Varian 969-9357 Series Instruction Manual Download Page 42

 

 

Request for Return 

 

 

 

1.  A Return Authorization Number (RA#) 

WILL NOT

 be issued until this Request for Return is completely filled out, 

signed and returned to Varian Customer Service. 

2.  Return shipments shall be made in compliance with local and international 

Shipping Regulations

 (IATA, DOT, UN). 

3.  The customer is expected to take the following actions to ensure the 

Safety

 of workers at Varian

:

 (a) Drain any oils or 

other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the 
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit). 

4.  Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.   

North and South America 

Varian Vacuum Technologies 

121 Hartwell Ave 

Lexington, MA 02421 

Phone : +1 781 8617200 

Fax: +1 781 8609252 

Europe and Middle East 

Varian SpA 

Via Flli Varian 54 

10040 Leini (TO) – ITALY 

Phone: +39 011 9979111 

Fax: +39 011 9979330 

Asia and ROW 

Varian Vacuum Technologies 

Local Office 

 

CUSTOMER INFORMATION 

 

Company name: ..………………….……..……………….………………………………..……………………...…………..…. 
Contact person:    Name: ……………………………………..… 

Tel: ……………………….…...…………….….….... 

  

Fax: …………………………….…...…..…… 

E-Mail: ..……………………..…………..…..…..….. 

Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......……….. 

Europe only

:   VAT reg. Number: ………………..……………... 

USA only:

   

 

Taxable     

 

Non-taxable  

Customer Ship To: ………………………….………   

Customer Bill To: …………………..……………... 

                 ……………..…………………...                                

 ..………………………………... 

                 ………………..………………...                                 

 ..………………………………...                      

 

PRODUCT IDENTIFICATION 

Product Description 

Varian P/N 

Varian S/N 

Purchase Reference 

 

 

 

 

 

 

 

 

 

 

 

 

 

TYPE OF RETURN 

(check appropriate box)

 

 

 

 

 

 

Paid Exchange      

 

Paid Repair 

 

Warranty Exchange 

 

Warranty Repair 

 

Loaner Return 

 

Credit  

      

 

Shipping Error 

 

Evaluation Return 

 

Calibration  

 

Other ……………….

 

 

HEALTH and SAFETY CERTIFICATION 

Varian Vacuum Technologies 

CAN NOT ACCEPT

 any equipment which contains 

BIOLOGICAL HAZARDS

 or 

RADIOACTIVITY

. Call Varian Customer Service to discuss alternatives if this requirement presents a problem. 

The equipment listed above (check one): 
    

 

HAS NOT

 been exposed to any toxic or hazardous materials 

       OR 

    

 

HAS

 been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that      

equipment was exposed to, check all categories that apply: 

  Toxic        Corrosive        Reactive        Flammable        Explosive        Biological        Radioactive 

List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula. 

.……………………………………………………………………………………………………………………..

 

 

Print Name: ………………………………….      Customer Authorized Signature: ……………...…………………….     

Print Title: …………………………………...      Date: ..…../..…../……  

NOTE:

 If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, 

the customer 

will be held responsible

 for all costs incurred to ensure the safe handling of the product, and 

is liable

 for any harm or injury to Varian 

employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. 

 

Do not write below this line 
Notification (RA)#: ……………………….………..  Customer ID#: ……….………….  Equipment #: …………………….. 

Summary of Contents for 969-9357 Series

Page 1: ...9360 series MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SI...

Page 2: ...Turbo V 70...

Page 3: ......

Page 4: ......

Page 5: ...DESCRIPTION OF THE TURBOPUMP 25 TECHNICAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 30 BASE FIXING KIT INSTALLATION 31 AIR COOLING KIT I...

Page 6: ...omolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione ATTENZIONE Se per q...

Page 7: ...as inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa...

Page 8: ...den Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlage rung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feucht...

Page 9: ...chette Optional ausgeheizt werden Damit die Flanschgrenztemperatur der Turbopumpe 120 C nicht berschreitet sollte immer bei ausheizbaren Vakuumsystemen die TP mit Wasserk hlung arbeiten GEFAHR eventue...

Page 10: ...le stockage des pompes doi vent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes...

Page 11: ...er de toucher la turbopompe ainsi que ses accessoires ven tuels pendant les op rations de chauffage La temp rature lev e peut causer des l sions aux personnes ATTENTION Pour le refoulement de l air de...

Page 12: ...ales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcion...

Page 13: ...to La alta temperatura puede provocar lesiones a las personas ATENCION Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta a...

Page 14: ...evem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o condensante ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativ las sempre em modalidade Soft St...

Page 15: ...rbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas ATEN O Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras o...

Page 16: ...temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de e...

Page 17: ...tuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan...

Page 18: ...ingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumpe...

Page 19: ...P Til pumpens luftafl b anvendes luft eller en inaktiv luftart der er fri for st v og partikler Indgangstrykket gennem den s rlige bning skal v re under 2 bar PAS P Undg sammenst d vibrationer eller b...

Page 20: ...lytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pu...

Page 21: ...ttenkylningen anv ndas VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador VIKTIGT Anv nd luft eller delgas fri fr n damm och partiklar f r luftning a...

Page 22: ...pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og st...

Page 23: ...De h ye temperaturene kan f re til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller inaktiv gass ved lufting av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar FORSIKTIG Unng st t...

Page 24: ...an seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan...

Page 25: ...n tai sen lis osiin kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden loukkaantumisia HUOMIO P stett ess pumppuun ilmaa tulee k ytt ilmaa tai jalokaasua joissa ei ole p ly tai hiukkas...

Page 26: ...at th metafor th diak nhsh kai thn apoq keush twn antli n den pr pei na uperba nontai oi ex j periballontik j sunq kej qermokras a ap 20 C wj 70 C scetik ugras a ap 0 wj 95 mh sumpukn simh o pel thj p...

Page 27: ...INDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH Gia na diocete sete me a ra thn antl a c...

Page 28: ...the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started wh...

Page 29: ...ories during the heating process The high temperatures may cause burns CAUTION Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 b...

Page 30: ...gher initial voltage frequency ratio Model 969 9360 with ConFlat 2 75 external diameter high vacuum flange The external body of the pump is fitted with fins which allow the pump itself to function wit...

Page 31: ...tional Operating ambient temperature 5 C to 35 C Coolant water flow 10 l h 0 05 GPM temperature 10 C to 30 C pressure 2 to 4 bar 30 to 60 Psi Bakeout temperature 120 C at inlet flange max CF flange 80...

Page 32: ...ph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum...

Page 33: ...the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on either pump series and is supplied with a small tab for easy...

Page 34: ...at a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C The heater ba...

Page 35: ...the suit able holes of the pump Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circuit cooling system In both cases the water temper...

Page 36: ...in the three feed from the rear as shown in the diagram and screw them in ensuring that they do not protrude from the other end For the feet to the pump by tightening the previ ously inserted grub scr...

Page 37: ...w 9 l s 10 CFM input voltage 24 Vdc maximum power 2 16 W dimensions 60x60 mm 2 36x2 36 inches Open the package containing the feet and respec tive screws and install them as indicated in the in stalla...

Page 38: ...N Screw the adapter 1 into the vent hole 2 of the pump The vent device mod 969 9831 allows to avoid undesired pump aeration of the pump during a temporary power failure adjustable time up to 36 min an...

Page 39: ...l 969 9340 for ISO 63 inlet flange version pump is available as accesso ries 4 System vent valve optional 5 Vacuum chamber 6 Ionization gauge It typically reduces the vibration transmitted from the Tu...

Page 40: ...gh temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that the 2 75 CF flange has six blind holes Attach the units and tighten each one in turn...

Page 41: ...otor pins A and F are connected to the temperature sensor NTC type 30 K resistance at 25 C and pin E is connected to the pump ground If the temperature sensor is disconnected the pump will not start T...

Page 42: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 43: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 44: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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