Calibration, Maintenance, Troubleshooting and Warranty
Calibration Setup
282
MultiMode SPM Instruction Manual
Rev. B
15.2.3
Set Realtime Parameters
Set parameters in the control panels to the following values:
15.2.4
Set Up SPM for Contact AFM
Set up the microscope for contact AFM imaging (The microscope can also be calibrated using
STM; however, this example will utilize contact AFM):
1. In the
Other Controls
panel set the
AFM mode
to
Contact
. Or, select the
Microscope
>
Profile
>
Contact Mode
>
Load
button.
2. Set the
Scan angle
to
0
degrees.
3. Adjust Realtime parameters to obtain a good-quality image (maximum
Scan size
= 440V).
The
Scan rate
should be set to a value of
2.44Hz
and the
Number of samples
parameter
should be set at
256
.
With the sample engaged, check the scanning line relative to the reference’s features; the scan
should be orthogonal to the pits on the reference. If the reference requires rotation,
Withdraw
and
rotate the sample to improve orthogonality between sample and scan line. Repeat until features are
oriented orthogonally with the scan frame.
Panel
Parameter
Setting
Scan Controls
Scan Size
440 V
X offset
0.00nm
Y offset
0.00nm
Scan angle
0.00 deg
Scan rate
2.44Hz
Number of samples
256
Slow scan axis
Enabled
Z limit
440 V
Other Controls
Units
Volts
Channel 1
Data type
Height
Z range
~ 20 V
a
a. Adjust the
Z range
parameter to obtain the best contrast.