Varian TriScroll 300 Series, Replacement Manual, Page: 3 / 32

TriScroll 300 Dry Scroll Vacuum Pump
D
R
A
FT 12
/20
/04
iii
Table of Contents
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
Safety Considerations . . . . . . . . . . . . . . . . . . . . . vi
Related TriScroll Manuals . . . . . . . . . . . . . . . . . viii
Maintenance and Tool Kits . . . . . . . . . . . . . . . . viii
Factory Service Options . . . . . . . . . . . . . . . . . . . ix
Contacting Vacuum Technologies . . . . . . . . . . . . ix
Tip Seal Replacement . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . 1
Required Equipment . . . . . . . . . . . . . . . . . . . . . . 1
Tip Seal Replacement Kit . . . . . . . . . . . . . . . . 2
Tip Seal Tool Kit . . . . . . . . . . . . . . . . . . . . . . . 3
TriScroll 300 Disassembly . . . . . . . . . . . . . . . . . . 4
Remove the Outboard Housing . . . . . . . . . . . . 4
Remove the Inboard Housing and the Orbiting
Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 6
Disassemble the Inboard Housing and the Orbiting
Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 7
Scroll Cleaning . . . . . . . . . . . . . . . . . . . . . . . 10
TriScroll 300 Reassembly . . . . . . . . . . . . . . . . . 11
Putting the Pump Back into Service . . . . . . . . . . 18