Varian TriScroll 300 Series Replacement Manual Download Page 32

Sales and Service Offices

12/04

Canada

Central coordination through:

Varian, Inc.
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

China

Varian Technologies - Beijing

Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031
P.R. China
Tel: (86) 10 6608 1031
Fax: (86) 10 6608 1541

France and Benelux

Varian s.a.

7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08

Germany and Austria

Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302

India

Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445

Italy

Varian, Inc.

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel (39) 011 997 9 111
Fax (39) 011 997 9 350

Japan

Varian, Inc.

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd.

Shinsa 2nd Building 2F
966-5 Daechi-dong 
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451

Mexico

Varian S.A.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472

Russia

Central coordination through:

Varian, Inc.
via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9 252
Fax: (39) 011 997 9 316

Taiwan

Varian Technologies Asia Ltd. 

18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih, Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678

UK and Ireland 

Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769

United States

Varian, Inc.

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437

Other Countries

Varian, Inc.

Via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9 111
Fax: (39) 011 997 9 350

Customer Support and Service:

North America

Tel: 1 (800) 882-7426 (toll-free)
[email protected]

Europe

Tel: 00 (800) 234 234 00 (toll-free)
[email protected]

Japan

Tel: (81) 3 5232 1253 (dedicated line)
[email protected]

Korea

Tel (82) 2 3452 2452 (dedicated line)
[email protected]

Taiwan

Tel: 0 (800) 051 342 (toll-free)
[email protected]

Worldwide Web Site, 

Catalog and On-line Orders:

www.varianinc.com

Representatives in most countries

Sales and Service Offices

Summary of Contents for TriScroll 300 Series

Page 1: ...D R A F T 1 2 2 1 0 4 vacuum technologies TriScrollTM 300 Series Dry Scroll Vacuum Pump Manual No 699904280 Revision H December 2004 TIP SEAL REPLACEMENT MANUAL 505 872 0037 idealvac com idealvac com...

Page 2: ...ogies TriScroll 300 Series Dry Scroll Vacuum Pump TriScroll is a trademark of Vacuum Technologies Loctite and PST are registered trademarks of Loctite Corporation Krytox Teflon and Viton are registere...

Page 3: ...cting Vacuum Technologies ix Tip Seal Replacement 1 General Information 1 Required Equipment 1 Tip Seal Replacement Kit 2 Tip Seal Tool Kit 3 TriScroll 300 Disassembly 4 Remove the Outboard Housing 4...

Page 4: ...TriScroll 300 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 1 2 2 0 0 4...

Page 5: ...refiere esta declaraci n es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiar...

Page 6: ...of all hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of work performed by unskilled...

Page 7: ...tenance procedure Approximate cool down time is one to two hours CAUTION Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the sea...

Page 8: ...lacement All TriScroll 300 Series Models 699904285 Installation and Operation Manual All TriScroll 300 Series Models 699904265 Description Contents Applicable TriScroll Model Part Number Major Mainten...

Page 9: ...l to Customer Service Technical Support at vpl customer support varianinc com Visit our web site at www varianinc com vacuum Order on line at www evarian com Factory Service Options Part Number Advanc...

Page 10: ...TriScroll 300 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 1 2 2 0 0 4...

Page 11: ...rotary seals and O rings if the pump bearings exhibit humming or grinding noises Main bearing life may be shortened if your application requires the pumping of high quantities of water vapor Use bear...

Page 12: ...2 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 Tip Seal Replacement Kit 2 269 Tip Seal Krytox GPL 224 Grease...

Page 13: ...3 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 Tip Seal Tool Kit Chisel Metric Hex Key Set...

Page 14: ...TriScroll 300 Disassembly Remove the Outboard Housing 1 Remove the three M5x16 screws that attach the cowling to the module 2 Remove the cowling 3 Remove the six M6x45 screws that attach the outboard...

Page 15: ...5 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 5 Remove and discard the O ring 6 Remove and discard the tip seals from the outboard housing TriScroll 300 Disassembly continued...

Page 16: ...emove the four M5x15 screws that attach the inboard housing to the frame 2 Remove the inboard housing from the frame Use care to locate the rubber spider that mounts between the motor shaft coupling a...

Page 17: ...ly 1 Remove the M8x12 screw and washer that attaches the counterweight to the inboard housing 2 Lift the counterweight off of the inboard housing The counterweight is keyed to the crankshaft Locate th...

Page 18: ...300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 3 Remove the inboard housing from the crankshaft and orbiting plate 4 Remove and discard the tip seals from the inboard housing TriScroll 300 Disassembl...

Page 19: ...9 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 2 1 0 0 5 5 Remove and discard the tip seals from both sides of the orbiting plate TriScroll 300 Disassembly continued...

Page 20: ...e sides of the scroll walls use a razor blade or Exacto knife to scrape this debris off 2 Use dry compressed air to remove the tip seal debris from the scroll parts 3 Wipe the scroll parts with isopro...

Page 21: ...orbiting plate 2 Cut the seal to the correct length at the end of each groove Leave a gap of 1 4 6 mm from the outer end to allow for thermal growth 3 Insert the new tip seal into the scroll tip groov...

Page 22: ...seals from falling out of the grooves during reassembly 6 Ensure that the scroll walls are properly aligned to allow full engagement of the two parts 7 Reinstall the counterweight onto the crankshaft...

Page 23: ...T 2 1 0 0 5 10 Install the rubber spider into the motor shaft coupling 11 Align the motor coupling to properly mate with the fan hub coupling 12 Install the inboard housing onto the frame TriScroll 3...

Page 24: ...croll tip grooves on the orbiting plate 15 Cut the seal to the correct length at the end of each groove Leave a gap of 1 8 3mm from the outer end to allow for thermal growth 16 Squeeze a dot of Krytox...

Page 25: ...g and install it around the lip on the inboard housing 20 Insert the tip seals in to the grooves on the outboard housing 21 Cut the seal to the correct length at the end of each groove Leave a gap of...

Page 26: ...orbiting plate and against the inboard housing engaging the dowel pins 23 Secure the outboard housing to the inboard housing with the six M6x45 screws TriScroll 300 Reassembly continued NOTE Align the...

Page 27: ...roll Vacuum Pump D R A F T 2 1 0 0 5 24 Install the cowling over the pump module 25 Secure with the three M5x16 screws This figure illustrates a fully reassembled TriScroll 300 Series Pump TriScroll 3...

Page 28: ...ed into service immediately after maintenance is complete However 24 hours of run time is required before a base pressure of 10 mTorr can be achieved NOTE The 24 hour run time does not have to be cont...

Page 29: ...lli Varian 54 10040 Leini TO ITALY Fax 39 011 997 9350 Varian Vacuum Technologies Local Office For a complete list of phone fax numbers see www varianinc com vacuum Do not write below this line Notif...

Page 30: ...essage Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Describe failure...

Page 31: ......

Page 32: ...gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Russia Central coordin...

Reviews: