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3.2. Principle of operation
Fig. 1.3: BSD4 detector diagram
•
The primary electron beam travels through the objective lens and hits the
specimen (
1
).
•
BSEs (
2
) are released from the specimen
•
BSEs are detected by the diodes (five segments,
3
) and generate an electrical
signal
The operation of the BSD4 detector is controlled via the
BSD Control
panel.
The BSD4 detector is inserted and retracted pneumatically.
1
Specimen
3
Top view on diodes (5 segments)
2
BSE trajectories
1
2
3
