K465i Operations and Maintenance
P/N 1212831 Rev C
Page 5-9
Copyright
©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
PREPARING THE REACTOR FOR MAINTENANCE
Notes:
The flow flange assembly is comprised of the gas input piping and isolation valves, the
cooling water piping, and the flange weldment and its associated components (InSitu
components, fiber optic cables, water connectors, etc.).
Before starting this procedure, make sure all relevant needle valve flow settings (purge
flows) are recorded.
Caution:
Boron nitride parts cannot be cleaned; therefore wear latex gloves when
performing the following procedures and when handling the parts. Also, avoid exposing the
parts to dust and debris.
HARDWARE MAINTENANCE KEY SWITCH (NEXUS)
The
Hardware Maintenance Key Switch
is a Nexus tool that aids K465i maintenance
functions. Switching the key to
ON
blocks the start of a new process or scheduler action for
CTCFlex (or from the host). If a process is already running, the switch allows the process to
complete while blocking the next run from starting.
Procedure 5-1: Reactor Preparation (Maintenance)
1. Open a maintenance log for the system and record the necessary detailed information.
Ball Valve Cycling
2. Open the
Chamber Maintenance
window.
Figure 5-1. Process Module 1 Window > Chamber Maintenance
3. Click
Pump Purge Chamber
and follow the on-screen prompts to Pump and Purge the chamber.