Calibration, Maintenance, Troubleshooting and Warranty
Linearity Correction Procedure
Rev. B
MultiMode SPM Instruction Manual
287
5. If the features of the end third are too large for the box, decrease the parameter. If the features
are too small, increase the parameter.
Note:
Compare only parts of the current scan, not the previous scan.
Figure 15.4c
Slow Scan Linearization: Arg
Adjusting Slow Arg
1. Follow the same instructions for
Fast arg
.
2. Adjust the zoom box to fit the beginning and ending of the scan, then check the center.
3. If the features in the center are too large, reduce the
Slow arg
value. If the features in the
center are too small, increase the
Slow arg
value.
4. After adjusting
Slow arg
values, check if
Slow mag0
requires readjusting.
5. Repeat the procedure for adjusting
Slow mag0
until the rulings are evenly spaced along the
slow axis.
15.4.2
Adjusting Fast Mag1
Initial Adjustment
1. For initial adjustment, click
OK
to close the
Scanner Calibration
window.
Note:
Selecting
Cancel
resets parameters to default values when the box is opened.
2. Change the
Scan size
to
150V
.
3. Select
View
>
Scope Mode
.
Slow Arg Too Large
Slow Arg Too Small
