8 Troubleshooting | 8.4 Column
ZEISS
NOTICE
Risk of property damage: Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4
Do not place any objects on the grids of the electron column during bakeout.
4
After the bakeout procedure, let surfaces cool down before working around the column.
4
Only advanced operators are allowed to perform the bakeout procedure.
Prerequisite
ü
Requires the
Supervisor
privilege and the user level
Service
ü
Only advanced operators are allowed to perform the bakeout procedure
1. In the
Panel Configuration Bar
, double-click
Bakeout
.
à
The
Bakeout
dialog is displayed.
2. If the
Full service bakeout
checkbox is available, deactivate the
Full service bakeout
checkbox.
INFO:
Full service bakeout includes column heating that may lead to column misalignment.
3. From the
Bakeout
drop-down list, select a bakeout cycle.
For 2 hours heating / 1.5 hours cooling, select
Quick
.
For 8 hours heating / 1.5 hours cooling, select
Overnight
.
For 43 hours heating / 7 hours cooling, select
Weekend
.
For a cycle defined by the operator, select
User
.
4. To start the bakeout procedure, click
Bakeout Start
.
8.4.2 Calibrating the Probe Current
This function enables you to automatically calibrate the probe currents within a few minutes.
Calibrating the probe current can be necessary in the following cases:
§
Before performing analytical applications (e.g. EDX, WDX)
§
After changing the extractor voltage
§
To improve the accuracy of the set probe current values
Parts and Tools
Designation
Part no.
Faraday cup
348342-8055-000
Prerequisite
ü
The microscope has a Gemini II column
1. Load the Faraday cup into the specimen chamber.
2. Pump the specimen chamber.
3. Switch on the electron beam.
4. Set a magnification that allows transmission of the complete electron beam into the cavity
of the Faraday cup through the aperture orifice.
5. In the
Panel Configuration Bar
, double-click
Probe Current Calibration
.
à
The
Probe Current Calibration
window is displayed.
6. Activate the
Spot
checkbox.
7. Click
Cal I Probe
.
8. To confirm, click
Yes
.
9. To store the calibration, click
Save
.
10. Deactivate the
Spot
checkbox.
102
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000