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5. Operation
CAUTION
Risk of damaging the BSD4 detector when moving the stage.
Macros may influence the movement of the stage.
Do not start user-defined macros which impede the safe stage movement.
5.1. Preparing the work with the BSD4 detector
Before working with the BSD4 detector, the detector has to be adjusted.
1
Go to the
Detectors
tab in the
SEM
Control
panel.
2
Select
InLens
or
SE2
from the drop-down
menu.
SmartSEM
®
switches to the selected detector.
3
Select the lowest magnification.
4
Select
Detection/BSD Control...
.