Zeiss GeminiSEM Series, Instruction Manual

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ZEISS 7 Troubleshooting | 7.3 Column
7.3.1.2 Starting the Bakeout
Info
You cannot work with the microscope while the bakeout procedure runs.
NOTICE
Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4
Do not place any combustible objects on the grids of the electron optical column during
bakeout.
4
After the bakeout procedure, let surfaces cool down before working around the column.
4
Only advanced operators are allowed to perform the bakeout procedure.
Prerequisite
ü
Requires the Supervisor privilege and the user level Service
ü Only advanced operators are allowed to perform the bakeout procedure
Procedure
1. In the Panel Configuration Bar , double-click Bakeout .
à
The Bakeout dialog is displayed.
2. If the Full service bakeout checkbox is available, deactivate the Full service bakeout
checkbox.
INFO: Full service bakeout includes column heating that may lead to column misalignment.
3. From the Bakeout drop-down list, select a bakeout cycle.
For 2 hours heating / 1.5 hours cooling, select Quick .
For 8 hours heating / 1.5 hours cooling, select Overnight .
For 43 hours heating / 7 hours cooling, select Weekend .
For a cycle defined by the operator, select User .
4. To start the bakeout procedure, click Bakeout Start .
7.3.2 Calibrating the Probe Current
This function enables you to automatically calibrate the probe currents within a few minutes.
Calibrating the probe current can be necessary in the following cases:
§
Before performing analytical applications (e.g. EDX, WDX)
§ After changing the extractor voltage
§
To improve the accuracy of the set probe current values
Parts and Tools
Designation Part no.
Faraday cup 348342-8055-000
Prerequisite
ü
The microscope has a Gemini 2 column
Procedure 1. Load the Faraday cup into the specimen chamber. Refer to Loading the Specimen Chamber
[
}
76] .
2. Pump the specimen chamber.
3. Switch on the electron beam. Refer to
Switching on the EHT [
}
80] .
4. Set a magnification that allows transmission of the complete electron beam into the cavity
of the Faraday cup through the aperture orifice.
5. In the Panel Configuration Bar , double-click Probe Current Calibration .
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 123