Cantilever Preparation
Silicon Nitride Cantilever Substrates
64
MultiMode SPM Instruction Manual
Rev. B
4.2
Silicon Nitride Cantilever Substrates
The silicon nitride cantilever substrates used in Contact Mode can be removed from the wafer with
the following procedure. Note that the cantilevers are stored tip-side-up and that the silicon is very
brittle. Contacting the cantilever during this operation will almost certainly break it off of the
substrate.
1. Verify that the wafer is oriented with the tips facing upward (gold coated surface down).
Inspect the wafer with an optical microscope. We suggest using a 10–70X stereo microscope
to become familiar with the styles and orientation of the cantilevers on the probe substrate.
2. Remove the Pyrex strips by resting the silicon ring on a glass slide or ruler, then applying
downward pressure with the tweezers until the strip breaks free from the silicon ring. While
doing this, be very careful to avoid pushing strips together as the cantilevers are between the
strips. (All cantilevers on one side of both strips could break off, if this occurs accidentally).
Figure 4.2a
Silicon Nitride Cantilevers in a Wafer
3. Place the strip down on a white piece of paper to inspect it under the microscope. When
doing this, be careful that the cantilevers are on the top side of the strip. The cantilevers are
on the same side as the reinforcing ring, while the saw-cuts are on the opposite side from the
cantilevers. Between each one on the down side of the strip should be a saw-cut almost
through the Pyrex.
4. Handling the strip by its ends, place it on a glass slide (taped down to the edge of a table)
with the substrate or spacer piece to be removed, hanging over the edge, as shown in
. The saw cut should be approximately on the edge of the slide. While holding down the
next substrate on the strip with the wooden end of a cotton swab, grip the overhanging piece
with a pair of wide tweezers and rotate downward. It should pop right off. Repeat this
process until as many cantilever substrates as required have been removed.
Position glass slide underneath
Press here to break out strip.
for support.
