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6.6.4.3. Selecting deposition conditions
Preconditions:
•
Specimen has been moved to the coincidence point
•
The platinum precursor has been heated and outgassed
Procedure:
1
Switch on the electron beam:
a
Switch on the gun.
b
Switch on the EHT.
2
Go to the
FIB
tab of the
FIB Control
panel.
3
Ensure the
FIB Gun Pressure
is better than
5 x 10
-7
mbar.
CAUTION
Danger of arcing. Danger of damaging the ion source.
Before switching on the ion beam, ensure the FIB gun pressure is better than 5 x 10
-7
mbar.
4
Switch on the ion beam:
a
Go to the
FIB
tab of the
FIB Control
panel.
b
Click
On
.
5
Select
FIB
mode from the drop-down menu.
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
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Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...
