YASKAWA SGD7S series, Product Manual

Page: 212 / 629

6.3 SEMI F47 Function
6-14
6.3 SEMI F47 Function
The SEMI F47 function detects an A.971 warning (Undervoltage) and limits the output current if
the DC main circuit power supply voltage to the SERVOPACK drops to a specified value or
lower because the power was momentarily interrupted or the main circuit power supply voltage
was temporarily reduced.
This function complies with the SEMI F47 standards for semiconductor manufacturing equip-
ment.
You can combine this function with the momentary power interruption hold time (Pn509) to
allow the Servomotor to continue operating without stopping for an alarm or without recovery
work even if the power supply voltage drops.
Execution Sequence
This function can be executed either with the host controller or with the SERVOPACK. Use
Pn008 = n.

X

(Function Selection for Undervoltage) to specify whether the function is exe-
cuted by the host controller or by the SERVOPACK.

Execution with the Host Controller (Pn008 = n.

1

)
The host controller limits the torque in response to an A.971 warning (Undervoltage).
The host controller removes the torque limit after the Undervoltage warning is cleared.

Execution with the SERVOPACK (Pn008 = n.

2

)
The torque is limited in the SERVOPACK in response to an Undervoltage warning.
The SERVOPACK controls the torque limit for the set time after the Undervoltage warning is
cleared.
280 V
200 V
0%
0%
Torque limit end s .
The torque i s limited when the
Undervoltage warning i s received.
Torque limit s tart s .
The main circuit bu s voltage increa s e s when
the main circuit power s upply recover s .
The output torque i s limited to s uppre ss
the drop in the main circuit bu s voltage.
Torque limit
reference
Undervoltage
warning
s tatu s
Torque control
A.971 warning
(Undervoltage)
Main circuit
bu
s voltage
Main circuit input
power
s upply
Ho s t controller
S ERVOPACK
Main circuit power interruption time
280 V
200 V
0%
S etting of Pn425
The main circuit bu s voltage
increa s e s when the main
circuit power s upply recover s .
The output torque i s limited to s uppre ss the
drop in the main circuit bu s voltage.
S etting of Pn424
Torque limit s tart s .
Torque
control
A.971 warning
(Undervoltage)
Main circuit
bu
s voltage
Main circuit input
power
s upply
S ERVOPACK
Main circuit power interruption time