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1. About this manual
This instruction manual is considered to be part of the AURIGA
®
Compact workstation.
Read the instructions carefully. Keep the instruction manual nearby the workstation and hand it
over to future owners of the instrument.
This instruction manual is designed for users who have been trained to operate the workstation
by an authorised Carl Zeiss expert. Operators of the workstation must not deviate from the instruc-
tions provided in this document.
Reference to
related
documents
For detailed information regarding the operating software refer to
•
Software Manual SmartSEM
®
for general information on FESEM operation (basic work-
station)
•
Software Manual SmartSEM
®
XB for CrossBeam
®
specific topics (FIB and GIS upgrade)
For details on technical data refer to the documents Product Specification and Installation
Requirements.
For details on optional components of the workstation refer to the respective manuals delivered
with the workstation. You will find these manuals in the document folder.
At a glance
This instruction manual contains the following chapters:
1. About this manual
Explains function and structure of this instruction manual
2. Safety
Summarises important safety details
3. Description
Describes structure and principle of operation of the
workstation
4. Transport and storage
Gives details on transport and storage
5. Installation
Refers to Carl Zeiss service staff
6. Operation
Introduces fundamental operation procedures
7. Maintenance and repair
Describes preventive maintenance and repair tasks
8. Troubleshooting
Summarises clues to solve possible problems
9. Shutdown and disposal
Summarises notes on shutdown and disposal
10. Parts and tools
Lists consumables, spare parts, tools, and accessories
11. Abbreviations
Alphabetical list of abbreviations used in this instruction manual
12. Glossary
Alphabetical list of important technical terms
13. Declaration of conformity
Important declaration
14. Index
Alphabetical list of key words that are referred to in this instruction
manual
Summary of Contents for AURIGA Compact Crossbeam
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