Varian NHS-35 Instruction Manual Download Page 4 | Manualshive

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Varian NHS-35 Instruction Manual Download Page 4

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Summary of Contents for NHS-35

Page 1: ...NHS 35 Diffusion Pump Instruction Manual Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 3133 781 861 7200 800 8 VARIAN Manual No 6999 01 135 Revision G April 2000...

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Page 3: ...Hong Kong Varian Technologies Asia Ltd Rm 2611 Concordia Plaza New Mandarin Plaza 1 Science Museum Rd Tsimshatsui East Kowloon Hong Kong Tel 852 26206173 Fax 852 26206338 India Varian India PVT LTD 1...

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Page 5: ...of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and...

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Page 7: ...proved by an industrial hygienist or chemical safety engineer Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe...

Page 8: ...SAFELY AND EFFICIENTLY READ THEM SPECIAL OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION INSTRUCTIONS UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN POOR PERFORMAN...

Page 9: ...r flow through the Use water flow sensor and feedback to interlock on the heater main cooling coils power supply Water trapped between inlet and Provide vent or pressure relief valves for both quick c...

Page 10: ...sion pump fluids except mercury are fuels Hydrocarbon oils are more prone to oxidize and explode than synthetic silicone based oil Oxidizers can be air a strong oxidizer from a leak or can be delibera...

Page 11: ...e causes Be certain that exhaust duct materials are capable of withstanding the corrosivity temperature and pressure of exhausted products c Pressure Pumps and their components are designed for vacuum...

Page 12: ...es tion may produce serious effects Even absorption through the skin can result in moderate toxicity Always ensure that cleaning operations are performed in large well ventilated rooms Use of self con...

Page 13: ...large amount of liquid nitrogen is spilled in a small poorly ventilated room or equipment death from suffocation can result All diffusion pumps are typically cleaned with acetone or alcohol Acetone al...

Page 14: ...w areas thus displacing air which can kill by asphyxiation Use in a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irrit...

Page 15: ...onnel to avoid dropping slip ping and or overturning the pump and severely injuring personnel Check weight of equipment before lifting and do not stand under equip ment being moved WARNING ___________...

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Page 17: ...ding Pump Fluid 1 14 Section II Operation 2 1 2 1 Start up Procedure 2 1 2 2 Shutdown Procedure 2 2 Section III Maintenance 3 1 3 1 General 3 1 3 2 Periodic Inspection 3 1 3 3 Cleaning 3 2 3 4 Disasse...

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Page 19: ...Diffusion Pump 1 6 1 4 Water Cooling Connections 1 9 1 5 240 400 440V Wiring Diagram NHS 35 Diffusion Pump 1 10 1 6 380 415V Wiring Diagram NHS 35 Diffusion Pump 1 11 1 7 480V Wiring Diagram NHS 35 Di...

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Page 21: ...440 V with ASA flanges standard cold cap F1730308 F1730309 F1730326 F1730362 F1730364 with ASA flanges and halo baffle F1730318 F1730319 F1730336 F1730363 F1730365 with ISO flanges standard cold cap L...

Page 22: ...Installation 1 2 Figure 1 1 Speed and Throughput Curves NHS 35 Diffusion Pump...

Page 23: ...9 0 25 Height 72 13 inches allow additional 8 inches min for heater removal Jet Assembly 5 stage Self aligning fractionating design with four diffusion stages and one ejector stage Foreline Baffle Sta...

Page 24: ...Installation 1 4 Figure 1 2 Physical Specifications NHS 35 Diffusion Pump with ASA Flanges optional...

Page 25: ...on the bottom of the pump Using a flashlight check to make sure that the ejector nozzle is opposite the foreline the pump outlet connection The jet assembly should not rotate because of an indexing p...

Page 26: ...Installation 1 6 Figure 1 3 Section Drawing NHS 35 Diffusion Pump...

Page 27: ...a large well ventilated room Use of a self contained breathing apparatus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation...

Page 28: ...b Prepare inlet O ring seals by wiping them with a clean cloth Do not use solvents Use a small amount of diffusion pump oil to wet the cleaning cloth Install the O ring in the groove being careful no...

Page 29: ...ected to an open drain and the feed line con trolled by a separate water 3 way valve open closed and vent to atmosphere The drain must be below the boiler level so that it is drained completely when t...

Page 30: ...Installation 1 10 Figure 1 5 240 400 440V Wiring Diagram NHS 35 Diffusion Pump...

Page 31: ...Installation 1 11 Figure 1 6 380 415V Wiring Diagram NHS 35 Diffusion Pump...

Page 32: ...Installation 1 12 Figure 1 7 480V Wiring Diagram NHS 35 Diffusion Pump...

Page 33: ...h should be adjusted with the pump in operation as follows a Disconnect the lead wires and place an ohmmeter across the terminals of the switch b Turn the switch adjusting screw until 1 16 of a turn e...

Page 34: ...s 1 7 ADDING PUMP FLUID a The recommended fluid charge for the pump is three gallons The fluid charge will gradually be depleted through use but the pump will continue to operate normally When the cha...

Page 35: ...d can also be poured in from the pump inlet or foreline d Replace the fill plug with a new Viton gasket Tighten the fill plug using moderate torque 75 inch pounds maximum Lubricate the O ring with pum...

Page 36: ...Installation 1 16...

Page 37: ...release or admitting air to a pump with a hot boiler permit a strong oxidizer to contact the hot pump oil high above 1 micron 133 Pa inlet pressure insufficient or low level of pump fluid running pum...

Page 38: ...which have tight inlet and foreline connections it is possible to close valves to isolate the diffusion pump at inlet and discharge to air release the remainder of the system shut off the heat to the...

Page 39: ...n plugs Slight discoloration of the fluid does not affect performance b Loss of the fluid can be caused by the following 1 incorrect air admittance procedures and or admittance of excessive air or oth...

Page 40: ...ion pumps are typically cleaned with acetone alcohol or other solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury...

Page 41: ...COLD CAP 1 To disassemble the cold cap a Remove the female coupling nut follower and the gasket located at the end of the cold cap water line on the outside of the pump b Remove the nut which secures...

Page 42: ...the jet base is engaged in the locating pin in the boiler Unless this is done the pump will not function properly 3 6 HEATER REPLACEMENT a Determine which heater element has failed at the junction bo...

Page 43: ...leads according to the schematic diagram then run the wires around the periphery of the pump under the wire retaining clips into the conduit and up into the junction box Connect the leads to the term...

Page 44: ...05 Upper thermal switch 200 F K9050006 Lower thermal switch 600 F 647335010 Heater element with leads 4000 W 240V 380V 480V L6383010 Heater element with leads 4000 W 400V L6383011 Heater element with...

Page 45: ...n the system is a result of gas load divided by pumping speed p Q S If the gas load Q exceeds the maximum throughput capability of the diffu sion pump the diffusion pump will not function and the pump...

Page 46: ...and remove cause Low heat input Check heaters Low fluid level Add fluid Malfunctioning pump assembly Check and repair or replace Improperly located jets Damaged jet system Inlet pressure surges Incorr...

Page 47: ...cleaned of all hazardous residue and that the residue remaining is of a non hazardous nature __________ Hereby certify that the product s listed below have been contaminated by the fol lowing toxic o...

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Page 49: ...____ Machine ___________________________ Original Purchase Order No _________________________ Purchase Order Date _______________________ Company Name ___________________________________________ Conta...

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