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3.3. Technical data
3.3.1. Product identification
3.3.2. Specification
3.4. System requirements
Requirements to run the BSD4 detector:
•
SmartSEM
®
version 5.07 or higher
Workstation
BSD4 detector
Part no.
MERLIN
®
MERLIN
®
Compact
MERLIN
®
VP Compact
Crossbeam 340/540
BSD4 detector
349506-9016-000
Crossbeam 360/560
BSD4 detector (long version)
349506-9016-010
Feature
Specification
Travel
4inch chamber: 200 mm
6inch chamber: 270mm
Travel speed
30-60 mm/s
Repeatability
X-axis: ± 5 µm
Y-axis: ± 5 µm
Z-axis: ± 25 µm
Fine adjustment
4inch chamber:
X-axis: 4 mm
Y-axis: 9 mm
Z-axis: 13 mm
6inch chamber:
X-axis: ± 4 mm
Y-axis: ± 11 mm
Z-axis: ± 16 mm
