Veeco Dektak 150, User Manual, Page: 164 / 349

Analytical Functions 6-15
NOTE –
When you use the default scan routine, the raw profile data is entered as the
Display Data Type parameter. In this exercise, all three data types are selected.
2 Select the Waviness and Roughness check boxes to enter all three data types into the scan routine.
NOTE –
You cannot select the roughness data type unless you first activate the short pass
filter. Likewise, you cannot select the waviness data type unless you first activate the long
pass filter.
3 Click OK .
After you enter the analytical functions, cutoff filters, and display data types into the current scan
routine, they automatically execute whenever the current scan routine runs.
MEASURING AND ENTERING ANALYTICAL FUNCTIONS
After you activate the short pass roughness filter, perform the average roughness analytical function a
second time. You can enter one or more analytical functions into the current scan routine from the
Data Plot window to be automatically calculated whenever the current scan routine runs. In the
exercise that follows, you will learn the procedure for measuring the Ra function and entering it into
the scan routine.
1 Select Analysis > Analytical Functions from the Data Plot window to open the Analytical Functions
dialog box (see
Figure 6-15
at the left).
NOTE –
You can also open the Analytical Functions dialog box from the Scan Routines
window. When you do this, the dialog box appears as shown in
Figure 6-16
.
2 Under Roughness in the Analytical Functions dialog box, click Ra .
3 Select Measure and Program in the Analytical Functions dialog box.
4 Click Compute to close the Analytical Functions dialog box, perform the measurement, and enter the
average roughness into the current scan routine.
NOTE –
The result from the Ra function displays in the Analytic Results area on the left
side of the Data Plot window (see
Figure 6-15
at the right). The different results from the first
Ra are calculated on the unfiltered raw profile data (shown with an asterisk) and the second
Ra calculated on the filtered roughness data (shown without an asterisk).