2 Hinge pin Focusing knob Hinge pin knob Shutter button Connector Roll film holder complete with adapter...

Page 33: ...inge pin Aperture adjust Latch Lens Manual shutter Fig 3 12 CSI 4 T200 3 l3 button Focusing ring lens aperture adj ust ring Camera body Viewfinder Automatic take up device Release cord Shutter button...

Page 34: ...r Note In the case of the CSI 3 the dark slide is not required 8 Close the shutter by depressing the shutter button 9 Set the lens opening appropriately in accordance with the film speed 10 In the cas...

Page 35: ...ype 107 57 etc Ultrahigh speed film ASA3000 is normally unsuitable for image recording due to its rather poor resolution and narrow latitude Accordingly the use of this type of film should be restrict...

Page 36: ...orking Film identificati voltage distance umber Calibrated length of micron bar Example 1000 01 D D 1000 Jm SO 0 1 m 005 Accelerating voltage up to 2 digits 25 kV 15 kV 10 kV 5 kV 2 kV Working distanc...

Page 37: ...gnification T200 Magnification Ex 15 rum 1000 m Length of D rum Calibrated length of micron bar m 15 rum 1 rum 15 Note The central micron bar should be used to ascertain the length of the mi cron bar...

Page 38: ...the following cases 1 After replacing or cleaning the electron gun filament condenser lens aperture or objective lens aperture 2 After dismantling and reasembling the column Electron gun Cathode Wehne...

Page 39: ...t up Note If the lamp fails to light up a burntdut filament is indicated In this event replace the filament 7 While monitoring the CRT T200 waveform slowly turn the IFILAMENTI control to about the 2 o...

Page 40: ...height when the IFILA MENTI control is turned beyond the saturation posi tion repeat Steps 6 8 10 Re adjust the axis align ment screws so as to maximally heighten the waveform 11 Check that the wavef...

Page 41: ...heights vary slightly from filament to filament FILAMENT OJ t 3 21 FILAMENT 0 f NWWV 2 With some new filaments the first peak is higher than the second peak 2nd Oversaturated region I e 0 4 i ll Ij I...

Page 42: ...nylon gloves to avoid contamination by perspiration etc especially during reassembly which could lead to corrosion Prior to removing any of the parts prepare a stout work bench and suitable mats and...

Page 43: ...shion especially small parts screw etc to make reassembly easier and to avoid misplacement or loss of screws Proper usage of screwdrivers and tools The proper tool must be employed for the particular...

Page 44: ...pushing the IVENTI switch 2 Loosen the alignment screws 4 pes remove the electron gun by lifting it straight up turn it upside down and then place it on the column see Figs 5 1 and 5 2 Cautions 1 All...

Page 45: ...a Securing the electron gun b Removing the Wehnelt cap Fig 5 2 4 Loosen the screws and remove the cap from the Wehnelt tool 5 Remove the filament by loosening the filament fixing screws 3 pcs with th...

Page 46: ...sted clean the Wehnelt cap If at that time a whisker1ike substance is observed on the filament replace it by a new filament This whisker like substance can be seen when a magni fy ing gl ass is used W...

Page 47: ...while the pole piece is still hot otherwise the threaded portion of the holder may be damaged 6 Unscrew the aperture fixing screw IJ with the pole piece assembling tool and remove the aperture l from...

Page 48: ...pacer II and pole pieces I and can be used upside down IT IS RECOMMENDED to reassemble them as they were before disassembly Pole piece m YJ _ _ ea 0 a rings Pole piece l Spacer IJ Pole piece Pole piec...

Page 49: ...e Caution Be careful not to scratch nick bend or lose the aperture and spacer 5 Clean the aperture in accordance with cleaning method C see Sect 6 2 3 6 Check that there are no traces of polish lint e...

Page 50: ...proves difficult to remove the cap by hand use tweezers Cap Spacer Aperture 0 D 2 nun Aperture holder Aperture holder removing tool Fig 5 8 Exploded view of the objective lens aperture assembly and me...

Page 51: ...and the metal pipe itself Fig 5 9 3 If the electrode is dirty remove it and clean T200 Caution When reassembling the beam deflector screw in the pipe holder firmly so as to be sure of properly ground...

Page 52: ...ing and scintillator from the light pipe by loosening off screws C 2 pcs Fig 5 10 Removing the detector 5 Apply a thin coat of silicone oil to the exposed end of the light pipe Caution When cleaning t...

Page 53: ...not remove a ring these parts Light pipe Lead wire B Scintillator Screw C Flange a ring Collector Fig 5 11 Disassembling the detector 3 mm hexagonal key wrench Fi g 5 12 Detector and P 1T T200 5 10 L...

Page 54: ...sembly to cool down 4 Unscrew the heater assembly holding nut CD nd remove the h ater assembly comprising cover adapter j heater lead wires j and socket 5 Remove heater from cover 6 Unscrew nuts J dis...

Page 55: ...f the mains power switch on the distribution board Notes 1 If the oil level has fallen below the J mark on the oil level indicator replenish is necessary To replenish use the pump exhaust port T200 2...

Page 56: ...same rating as the blown fuse fuses Fuse No Related cct Rating JIS FIA Not used FIB Service outle t 3 A glass tube MF03NM 3A FIC Tl transformer 8 A glass tube MF03NM 8A F2A T2 transformer 2 A glass tu...

Page 57: ...the condenser lens pole pieces and remove the apertures see Sect 5 2 4 Remove the evacuation pipe and column magnetic shield 5 Loosen off the four condenser lens holding screws and remove the condense...

Page 58: ...allow prolonged contact with the skin Fine grain metal polish The polish should be paste like and easy to remove with organic solvent It is used for removing persistent contamination Gauze or rayon p...

Page 59: ...Application Cleaning of lightly contaminated parts For flat surfaces wipe with gauze rayon paper or absorbent cotton soaked in cleaning liquid In the case of parts which scratch easily use absorbent c...

Page 60: ...e cleaned parts covered until ready for reassembly Cleaning method C Application Apertures tantalum or molybdenum apertures etc Place the apertures in a vacuum evaporator employing a tungsten wire 0 5...

Page 61: ...ndense r lens pole piece Condenser T200 Eucentric stage Electron gtm Wehnelt cap Column cylinder Magnetic shield grG40 f M 3x 4 J 2 pcs C G40 I pipe O jective lens G40 Objective lens I pcs Cover O f s...

Page 62: ...he microscope will be contaminated by the speci men itself or gases evolving from the specimen Note The following specimens must be handled with great care Volatile specimens Radioactive specimens Wet...

Page 63: ...kness 100 200 A The double coating method e g one thin coat f carbon topped by one coating of gold is widely used for various specimens Sputtering Materials Gold platinum palladium alloy chromium silv...

Page 64: ...ner Screwdriver Phillips headed Screwdriver watchmaker s Hexagonal key wrench Tweezers Pole piece removing tool Pole piece assembling tool Wehnelt cap removing tool Appearance LLLLll Quantity 1 1 set...

Page 65: ...ng lens Gun filament Fuse Lamp Specimen stub 10 dia x 5 thick rom Specimen stub 10 dia x 10 thick rom Vacuum grease Conductive paint T200 Appearance J r 1 t t f r t 1 1 Q Quantity 1 1 set 1 1 case 6 p...

Page 66: ...A S Name Fine grain metal polish Fixed aperture holder removing tool Tef l on sheet Beam defl ec tor coil spacer Appearance Quantity 1 vial 10 g 1 1 T200...

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