Wentworth Laboratories PEGASUS 300S Operating And Service Manual Download Page 1

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PEGASUS

Models S200, S200D, S200-PR, S200LSC, 300S, 360S

AFER

ROBING

QUIPMENT

PERATING AND

ERVICE

ANUAL

Issue 6.2, July 2011

Software version 6.1 onwards

Part Number 2091-001

The Leader in

ProbeAbility

™

Summary of Contents for PEGASUS 300S

Page 1: ...EGASUS Models S200 S200D S200 PR S200LSC 300S 360S WAFER PROBING EQUIPMENT OPERATING AND SERVICE MANUAL Issue 6 2 July 2011 Software version 6 1 onwards Part Number 2091 001 The Leader in ProbeAbility...

Page 2: ...s to the specifications of the products described within at any time without notice and without obligation to notify any person for such revision or change Contact Information If you have any question...

Page 3: ...life Do not proceed beyond a WARNING sign until the indicated conditions are fully understood and met After instructions that will produce automatic movements a note in this format identifies what mo...

Page 4: ...Status Indicator 16 OPERATING INSTRUCTIONS 17 4 POWER UP AND CONFIGURATION SCREENS 18 4 1 Power up Screen 18 F5 Shutdown starts a controlled shutdown as described in Chapter 17 19 4 2 Configuration S...

Page 5: ...7 3 Set Probing Height 64 7 4 Platform Control Screen 65 8 DEVICE OPTIONS SCREEN 67 8 1 Using Device Files 67 8 2 Changing the Active Device 67 8 3 Creating a New Device File 68 8 4 Other Options 68 9...

Page 6: ...s 85 14 6 Reference Failure Screen 85 15 DIAGNOSE 87 15 1 Chuck Control 87 15 2 Platform Control 89 15 3 PMM CAP Control 89 15 4 Robot Control 89 15 5 System Options 90 15 6 Factory Options 90 16 REMO...

Page 7: ...22 3 Text Terminator Character 112 23 REMOTE CONTROL BY RS232 113 23 1 Connection to PC Serial Communications Port 114 24 REMOTE CONTROL BY GPIB IEEE 488 2 115 25 REMOTE COMMAND STRUCTURE 116 25 1 Pe...

Page 8: ...viii...

Page 9: ...the Pegasus series of wafer probers from Wentworth Laboratories Limited The manual consists of five major sections INTRODUCTION page 2 OPERATING INSTRUCTIONS page 17 INTERCONNECTIONS AND INTERFACES pa...

Page 10: ...me type WARNING The controller is double pole fused and hence if the fuse in the neutral line blows there will be mains voltage with respect to earth present inside the controller Therefore always rem...

Page 11: ...PEGASUS Operating and Service Manual 6 1 3...

Page 12: ...he ventilation holes in the bottom of the controller and the fan inlet at the rear are not obscured 1 2 Technical Specifications Pegasus S200 Series XY Stage Type High precision recirculating ball lea...

Page 13: ...PEGASUS Operating and Service Manual 6 1 5 Range Search Window User programmable within total travel Resolution 1 m 0 00004 Chuck Speed See Cycle Times table next page...

Page 14: ...0 5 cfm at 20 Hg min from external pump Power 220 240VAC 50Hz and 100 115V 60Hz auto select 1000VA Fuse rating 6 3A T time delay For continued protection always replace with the same type WARNING The...

Page 15: ...0 m to 300mm 0 001 to 12 Absolute Incremental Accuracy Better than 8 m over 300mm Repeatability 4 m Chuck Stage Type Stepper motor drive linear bearings Total Travel 10mm 0 44 max Fine Lift User progr...

Page 16: ...Hg min from external pump Power 220 240VAC 50Hz and 100 115V 60Hz auto select 1000VA Fuse rating 6 3A T time delay For continued protection always replace with the same type WARNING The controller is...

Page 17: ...s base unit Keypad unit the manual control interface which usually located at the side of the Prober Fig 2 1 S200 Prober and Keypad units with optional optics Controller unit usually located under the...

Page 18: ...connected Green LED flashing Red LED off Standby mode mains connected but Pegasus not turned on Green LED on Red LED off Operation mode Green LED flashing Red LED flashing Emergency Stop Green LED on...

Page 19: ...ton In an emergency quickly press the red button at the front left of the Prober unit The Pegasus will shut down safely into Emergency Stop mode and all powered motion will cease NOTE For a non emerge...

Page 20: ...creen Section 4 1 There will be no stored memory of operations before the emergency stop Be aware that these automatic actions will take place You will then need to set up the operating conditions aga...

Page 21: ...d and joystick 3 1 Screen and Function Keys This is a typical LCD display Configuration Wafer diameter 200 0 mm X Index 10 0 mm Y Index 10 0 mm Gross Lift 2 5 mm Fine Lift 250 0 um Overtravel 50 0 um...

Page 22: ...itched on again when any key is pressed or when the joystick is moved CAUTION Any keypress will be processed as a command which will be executed as well as turning on the backlight If you only want to...

Page 23: ...he chuck The front back movement of the joystick may control either front back movement of the chuck the up down movement of the chuck or the up down movement of the platform if fitted 3 3 1 Joystick...

Page 24: ...essory is fitted it gives visual and optionally audio indication of the state of the machine The status indicator consists of three lights red amber and green and optionally a buzzer The lights are us...

Page 25: ...ch Screen Chapter 5 Setup Menu Chapter 6 Change Probe Card Screen Chapter 7 Device Options Screen Chapter 8 Change Inker Cartridge Screen Chapter 9 Change Probe Height Screen Chapter 10 Program Mode S...

Page 26: ...reen example only details will vary Only three functions are available F1 Vac on releases the chuck vacuum and if appropriate the secondary chuck or pins vacuum which was automatically established at...

Page 27: ...ation screen this is the same screen as Fig 3 2 on page 13 where the main features are identified Configuration S N 001 Wafer diameter 200 0 mm Index 10 0 mm x 10 0 mm Gross Lift 2 5 mm Fine Lift 250...

Page 28: ...guration screen Run Batch Screen Run 5 F1 Setup Menu Setup 6 F4 Change Probe Card Probe Cd 7 F2 Device Device 8 F2 Change Inker Cartridge Inker Ct 9 F3 Probe Height Setup Probe Ht 10 F5 F1 Program Mod...

Page 29: ...e following actions take place automatically The chuck moves to the preset manual load position see Section 12 3 If the Pegasus includes the load pins option the chuck also drops leaving the load pins...

Page 30: ...thod continue to Section 5 6 Position First Die Note that during the alignment procedure the Chuck will at times move more slowly in X or Y dependent on the selected procedure this is done to aid visu...

Page 31: ...by the joystick copies the F1 Repeat function key 5 If you wish to check the alignment or to return to the first fiducial press F1 Repeat or the left hand green button by the joystick Based on the inf...

Page 32: ...g extremely fine movement control During this function the right hand green button by the joystick copies the F1 Continue function key so that you can control the Pegasus without taking your eyes from...

Page 33: ...hey travel through your view If alignment is incorrect the streets will drift left or right as you watch if alignment is correct there will be no drift 6 If alignment is not correct go back to step 2...

Page 34: ...will drift up or down as you watch If you cannot see a street press F2 Pause press the left hand green joystick button to change to X Y mode and use the joystick to move the wafer in the Y direction...

Page 35: ...rect so the streets will drift left or right as you watch If you cannot see a street press F2 Pause press the left hand green joystick button to change to X Y mode and use the joystick to move the waf...

Page 36: ...ht quarter of the probable area Note Only Y movement is possible at point in the wizard When all three points have been aligned press continue to confirm the Pegasus can now determine the exact wafer...

Page 37: ...edles into contact Joystick X Y control is automatically disabled while the chuck is raised F3 O T On or O T Off specifies whether or not Overtravel will be applied when you perform a chuck lift to br...

Page 38: ...ce Holding the Joystick in the up down left or right position for longer than a second while in Index mode will initiate move and test auto repeat Move and test auto repeat will continue until the Joy...

Page 39: ...and Y only As the chuck is moved the coordinates will be updated in real time to reflect its current position At any point when the chuck has been moved to a position of interest the F1 Clear User fu...

Page 40: ...completes automatically press F4 Abort see Section 5 10 2 below If a recoverable error occurs during probing then the Probing Error Pause screen see section 5 11 will be displayed NOTE Some Setup Menu...

Page 41: ...e screen from the Wafer Testing screen the system will display the relevant error message in the status line the user must then press F1 continue The system may also enter the Probing Error Pause scre...

Page 42: ...be displayed with two options F1 Yes or F2 No Press F1 Yes to update the probing position and continue probing from the current chuck position Press F2 No to abandon any joystick movements and return...

Page 43: ...ions as described below To select an option press the numbered key on the keypad press 0 for option 10 Alternatively you can move the selection highlight by pressing either F1 Up or F2 Down and then c...

Page 44: ...ish to revert to the last saved value and discard changes you have just keyed in press F5 Cancel or the ESC key Note that Cancel or ESC will not retrieve a previous value if you have already overwritt...

Page 45: ...directions in a series of small steps Index counts are what the screen display uses to indicate the current X and Y positions Y Index is the step size for chuck travel in the Y front back direction N...

Page 46: ...Edge Sensor Enabled Section 0 To turn around and start probing the next row in the opposite X direction the Pegasus does the following Takes n off site steps each of one die further outwards in the X...

Page 47: ...er testing Use F1 Next or F2 Previous to cycle through the available options None no change from previous state Off only lamp power switched off before testing begins On only lamp power switched on wh...

Page 48: ...e between 1 10 second and 10 seconds and is set in units of 1 10 second The default value is 2 10 second 6 4 15 Search Delay When performing offsite step onsite search or missing die detection no die...

Page 49: ...t be disabled This parameter can be accessed remotely using the PEXXY command 6 5 3 Substrate Shape Circular Rectangular If Circular you can then change option 4 Diameter If Rectangular you can then c...

Page 50: ...e PEXXY command 6 5 7 Wafer Centre This option enables or disables the Wafer Centre Wizard see 5 3 The wafer centre wizard allows the user to define the exact wafer centre and probable area of the cur...

Page 51: ...e 4 Ink Cartridge Life This sets the ink cartridge empty level When the inker has fired this number of ink dots testing stops the amber and red lights are turned on and the error menu is displayed To...

Page 52: ...automatically set by the Probe Cleaner Wizard and so should not be normally set using this menu 2 Fine Lift Sets the Fine Lift value used when cleaning the probes see Table 6 1 page 45 for the Z lift...

Page 53: ...8 Location Y Step This setting holds the vertical distance between cleaning sites Note This value will depend on the manufacturer and the type of cleaning material used but it s recommended that it s...

Page 54: ...rop applies only to models with chuck pins installed The chuck pins are fixed and Pins Drop is the distance below the normal zero chuck height that the chuck will sink when required leaving the wafer...

Page 55: ...normal Z reference height which leaves the pins standing above the chuck This parameter can be accessed remotely using the PZDP command 6 6 7 Chuck Lift The default setting is Enabled Change to Disab...

Page 56: ...is parameter can be accessed remotely using the PZCD RCAD and WCAD commands 6 6 13 Lift Upper Limit This menu item sets the upper limit of Z movement This is used to limit Z movement so that the probe...

Page 57: ...RZIM Zn and WZIM Zn commands where n should be 2 for the front arm and 3 for the side arm 5 Edge Sensor An edge sensor is a switch that opens when it makes mechanical contact with the surface of the w...

Page 58: ...eout error and stopping the probing sequence The waiting time is counted from the end of any Delay After Fine Up Section 6 6 12 This parameter can be accessed remotely using the PTTO command 6 7 4 Tes...

Page 59: ...ires an active high signal leave this option at its default setting of High To reverse this setting press F3 Select then F1 Toggle so that the setting reads Low and finally press F4 Accept This parame...

Page 60: ...ally to ink a die Solenoid Raised this inker sits in a lowered position and is raised electrically when the chuck is moved This parameter can be accessed remotely using the PINK command 6 8 2 Ink Fail...

Page 61: ...elow the associated inker and can then be marked If offset inking is not selected i e whenever all of the offsets are set to zero one inker is required for each set of test probes In this case Inker 1...

Page 62: ...PEGASUS Operating and Service Manual 6 1 54...

Page 63: ...ccept or for no change press F5 Cancel 6 9 3 RS232 Menu This sub menu will only be available if the Remote Interface selection option 1 above is RS232 See Chapter 23 for further details NOTE If the pr...

Page 64: ...minating character normally ASCII 10 LF It is strongly recommend that this setting be used unless backwards compatibility with older systems is required You can if necessary enter any ASCII character...

Page 65: ...y To select this sub menu press 3 in the Prober Options menu 1 Backlight Time The backlighting for the LCD can be programmed to switch off after a period of non use To change this time from its defaul...

Page 66: ...illuminator is fitted To change this parameter first press F3 Select then press F1 Toggle followed by F4 Accept 2 Edge Sensor Debounce Time This parameter sets the maximum time the Prober will allow...

Page 67: ...eter should be set to avalue greater than it would normally take the reader to respond to a read command 5 Prefix Enter any characters that may prefix the bardcode These characters will be stripped fr...

Page 68: ...ginally supplied with version 3 5 or later software Note Simply upgrading a previous Mk3 to the latest version of software will not enable the Network Menu options This sub menu is used to set the Pro...

Page 69: ...pted both will then display 0 0 0 0 and disable DNS resolution Note If the DHCP Client is enabled then all the IP sub menu items will be greyed out 6 10 7 Remote Chip Prober Menu This option is only a...

Page 70: ...Server on the Scanner PC By default the PegNet protocol uses IP port number 5555 on networks where another TCP IP Listening Server uses this port number the Port number will need to be changed both o...

Page 71: ...s F5 More until it appears The chuck moves to the safe position for changing the probe card back right and pauses in the Change Probe Card menu 2 Change the probe card loosen the four locking screws r...

Page 72: ...wafer In the first instance this is done visually Load a half wafer into the wafer carrier and move to the probing position This can be achieved through the Diagnose screen Section 15 Move X and Y su...

Page 73: ...he joystick into Z control mode and lower the chuck to a safe height Then press the right hand green joystick button to regain X Y control When you have finished with this X Y adjustment press the rig...

Page 74: ...ower limit If a limit has been disabled the platform will automatically stop moving when it reaches the physical end of movement 5 The platform s upper and lower limits can be modified by using the fo...

Page 75: ...essing the F2 Device key from the Configuration Screen see section for details Device Options Active Device Default Select Change to change the active device Select New to create a new device Change N...

Page 76: ...e this device If you say No you will be prompted for the name of the device again 2 Next you will be asked if you want to copy the wafer set up parameters from the currently active device If you say Y...

Page 77: ...re press F5 Cancel You are returned to the Configuration screen Chapter 4 The rest of this procedure only applies when you have pressed F1 Continue If the chuck is not already at the load position it...

Page 78: ...ent control See Section 3 3 for more details of joystick control 8 When you have finished the inker tests press F1 Continue The chuck moves back to the load position The Unloading Wafer menu asks you...

Page 79: ...figuration screen Chapter 4 2 Load and align the wafer as described in section 5 2 and then press F1 Continue If the Pegasus includes the load pins option the pins vacuum is applied and the chuck is r...

Page 80: ...e Gross Lift height press F1 Accept The chuck will automatically move back to the load position 5 Unload the wafer and then press F1 Done You are returned to the Configuration screen Chapter 4 The cha...

Page 81: ...r details Program Mode Active Program EXAMPLE Select Run to run the active program Select Change to change the active program Select Edit to edit the active program Select New to create a new program...

Page 82: ...iting the Active Program File To start editing the currently active program press the F3 Edit key If the Set up password has been set you will be prompted for it before you can continue Note If there...

Page 83: ...0 000 0 000 Joystick XY Index Left button Up Add Pt Update Pt Delete Pt Prev Pt More Fig 10 3 Edit Program screen example details will vary 3 When you have finished training the program you will be pr...

Page 84: ...US Operating and Service Manual 6 1 76 4 When you have finished training the program you will be prompted to unload the wafer 5 Finally you will be asked if you want to make this program the active pr...

Page 85: ...e default probing centre is the centre of the chuck and this is where the chuck normally moves to If the required probing centre is not at the centre of the chuck choose 1 Primary Probing Area Centre...

Page 86: ...F5 Cancel Alternatively the probing centre can be set using the centre of rotation This is performed by pressing F3 COR Calc This uses rotates a die of a standard wafer to calculate the probing centre...

Page 87: ...on Calibration menu the chuck automatically moves to its present position for loading unloading of wafers The default position is to the front and left but you can change the default X position by pre...

Page 88: ...ly you are asked if you are changing the probe cleaner material If you answer yes you are taken to step two otherwise you are taken to step three 2 The Change Material screen is displayed which allows...

Page 89: ...efault value press F2 Default To abandon the process and leave the process validation position as it was before you entered this menu option press F5 Cancel 12 7 Manual Clean Position Note This functi...

Page 90: ...clean position is correct press F1 Accept To abandon the process and reset the manual clean position to its default value press F2 Default To abandon the process and leave the manual clean position as...

Page 91: ...reen The status line says In Local mode and the following function keys are restored 13 2 Further Remote Menu Options If F1 Local has not been disabled and you press this key you are returned to the R...

Page 92: ...chuck rotates to reference itself on the Theta axis The chuck moves in the X direction to reference itself on the X axis The chuck moves in the Y direction to reference itself on the Y axis Depending...

Page 93: ...displayed when the Pegasus has failed to reference one or more of the Stepper motors Note because the unit is in a fault condition the Pegasus may appear sluggish in its response to key presses and t...

Page 94: ...o try to reference the motors again once you have cleared any fault Press F2 Diagnose to enter the Diagnostics screen which allows joystick control of referenced motors and displays the current Edge S...

Page 95: ...will be displayed If the optional motorised PMM is fitted the R S and T axes will be displayed 2 Edge sensor the status of up to 10 individual edge sensor lines 3 Vacuum lines and outputs to traffic l...

Page 96: ...ther than the chuck s z axis 3 Pressing F3 Loader will operate a loader where one is fitted For instance where for S200D systems which have an automatic clamp ring this will open and close the clamp N...

Page 97: ...een display and each key press reverses the previous status 8 Pressing F3 Inkers allows up to 4 inkers to be fired from the keypad 9 Pressing F4 Do Test initiates a test sequence and displays the resu...

Page 98: ...g Displays the debug log file on the display Note that the log file must be formatted to the screen size and this can take several seconds to respond if the file is very large 3 Log Menu Enables the c...

Page 99: ...hapter leads you through a series of procedures to 1 Select and Load a Chip Probing Map from the Scanner PC Section 16 1 2 Load a frame wafer on the chuck Section 16 2 3 Accurately align the frame waf...

Page 100: ...m the Probing Map The chuck moves to the preset manual load position see Section 12 3 Place the frame wafer on the chuck with the devices positioned as centrally as possible You can use the vacuum hol...

Page 101: ...e fine up and gross lift positions and the right hand green button by the joystick copies the F1 Continue function key so that you can control the Pegasus without taking your eyes from the microscope...

Page 102: ...ck to move the chuck and the left hand green joystick button to toggle between gross and fine lift so that the device pads are accurately positioned under the probe needles when the chuck is raised to...

Page 103: ...pter 4 If you cannot see this option press F5 More repeatedly until it appears You will be prompted to either select F1 Powerdown or F2 Reboot On a power down the Pegasus switches itself into Standby...

Page 104: ...disconnecting any cables make sure the controller has been switched off Disconnect the motor reference switch edge sensor and tester cables The tester cable and the edge sensor cables can be parked in...

Page 105: ...he edge sensor cables 18 3 Manual Adjustment of the Flying Arms Each Flying Arm can be manually moved in a direction perpendicular to it s driven axis There is coarse and fine adjustment available To...

Page 106: ...al 6 1 98 INTERCONNECTIONS AND INTERFACES Chapters 19 and 20 describe the interconnections between the units of the Pegasus and the interface options for an external wafer tester Interconnections Chap...

Page 107: ...tions MK3 1 INKERS 1 4 connection points for up to four Xandex inkers which are mounted on the machine platform 2 CONTROL communications between Controller and Prober 3 SIGNAL fast control signals to...

Page 108: ...his cable must be correctly connected to both the Controller and the Prober at all times when the machine is connected to a mains supply WARNING To avoid risk of electrical shock or equipment damage d...

Page 109: ...ns may be controlled from an external PC or an external Automatic Test Equipment ATE system 5 PROBER communication and power to the Prober 6 SIGNAL fast control signals from the Prober to the stepper...

Page 110: ...y the correct fuses as specified above WARNING If one of the two mains fuses blows hazardous mains voltage may still be present inside the Controller 11 AUX O P not used 12 ILLUMINATOR O P this IEC CE...

Page 111: ...or dual die testing use the Dual TTL tester interface option 20 1 Inputs and Output 20 1 1 Standard Inputs and Outputs Fig 18 1 Prober Standard TTL Tester signal flow 20 1 2 AWP Compatible Inputs and...

Page 112: ...d are designed to work as part of a 5Volt system The 5Volt DC supply has internal fuse protection and can source up to 350mA Inputs are to the cathode of an Optocoupler diode and the driving circuitry...

Page 113: ...V 5 TTL 0V 12 TTL4 4 TTL5 11 TTL6 3 TTL7 1 TTL11 9 TTL10 2 TTL9 10 TTL8 END OF WAFER START TEST FINISH TEST PASS 1 PASS 2 PASS 3 PASS 4 PASS 5 PASS 6 PASS 7 AWP SECOND INKER 8 TTL2 7 TTL0 15 TTL3 13 T...

Page 114: ...ed to obtain maximum performance from the Pegasus s interrupt system 20 1 7 Pass Fail Inputs 1 to 6 Pass Fail Input AWP Compatible The Pass Fail Inputs indicate the test results of individual devices...

Page 115: ...s must be held for greater than 10milliseconds and should be less than the Index Time to prevent loss of system performance Tpfft Time Pass Fail to Finish Test the Pass Fail result must be valid at le...

Page 116: ...connector on the back of the controller is used The device number and end of line character s can be set in the tester menu When the Pegasus sends an event it also raises the service request SRQ line...

Page 117: ...esting the Pegasus sends this event to inform the tester that this has happened The tester should not directly respond to this event but ought update its display and reset its timeout count if appropr...

Page 118: ...ing from the active wafer map See the Wafer Name Event above for the prober s response Syntax _WN eol 21 2 4 Request Die Comment _DC Command This command can be sent in response to a test die event fr...

Page 119: ...pters 22 25 describe the remote control methods that can be used with the Pegasus and the remote control command set Remote Control using a PC Chapter 22 Remote Control by RS232 Chapter 23 Remote Cont...

Page 120: ...de Under RS232 or GPIB control the Pegasus prober can respond using one of two modes either INF mode or SRQ mode The mode is set using the Remote menu Section 6 9 22 2 1 INF Mode When a command is rec...

Page 121: ...ine 5 GND Signal ground 6 DTR Unused handshake line 7 CTS Unused handshake line 8 RTS Unused handshake line The Pegasus prober may be set to one of three preset RS232 parameter groups by using the Par...

Page 122: ...mple in INF mode PC LDI tt Pegasus 08 INF_000 tt It is recommended that the Pegasus prober is set up and used in INF mode with a text terminator character of decimal 10 ASCII LF 23 1 Connection to PC...

Page 123: ...ing of the GPIB connector and leads is to the GPIB standard The Pegasus prober address may be set to any GPIB device from 1 to 31 by using the Device item of the GPIB menu Section 6 9 4 It is recommen...

Page 124: ...e character _ denotes a space Wherever an underline character appears here a space must be used in the actual command The INF codes quoted in the reply syntax below are the ones returned by the Pegasu...

Page 125: ...nment positions Command syntax CAPSET_name_pos tt Reply syntax INF_000 tt Availability Systems fitted with either a PMM and or one or more CAPs AWP compatible No CAPUNALIGN Unalign CAP Description Set...

Page 126: ...ter and where available Slow Mode very slow continuous movement is enabled or disabled by the optional s parameter The axis parameter can be X for the X axis Y for the Y axis Z for the Z axis C for th...

Page 127: ...Chuck Override Disable Enable Description Disables CO0 or enables CO1 chuck override see section 6 6 7 Command syntax CO0 tt or CO1 tt Reply syntax INF_000 tt Availability All models AWP compatible Y...

Page 128: ...000 message Command syntax ESC tt Reply syntax No reply Availability All models AWP compatible Yes ESO Edge Sensor Enable disable Description Enables disables edge sensors or reads edge sensor status...

Page 129: ...models AWP compatible Yes Comments The CDW CUP command is used to move the chuck to the Fine Down or Fine Up positions The GUP command may be used to move the chuck to a safe gross lift height ready...

Page 130: ...n the n parameter and returns the value of the line in the f parameter either 0 for clear or 1 for set Command syntax GIL_n tt Reply syntax GIL_n f tt Availability All models AWP compatible No GMTR Ge...

Page 131: ...ax GPMM tt Reply syntax n tt Availability Only models fitted with a motorised PMM AWP compatible No GROUP Group a number of CAP devices Description Includes the specified CAP or PMM devices in a group...

Page 132: ...Y axes can be specified separated by a comma and if the axis parameter is RS the positions of both the PMM s X and Y axes can be specified separated by a comma Command syntax GTS_a p tt Reply syntax I...

Page 133: ...y All models AWP compatible Backward compatible only Comments The inker number parameter was not supported by the AWP LDA Move to Alignment Zone Centre Description Moves to the centre of the camera al...

Page 134: ...vailability All models AWP compatible Yes LDI Initial Load Description This command references the axis specified in the a parameter or all the chuck axes X Y Z and Theta if no axis is specified The a...

Page 135: ...optional n parameter is non zero the robot is moved to its load state Command syntax LDR _n tt Reply syntax INF_000 tt Availability Only models fitted with a robot AWP compatible Yes LDS Move to Chang...

Page 136: ...ility Only models fitted with the program download software option AWP compatible Yes MSHTDWN Motor Shut Down Description Powers down the motors in the Stage area specified by the optional a Valid are...

Page 137: ...he die to the left of the current die Command syntax NXL tt Reply syntax INF_000 tt Availability All models AWP compatible Yes NXR Next Die Right Description Moves to the die to the right of the curre...

Page 138: ...d tt Availability Only on models fitted with flying arms AWP compatible No Comments This command should normally be used twice once for each flying arm PCE Get Set Contact Enhancement Description Thi...

Page 139: ...mary probing zone in units of microns in the x and y parameters Command syntax PCPP _x y tt Reply syntax PCPP_x y tt Availability All models AWP compatible No PCPS Secondary Probing Zone Centre Positi...

Page 140: ...set exclusion zone Description Returns and optionally sets the exclusion zone If the e parameter is specified as 0 the exclusion zone is disabled if non zero it is enabled If the s shape parameter is...

Page 141: ...ption Returns and optionally sets the probe change position in units of microns in the x and y parameters Command syntax PLPC _x y tt Reply syntax PLPC_x y tt Availability All models AWP compatible No...

Page 142: ...position in microns in the z parameter Command syntax PSGM tt Reply syntax PSGM_z tt Availability All models AWP compatible No PSLL Stepper Lower Limit Parameter Description Returns and optionally set...

Page 143: ...e Y axis Z for the Z axis C for the Theta axis W for the platform axis R for the PMM s X axis S for the PMM s Y axis T for the PMM s Z axis X2 for the front flying arm X axis Z2 for the front flying a...

Page 144: ...current uncalibrated X axis and Y axis positions in microns in the x and y parameters Command syntax PSxy tt Reply syntax PSxy_x y tt Availability All models AWP compatible No PSZM Get Z Fine Lifted...

Page 145: ...vailability All models AWP compatible No PTTO Tester Timeout Parameter Description Returns and optionally sets the tester timeout in units of seconds in the t parameter see section 6 7 3 Command synta...

Page 146: ...re L is left movement and R is right movement see section 6 4 7 Command syntax RAD tt Reply syntax RAD_c tt Availability All models AWP compatible Yes RBO Read Back off Distance Description Returns th...

Page 147: ...e Reader Position using the Local User Interface Description Uses the system s keypad and display unit to train the system position for the attached OCR Command syntax RD TRP tt Reply syntax INF_000 t...

Page 148: ...6 6 2 Command syntax RKFM _a tt Reply syntax RKFM_z tt Availability All models AWP compatible No RKGM Read Z Gross Lift Description Returns the Z Gross Lift in units of microns to the value in the z p...

Page 149: ...fied amount in milli degrees However the theta position that the remote interface maintains is unchanged Thus subsequent PSS C or GTS C commands will act as if no rotation had occurred This is useful...

Page 150: ...ngular Command syntax RRZ tt Reply syntax RRZ_n tt Availability All models AWP compatible Yes RSWM Read Z Search Window Description Returns the Z axis search window in units of microns in the z parame...

Page 151: ...tt Reply syntax RZIM_z tt Availability All models AWP compatible No SOL Set Output Line Description Sets the output line specified in the n parameter and to the value in the f parameter either 0 for c...

Page 152: ...s AWP compatible Yes TST Test Description Test die s using the currently selected Pegasus Tester type The reply is Tester Type and Test Array or Test Bin specific AWP Compatible Tester selected The pa...

Page 153: ...th four Test Bins and Pass1 1 Pass2 1 Pass3 1 Pass4 0 the Bin result will be 1 2 4 7 Unused Pass lines are ignored Multi Die Tester selected A pass fail result is returned in the p parameters either P...

Page 154: ...d or 1 for enabled of the vacuum line specified by the n parameter The n parameter can be one of the following CV for the chuck vacuum SCV for the secondary chuck vacuum if a second chuck is fitted PV...

Page 155: ...arameter see section 6 1 A value of zero will disable the probing zone This setting is only used when the probing zone s shape is circular Command syntax WDI_n tt Reply syntax INF_000 tt Availability...

Page 156: ...AWP compatible Yes WKFM Write Z Fine Lift Description Sets the Z fine lift in units of microns to the value in the z parameter the optional parameter a specifies the Z axis no value of Z1 is the main...

Page 157: ...hing Description Sets the Microscope Lamp s switching mode in the n parameter where 0 No automatic switching 1 Lamp switched off at start of run 2 Lamp switched on at end of run 3 Combination of 1 and...

Page 158: ...z parameter the optional parameter a specifies the Z axis no value of Z1 is the main chuck Z axis Z2 if the front flying arm Z axis and Z3 is the right flying arm Z axis see section 6 6 3 Command synt...

Page 159: ...s but has a default of 1 minute Command syntax XOFF_z tt Reply syntax No reply Availability All models AWP compatible No 25 2 Obsolete AWP Commands NOTE The Pegasus remote commands set and probing cap...

Page 160: ...Comments If AWP compatibility is not required the Pegasus LDI command should be used instead HDW HUP Clamp Ring Open Close Description Opens HUP or closes HDW the DSP s automatic clamp ring Command sy...

Page 161: ...nished line Command syntax IL1 tt Reply syntax IL1_f tt Availability All models Comments If AWP compatibility is not required the Pegasus GIL command should be used instead IL2 Get Input Line Two Desc...

Page 162: ...and should be used instead IL5 Get Input Line Five Description Reads the Pegasus equivalent of AWP input line 5 and returns the value either 0 for clear or 1 for set in the f parameter Note On the AWP...

Page 163: ...the second edge sensor Command syntax IL8 tt Reply syntax IL8_f tt Availability All models Comments If AWP compatibility is not required the Pegasus GIL command should be used instead NAA NAC Rotate C...

Page 164: ...ne 4 was normally connected to the end of wafer TTL line Command syntax O4C tt or O4S tt Reply syntax INF_000 tt Availability All models Comments If AWP compatibility is not required the Pegasus SOL c...

Page 165: ...scription Returns the current z axis position in AWP steps 1 5 thousandths of an inch in the z parameter Command syntax PSG tt Reply syntax PSG_z tt Availability All models AWP compatible Yes Comment...

Page 166: ...current distance above the gross lift height in AWP steps 1 5 thousandths of an inch in the z parameter Command syntax PSZ tt Reply syntax PSZ_z tt Availability All models AWP compatible Yes Comments...

Page 167: ...mpatibility is not required the Pegasus PCPA command should be used instead RCCX Read Probing Zone X Centre Description Returns the X axis centre position of the probing zone in the x parameter Comman...

Page 168: ...Reply syntax RCS_0 tt Availability All models AWP compatible Yes Comments Z speed is internally controlled on the Pegasus RCS is provided as a dummy command purely for backwards compatibility it has n...

Page 169: ...edths RXI or thousandths RXJ of an inch in the x parameter see section 6 2 Command syntax RXI tt or RXJ tt Reply syntax RXI_x tt or RXJ_x tt Availability All models Comments If AWP compatibility is no...

Page 170: ...should be used instead VP0 VP1 Pins Vacuum On Off Description Turns the load pin s vacuum supply on VP1 or off VP0 Command syntax VP0 tt or VP1 tt Reply syntax INF_000 tt Availability Only models fit...

Page 171: ...e y parameter Command syntax WCAY_y tt Reply syntax INF_000 tt Availability All models Comments If AWP compatibility is not required the Pegasus PCPA command should be used instead WCCX Write Probing...

Page 172: ...Set the Z speed to the value in the n parameter where 1 is the fastest speed and 6 is the slowest speed on AWP machines Command syntax WCS_n tt Reply syntax INF_000 tt Availability All models AWP comp...

Page 173: ...ls AWP compatible Yes Comments Not recommended for new applications use WSWM WXI WXJ Write X Index Imperial Description Sets the X index in units of hundredths WXI or thousandths WXJ of an inch to the...

Page 174: ...as listed above text or INF code The bits in the Prober Status Byte are as follows Bit No Significance 0 Fault bit see below 1 Fault bit see below 2 Logic 1 chuck is lifted by gross setting 3 Logic 0...

Page 175: ...er Status Byte The Prober Status Byte may be examined at any time by sending the STA command page 143 25 4 INF Codes The INF code returned following successful command execution will normally be 000 H...

Page 176: ...as the chuck is being lifted GUP function 25 4 4 Hardware Faults Code Meaning 020 Edge sensor open when chuck at fine down position 021 Motor failed to reference 2 022 Chuck not Gross lifted when NXT...

Page 177: ...mit device parameter 401 Warning to indicate that the number of inkings of a particular cartridge may mean that the cartridge is getting low and should be changed 402 The number of inkings of a partic...

Page 178: ...t recognised 508 The stepper command received contained invalid data 25 4 10 Safety and limit codes Code Meaning 600 An attempt to move the motor at a speed greater than its velocity limit 601 An atte...

Page 179: ...Probe cleaner material needs changing 701 Probe cleaning paused by user 702 Probe cleaning aborted by user 703 Attempt to set probe cleaning height above Z limit 710 Attempt to set camera height abov...

Page 180: ...Code Meaning 900 Inker lift error 901 During testing when attempting to start the test of a new device the Finish Test signal has not asserted to indicate that the previous device has completed testin...

Page 181: ...PEGASUS Operating and Service Manual 6 1 173 SERVICING INSTRUCTIONS The Pegasus requires little user servicing Chapter 26 describes the user servicing that is necessary from time to time...

Page 182: ...PEGASUS Operating and Service Manual 6 1 174...

Page 183: ...MK2 only As required Medium Cleaning the controller air filter Yearly or as required Low X and Y ballscrew lubrication Yearly Medium Chuck ballscrew lubrication Yearly Medium Planarisation of the chu...

Page 184: ...ectronic inputs or outputs are fully understood before use Ensure adequate platform clearance when changing or aligning probe cards 26 2 Motor Drive Coupling Adjustment MK2 only Occasionally the motor...

Page 185: ...to release the filter housing from the rear panel 2 Remove and clean the filter pad if it cannot be cleaned obtain a replacement Replacement Controller Filter Part Number 2375 07509 3 Replace the fil...

Page 186: ...life of the leadscrew The leadscrews within the chuck assembly require re lubricating once a year To achieve this drive the chuck to a position on the prober where the 3 mounting screws can be access...

Page 187: ...vice Manual 6 1 179 Replace the spherical washers top plate and chuck plate Replace the chuck on the prober and re connect the cables and vacuum tube Ensure the chuck is planar by performing the proce...

Page 188: ...see this option press F5 More until it appears and then F1 Diagnose Then press 6 Factory Options and 2 to select the Chuck Planearisation screen The chuck moves to the centre of its probing area The...

Page 189: ...joystick pressing the Speed button will slow the movement down in a series of steps from 5 fastest down to 1 This gives you very fine movement control See Section 3 3 for more details of joystick cont...

Page 190: ...he chuck by pressing the left hand green joystick button Then use the joystick in X Y mode to move to a better position Press the F2 Pos 3 key again to save this as the new position 11 Again adjust th...

Page 191: ...ctrical Schematics Schematics for the Pegasus series of probers can be found in the Drawings folder on the Pegasus Manuals CD List of available drawings Drawing No Description Prober Serial No 2375 82...

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