Aerotech QNP3 Series Hardware Manual Download

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Revision: 1.02.00

QNP3 Series

Hardware Manual

Summary of Contents for QNP3 Series

Page 1: ...Revision 1 02 00 QNP3 Series Hardware Manual ...

Page 2: ...rvice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 81 0 43 306 3773 Email service aerotechkk co jp Germany China Phone 49 0 911 967 9370 Fax 49 0 911 967 93720 Email service aerotechgmbh de Phone 86 21 5508 6731 Email service aerotech com France Taiwan ...

Page 3: ...3 2 Piezo Wiring 30 3 3 Electrical Specifications 31 3 4 Machine Direction 32 3 5 Travel Limits 33 Chapter 4 Maintenance 35 4 1 Service and Inspection Schedule 35 4 2 Cleaning and Lubrication 35 4 3 Poling the Piezo Actuator 36 4 4 Troubleshooting 37 Appendix A Warranty and Field Service 39 Appendix B Revision History 41 Appendix C Piezo Engineering Tutorial 43 C 1 The Direct and Inverse Piezoelec...

Page 4: ...uum 52 C 4 Piezo Stage Properties and Nomenclature 52 C 4 1 Accuracy Linearity 52 C 4 2 Resolution 54 C 4 3 Repeatability 55 C 4 4 Stiffness 55 C 4 5 Resonant Frequency 55 C 4 6 Load Ratings 56 C 4 7 Expected Lifetime 56 C 5 Amplifier Selection 57 Index 61 4 www aerotech com ...

Page 5: ...l hysteresis curve of a piezoelectric stack actuator operating from 30V to 150V 45 Figure C 3 Force vs displacement output of a piezo actuator at various applied voltages 46 Figure C 4 Displacement of a piezo stage or actuator with a constant external load 47 Figure C 5 Displacement of a piezo stage or actuator driving against an external spring of stiffness ke 48 Figure C 6 Estimated power dissip...

Page 6: ...imum Acceptable Environmental Specifications 11 Table 1 3 QNP3 Series Specifications 13 Table 2 1 Stage to Mounting Surface Hardware 21 Table 2 2 Customer Mounting Features 24 Table 3 1 Piezo Connector Pin Description 29 Table 3 2 Electrical Specifications 31 Table 4 1 Troubleshooting 37 6 www aerotech com ...

Page 7: ...ry or death the following precautions must be followed 1 Cables can pose a tripping hazard Securely mount and position all system cables to avoid potential hazards 2 Do not expose this product to environments or conditions outside of the listed specifications Exceeding environmental or operating specifications can cause damage to the equipment 3 The QNP3 stage must be mounted securely Improper mou...

Page 8: ...e 2011 65 EU RoHS 2 Directive and has been designed to be in conformity with the applicable requirements of the following Standard s when installed and used in accordance with the manufacturer s supplied installation instructions EN 61010 1 2010 Safety Requirements for Electrical Equipment Authorized Representative Simon Smith European Director Address Aerotech Ltd The Old Brick Kiln Ramsdell Tadl...

Page 9: ...n Table 1 1 Model Numbers and Options QNP3 Series Three Axis Parallel Kinematic XYZ Piezo Nanopositioning Stage QNP3 100XYAZ 030 10 30 μm x 30 μm x 10 μm closed loop travel QNP3 100XYAZ 100 10 100 μm x 100 μm x 10 μm closed loop travel QNP3 150XYAZ 200 20 200 μm x 200 μm x 20 μm closed loop travel Feedback Optional C Capacitance sensor feedback Mounting Plate Optional MP Mounting plate for English...

Page 10: ...n of expansion i e the positive voltage direction Figure 1 1 Single Axis Stage Travel and Voltage Relationship Open Loop vs Closed Loop Travel All QNP3 stages with feedback C option have an open loop OL and closed loop CL travel range refer to Section 1 4 This refers to whether the stage is using feedback control CL or not OL QNP3 stages purchased without feedback have an open loop travel range on...

Page 11: ...er than air may affect the rated operating voltage of the QNP3 stage Consult the factory for details W A R N I N G Using the QNP3 in environments with relative humidity greater than 60 may require a reduction in travel and max voltage to ensure a long operating life Table 1 2 Minimum Acceptable Environmental Specifications Ambient Temperature The optimal operating temperature is 20 C 2 C 68 F 4 F ...

Page 12: ...feedback range as a function of stage temperature If the temperature of the stage changes by more than 3 C from the temperature at which it was configured the entire configured closed loop travel range will no longer be achievable If the entire closed loop Z axis travel cannot be achieved adjust the Absolute Feedback Offset of the Z Axis in software to re center the configured travel in the workin...

Page 13: ... Frequency 7 XY 1850 Hz 490 Hz 330 Hz Z 2200 Hz 1425 Hz 910 Hz Resonant Frequency 7 200 gram load XY 950 Hz 350 Hz 260 Hz Z 1390 Hz 910 Hz 670 Hz Maximum Payload 8 1 kg 1 kg 3 kg Maximum Acceleration 9 Unloaded XY 400 m s2 115 m s2 35 m s2 Z 2000 m s2 2000 m s2 1000 m s2 Moving Mass Unloaded XY 0 24 kg 0 21 kg 0 58 kg Z 0 05 kg 0 05 kg 0 10 kg Stage Mass 0 53 kg 0 56 kg 1 3 kg Material Anodized Al...

Page 14: ...ers when securing and mounting to the stage 4 Piezo actuators cannot be operated at pressures from 10 to 10 2 Torr The resistance of air dramatically reduces in this range and voltage may arc across the piezo actuator and destroy it Remove power from the stage and disconnect it from its drive electronics during vacuum pump down operations to protect it from damage 5 Baking components at elevated t...

Page 15: ...ace by its unsupported cable Carefully remove the QNP3 stage from its protective shipping container Gently set the QNP3 stage on a smooth flat and clean surface Before operating the QNP3 stage it is important to let it stabilize at room temperature for at least 12 hours Allowing it to stabilize to room temperature will ensure that all of the alignments preloads and tolerances are the same as they ...

Page 16: ...s its product offerings listed options may be superseded at any time All drawings and illustrations are for reference only and were complete and accurate as of this manual s release Refer to www aerotech com for the most up to date information Figure 2 1 QNP3 100XYAZ 030 10 Dimensions 16 Chapter 2 www aerotech com ...

Page 17: ...QNP3 Hardware Manual Mechanical Specifications and Installation Figure 2 2 QNP3 100XYAZ 100 10 Dimensions www aerotech com Chapter 2 17 ...

Page 18: ...Mechanical Specifications and Installation QNP3 Hardware Manual Figure 2 3 QNP3 150XYAZ 200 20 Dimensions 18 Chapter 2 www aerotech com ...

Page 19: ...ifications and Installation Figure 2 4 QNP3 100XYAZ 030 10 Mounting Plate MP Dimensions Figure 2 5 QNP3 100XYAZ 100 10 Mounting Plate MP Dimensions Figure 2 6 QNP3 150XYAZ 200 20 Mounting Plate MP Dimensions www aerotech com Chapter 2 19 ...

Page 20: ...d Installation QNP3 Hardware Manual Figure 2 7 QNP3 100XYAZ 030 10 Tabletop TT1 Dimensions Figure 2 8 QNP3 100XYAZ 100 10 Tabletop TT1 Dimensions Figure 2 9 QNP3 150XYAZ 200 20 Tabletop TT1 Dimensions 20 Chapter 2 www aerotech com ...

Page 21: ...himming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system QNP3 series stages have a fixed mounting pattern as shown in Figure 2 10 and Section 2 2 The M4 screws and 3 mm hex wrench required to mount the stage are included in the shipping box If the the optional solid tabletop was ordered TT1 the M3x0 5 8 mm long low head cap screw...

Page 22: ...Mechanical Specifications and Installation QNP3 Hardware Manual Figure 2 10 Mounting Hole Locations 22 Chapter 2 www aerotech com ...

Page 23: ...ezo Stage page in the Aerotech controller help documentation for all new payload configurations this includes the no load configuration The payload must be flat rigid and comparable to the stage in quality to maintain optimum performance N OTE For valid system performance the mounting interface should be flat within 5 µm If a QNP3 stage with feedback is mounted in a vertical orientation with a hea...

Page 24: ...Refer to controller documentation or contact Aerotech for more information Table 2 2 Customer Mounting Features Stage Mounting Hardware Quantity QNP3 100XYAZ 030 10 M3X0 5 4 5 mm deep threaded holes 4 Places Ø2 mm x 4 mm deep pin holes slip fit 2 Places QNP3 100XYAZ 100 10 M3x0 5 6 mm deep threaded holes 4 Places Ø2 mm x 4 mm deep pin holes slip fit 2 Places QNP3 150XYAZ 200 20 M4x0 7 6 mm deep th...

Page 25: ...QNP3 Hardware Manual Mechanical Specifications and Installation Figure 2 11 Mounting Hole Locations Tabletop www aerotech com Chapter 2 25 ...

Page 26: ...sed dynamically because it may affect linearity performance If the piezo cable needs to pass through a dynamic cable chain Aerotech recommends that the piezo stage cable be terminated before the cable chain and connected to an extension cable that routes through the cable chain If this is not possible contact an Aerotech representative to discuss your options 26 Chapter 2 www aerotech com ...

Page 27: ...tem separate from this documentation The electrical wiring from the piezo stage and optional feedback device are integrated at the factory Refer to the following sections for standard wiring and connector pinouts W A R N I N G Operator access to the base and tabletop must be restricted while connected to a power source Failure to do so may cause electric shock D A N G E R Remove power before conne...

Page 28: ...le it is energized The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration of this stage into the final application D A N G E R Remove power before connecting or disconnecting electrical components or cables Failure to do so may cause electric shock or damage to the equipment W A R N I N G Operator...

Page 29: ...Actuator High Voltage Input 25 Piezo Actuator Return 1 Reserved 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved 9 Reserved 10 Reserved 11 Reserved 14 Reserved 15 Reserved 16 Reserved 17 Reserved 18 Reserved 19 Reserved 20 Reserved 21 Reserved 22 Reserved 23 Reserved 24 Reserved Mating Connector Aerotech P N Third Party P N Backshell ECK01057 AMP 745173 4 Connector ECK00300 FCI DB...

Page 30: ...ctrical Specifications and Installation QNP3 Hardware Manual 3 2 Piezo Wiring Shielded cables are required for the piezo actuator connections Figure 3 1 Piezo Actuator Wiring 30 Chapter 3 www aerotech com ...

Page 31: ...ectrical Specifications QNP3 100XYAZ 030 10 100XYAZ 100 10 150XYAZ 200 20 Drive System Piezo multi layer stack actuator Feedback Closed Loop Capacitive Sensor C Open Loop None Piezo Stack Voltage Range 30 V to 150 V Piezo Stack Max Current 500 mA Piezo Stack Capacitance 1 4 6 µF XY per axis 2 1 µF Z 3 2 µF XY per axis 2 1 µF Z 6 4 µF XY per axis 4 8 µF Z Loss Factor tan δ 2 0 02 per axis 1 Value 2...

Page 32: ... machine direction defines the phasing of the feedback and piezo signals and is dictated by the stage wiring Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while machine direction is hardwired in the stage Figure 3 2 Machine Direction 32 Chapter 3 www aerotech com ...

Page 33: ...range They are a fail safe measure used to prevent the stage from losing feedback The operation of the end of travel limits is very similar to software limits The CCW End Of Travel limit in the direction of travel that corresponds to negative voltage refer to Section 1 1 is always on When the CCW End Of Travel limit is reached the controller will disable the stage This is necessary to protect the ...

Page 34: ...Electrical Specifications and Installation QNP3 Hardware Manual 34 Chapter 3 www aerotech com This page intentionally left blank ...

Page 35: ...alfunctioning components by Aerotech field service personnel is not possible Repair typically requires that the unit be returned to the factory Please contact Aerotech Global Technical Support for more information 4 2 Cleaning and Lubrication W A R N I N G In applications that have multiple stages bolted together to form multi axis systems the orthogonality may be lost if the stage tables of the s...

Page 36: ...dle for a long period of time the piezo actuator will gradually de pole and return to a neutral state If the QNP3 stage has been exposed to temperatures above 85 C or left idle for several weeks it can be easily re poled to its fully functioning state using the following procedure 1 Connect the stage to its drive electronics in accordance with the procedures in Chapter 3 2 Enable the stage in open...

Page 37: ...pole in accordance with Section 4 3 Stage disables and or faults at the end of open loop travel l Stage is driving into End Of Travel limit because of a heavy load condition Restrict the commanded voltage range or change the Voltage Clamps in the stage parameter file to avoid entering the limit Alternately changing the stage orientation may prevent it from entering the limit l Stage is driving int...

Page 38: ...Maintenance QNP3 Hardware Manual 38 Chapter 4 www aerotech com This page intentionally left blank ...

Page 39: ...uch approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerotech com Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than thirty...

Page 40: ... and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site Field Service Representative in a reaso...

Page 41: ...vision History Appendix B Revision History Revision General Information 1 02 00 Added new model QNP3 100XYAZ 030 10 Added new model QNP3 150XYAZ 200 20 1 01 00 Product update 1 00 00 New manual www aerotech com Appendix B 41 ...

Page 42: ...Revision History QNP3 Hardware Manual 42 Appendix B www aerotech com This page intentionally left blank ...

Page 43: ...erials are usually proprietary and vary between suppliers C 2 1 RoHS Exemption Despite the presence of lead as a doping material PZTs are exempt from RoHS directive 2002 95 EC due to a lack of a suitable replacement material Although efforts are underway to develop alternative materials no suitable alternative is expected in the field for years to come C 3 Properties of Piezo Actuators C 3 1 Displ...

Page 44: ...d electric field driven to its excitation limits As the electric field is cycled from positive to negative to positive the following transformations occur in the piezo actuator A Initially strain increases with electric field and is only slightly nonlinear As the electric field is increased the dipoles of all the grains will eventually align to the electric field as optimally as is possible and th...

Page 45: ...tage for a piezo actuator stack in this region of the curve is shown in Figure C 2 Figure C 2 Typical hysteresis curve of a piezoelectric stack actuator operating from 30V to 150V Aerotech amplifiers take full advantage of the semi bipolar operation of piezoelectric stack actuators Our actuators are designated to operate from 30 V to 150 V with very high voltage resolutions Over this voltage range...

Page 46: ...sating for this movement in real time to keep the output motion at the desired position C 3 4 Force and Displacement C 3 4 1 Force Versus Displacement Characteristics The force generated by an actuator acting in the polarization direction is completely independent of the overall length of the actuator and is only a function of the cross sectional area of the actuator and the applied electric field...

Page 47: ...L1 When a mass is applied to the piezo stage with expansion in the direction of gravity the initial deflection ΔL0 is calculated as Equation 2 where kp is the stiffness of the piezo stage in the direction of motion and m is the applied mass With mass m applied to the piezo stage the stage is compressed a distance ΔL0 but the stroke ΔL2 remains the same as the unloaded stage Figure C 4 Displacement...

Page 48: ... 2 when driving against a spring load the piezo stage stiffness kp and the external stiffness ke act in series and decrease the overall stroke of the actuator The stroke in case 2 is given by Equation 4 It is evident upon inspection of Equation 4 that in order to maximize the stroke of the piezo stage the piezo stage stiffness kp should be much larger than the external spring stiffness ke Figure C...

Page 49: ...in layers typically 50 to 200 μm thick separated by electrodes the resulting applied voltages are lower 200 V compared to high voltage actuators 1000 V where layer thickness is 1 mm The thickness of each layer Tlayer can be defined as the overall active length of the piezo actuator Lo divided by the number of layers n The piezo stack capacitance of a multi layer actuator can then be expressed as a...

Page 50: ...01 to 03 for lower amplitude signals 1 10 volts and can be as high as 0 1 to 0 25 for higher amplitude signals 50 100 volts The reactive power Q is defined as Equation 11 For a single frequency f the capacitive reactance is Equation 12 Using Equation 10 Equation 11 and Equation 12 it can be shown that the power dissipated in a piezo actuator for a sinusoidal voltage with an amplitude of Vpp 2 and ...

Page 51: ...encies contact Aerotech s Application Engineering Department We will be happy to assist you in sizing the correct piezo nanopositioning device for your exact application C 3 7 Environmental Effects C 3 7 1 Humidity One of the most important factors for ensuring long life is to protect the piezo actuator against humidity For this reason Aerotech uses specially sealed coatings on the actuators that ...

Page 52: ...ment C 3 7 3 Vacuum Low voltage 200 V piezo acutators are particularly well suited for vacuum operation Piezo actuators do not require lubrication that typically requires great care when selecting for ultra high vacuum applications Vacuum pressures from 10 to 10 2 Torr need to be avoided because the insulation resistance of air dramatically decreases in this range known as the corona area thus all...

Page 53: ...taken in Figure C 7 is used to calculate the linearity error The residuals from this best fit line and an illustration of how linearity error is calculated is shown in Figure C 9 In conclusion the term accuracy is used to quantify both sensitivity effects slope of measured versus actual position as well as nonlinearities in positioning and is reported as a pk pk value The term linearity is used to...

Page 54: ...en the smallest change in electric field will cause some mechanical expansion or contraction of the piezo stack Although theoretically true this fact is largely impractical because all piezo actuators and stages are used with electronics and sensors that produce some amount of noise The noise in these devices generally rises with increasing measurement sensor bandwidth As a result the resolution o...

Page 55: ...value by 6 For example a 1 nm value specified as a 1 sigma repeatability will be approximately 6 nm peak peak C 4 4 Stiffness The stiffness of a piezo actuator or nanopositioner is specified in the direction of travel of the output carriage The stiffness is a function of the piezo stack stage flexure and amplification mechanism s used in the design Higher stiffness piezo stages allow for higher dy...

Page 56: ...oning stages at a nominal value with a 20 tolerance along with the given payload unloaded 100 grams etc C 4 6 Load Ratings Piezo actuators are ceramic materials and are brittle As with most ceramics PZTs have a higher compressive strength than tensile strength The actuators used in our stage designs are preloaded so as to always maintain a compressive load state during standard operational limits ...

Page 57: ... various points in travel and dwelling for long periods of time the piezo stage will need to move to those positions At operational frequencies well below the piezo stack s lowest resonant frequency typically 10s to 100s of kilohertz the piezo stack acts as a capacitor Recall Equation 8 Equation 16 Since voltage is proportional to position the piezo actuator draws current any time the position cha...

Page 58: ...ply enough current to perform this move Example 1 Calculations Assume that to perform the 100 μm pk pk motion the full voltage range is used and at mid travel the voltage is at the mean of the rail voltages e g 60 V Therefore Recalling that the capacitance can increase by as much as 60 for large signal conditions the capacitance used for this calculation is assumed to be 5 μF 1 6 8 μF The current ...

Page 59: ...plifier be able to supply enough current to perform this move Example 2 Calculations The same calculations performed in Example 1 are performed using Equation 16 Equation 17 and Equation 18 Again the capacitance is assumed to increase by approximately 60 due to large signal conditions The voltage and current waveforms are shown in Figure C 12 In this example the continuous current is below the rat...

Page 60: ...Piezo Engineering Tutorial QNP3 Hardware Manual Figure C 12 Voltage and current waveforms for the profile commanded in Example 2 60 Appendix C www aerotech com ...

Page 61: ... Global Technical Support 2 H Humidity 11 I inspect 35 L Linearity 12 lubrication 35 M mounting surface 21 cleaning 21 multiaxis combinations 35 O Open Loop 10 orthogonality 35 P Protection Rating 11 protective ground connection 28 S shimming 21 Software Limits 33 stabilizing stage 15 stage stabilizing 15 stage distortion 21 Support 2 T Technical Support 2 V Vacuum Operation 14 Vibration 11 W Warr...

Page 62: ...Index QNP3 Hardware Manual 62 Index www aerotech com This page intentionally left blank ...

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