
2 Preparing for Operation
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September 26, 2013, 715004208 Rev. A
2. Using the T10 TORX driver, remove the five screws that secure the
blank face plate to the front face of the ISM chassis.
3. Disconnect the vacuum tubing that is attached to the back of the
degassing chamber.
Screws securing
blank face plate
Screws securing
blank face plate
Blank face plate
Location of
vacuum tubing