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Varian HS-32, Instruction Manual, Page: 10 / 19

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Varian HS-32 Instruction Manual Download Page 10

Installation

1-16

1-6-6

Initial Vacuum Test

The purpose of this test is to establish the leak tightness of the system, specifically the vacuum con-
nections to the diffusion pump. (To eliminate misleading indications and the masking of leaks by the
fluid, the tests should be carried out with the diffusion pump “dry", i.e., before it is charged with the
pumping fluid.)

WARNING

Pumps and their components are designed for vacuum service; they
are not designed to be pressurized which could cause them to burst
possibly expelling shrapnel at lethal velocities. Serious accidents have
been caused by intentional pressurization of vacuum systems and their
components. NEVER PRESSURIZE ANY PART OF A VACUUM SYS-
TEM FOR TEST OR ANY OTHER PURPOSE. Always provide pressure
relief when designing diffusion pumps into systems and ensure that
pressure relief motion is limited to safe envelopes.

a

Confirm the vacuum ultimate pressure characteristics of the mechanical pump. This should
closely approximate the value quoted in the manufacturer’s data, if the mechanical pump is
correctly installed, adjusted, and filled with clean oil. Pressure measurements should be made
with a continuously indicating total pressure gauge, such as a thermocouple gauge. This test
can be performed to evaluate either valved or unvalved systems. Connect the outlet or foreline
of the diffusion pump to the inlet of the mechanical backing pump, using appropriate vacuum-
tight connections.

b

In the case of a valved system, close the roughing valve and main isolation valve ahead of 
the diffusion pump. In the case of unvalved systems, the entire work chamber volume must 
be included in the test. Evacuate the entire system with the mechanical pump only.

Let the mechanical pump reach an ultimate pressure in the system. This reading should
approximate the value obtained in step a above (usually 10 to 50 microns (1.33 to 6.65 Pa)). If
it does not, examine for leakage. If leakage is suspected, follow standard procedures for leak
testing. These will depend on the type of vacuum gauges and/or leak detection equipment
available. The most effective are Varian’s helium leak detectors.

Summary of Contents for HS-32

Page 1: ...HS 32 Diffusion Pump Instruction Manual Manual No 6999 01 132 Revision G May 2000 Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 3133 781 861 7200 800 8 VARIAN ...

Page 2: ...2 Hong Kong Varian Technologies Asia Ltd Rm 2611 Concordia Plaza New Mandarin Plaza 1 Science Museum Rd Tsimshatsui East Kowloon Hong Kong Tel 852 26206173 Fax 852 26206338 India Varian India PVT LTD 1010 Compotent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies via Flli Varian 54 10040 Leini Torino Italy Tel 39 011 9...

Page 3: ...E THIS PUMP SAFELY AND EFFICIENTLY READ THEM SPECIAL OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION INSTRUCTIONS UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN POOR PERFORMANCE DAMAGE TO THE PUMP OR OTHER PROPERTY SERIOUS BODILY INJURY AND POSSIBLE DEATH USERS OF THIS EQUIPMENT SHOULD BE ALERT TO TWO LEVELS OF HAZARDS IDENTIFIED BY THE FOLLOWING SYMBOLS Design...

Page 4: ...sive causing serious injury or death Do not use near a high temperature source Ventilate work ing area with a blower and use in large well ventilated room When heated or sprayed solvents also becomes 4 to 5 times heavier than air and will flow down settling in tanks pits and low areas thus displacing air which can kill by asphyxiation Use in a large well ventilated room Use of a self contained bre...

Page 5: ...and water or use a small amount of pump oil Note Always dispose of used or dirty oil properly and in compliance with all local state and federal environmental laws and regulations WARNING If hazardous gas vapors chemicals or combustible mixtures are pumped sufficient quantities may exist during operation This pump may contain decomposed and or overheated pump oils or poisonous and or overheated pu...

Page 6: ...ed if the expected vacuum level is to be below the 10 6 Torr 000133 Pa range d Check the internal jet assembly It should be concentric and firmly seated on the bottom of the pump The jet assembly should not rotate because of an indexing pin at the bottom 1 5 CLEANING A NEW PUMP a Read cold cap maintenance and installation data which will be found in Section III para 3 4 of this manual Remove the c...

Page 7: ...atus may be necessary Acetone alcohol and other solvents are irritants narcotics depres sants and or carcinogenics Their inhalation and or ingestion may pro duce serious effects Prolonged or continued contact with the skin will result in absorption through the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eyeshields gloves...

Page 8: ...he system before installing the pump The boiler of the pump especially for large pumps must be horizontal to prevent uneven fluid level and avoid local overheating where the fluid level would be too shallow b Prepare inlet O ring seals by wiping them with a clean cloth Do not use solvents Use a small amount of diffusion pump oil to wet the cleaning cloth Install the O ring in the groove being care...

Page 9: ...has been designed to operate at a certain voltage Check the heater for correct supply voltage and in the case of multiphase connections for load balance by measuring the resistance of each branch Heater circuit resistance all 3 phase 200V 3 3 ohms measured line to line 240V 4 8 ohms 460V 17 6 ohms 415V 14 4 ohms 480V 19 2 ohms b Make connections to the terminals in the junction box at the foreline...

Page 10: ...uld closely approximate the value quoted in the manufacturer s data if the mechanical pump is correctly installed adjusted and filled with clean oil Pressure measurements should be made with a continuously indicating total pressure gauge such as a thermocouple gauge This test can be performed to evaluate either valved or unvalved systems Connect the outlet or foreline of the diffusion pump to the ...

Page 11: ...r temperature may begin to rise and under this condition the thermal switch is designed to open the heater circuit b This diffusion pumps is furnished with fill and drain fittings with special Viton elastomer sealed plugs c If the pump is hot wait until the pump has cooled then vent it to atmosphere Remove the plug from the filling port of the pump and install the specified quantity of fluidup to ...

Page 12: ...ge of quick cool coils and running diffusion pump foreign matter in the pumping fluid which changes its viscosity and obstructs flow passages CAUTION Do not turn on the heater without fluid in the pump This may ruin the heaters and damage the pump Do not air release the pump while the boiler is hot Most diffusion pump fluids are heat sensitive and will break down under these con ditions Do not ope...

Page 13: ... just above the boiler heat shield can be touched approximately 130 F or 54 C In valved systems which have tight inlet and foreline connections it is possible to close valves to isolate the diffusion pump at inlet and discharge to air release the remainder of the system shut off the heat to the diffusion pump and stop the mechanical pump With this method the quick cool coil does not have to be use...

Page 14: ...d or its wiring Make sure that the pump is at room temperature before attempting ser vice Serious burns can result if this Warning is not heeded Depending on system process poisonous or corrosive compounds may be present when opening the fill or drain Always wear appropriate gloves and clothing and use a self contained breathing apparatus An explosion could occur if the fill or drain is opened whe...

Page 15: ...her solvents When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury or death DO NOT USE NEAR A HIGH TEMPERATURE SOURCE Ventilate working area with a blower and use in large well ventilated room When heated or sprayed solvents also become 4 to 5 times heavier than air and will flow down settling in tanks pits and low areas t...

Page 16: ...the pump unscrew the two nuts on the cross member to release the lower jet stages g Disassemble and clean as required 2 To assemble the jet assembly a Reverse the steps outlined above 3 6 HEATER REPLACEMENT 3 5 CAUTION Poor clamping resulting in inadequate thermal contact may result in reduced heater life and poor pump performance Tighten nuts finger tight on clamping plate then gradually and even...

Page 17: ...n place h Screw on the remainder of the nuts finger tight then tighten the nuts evenly up to 250 inch pounds of torque i Label the heater leads according to the schematic diagram then run the wires around the periphery of the pump under the wire retaining clips into the conduit and up into the junction box Connect the leads to the terminal strip then replace the elbow cover plate j Replace the hea...

Page 18: ...een cleaned of all hazardous residue and that the residue remaining is of a non hazardous nature __________ Hereby certify that the product s listed below have been contaminated by the fol lowing toxic or hazardous materials RA Number Model Number Serial Number ________________________ ______________________ ______________________ ________________________________________ __________________________...

Page 19: ..._____ Machine ___________________________ Original Purchase Order No _________________________ Purchase Order Date _______________________ Company Name ___________________________________________ Contact _______________________________________ Address City ______________________________________________________________ State _________________ Zip _____________ Telephone Failure Report describe in d...

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