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SK00- 4802-DC-002-01

No.090317

Heater Replacement Procedure

Oil Diffusion Pump

Model

ULK-10A
ULK-14A

Components Division,

ULVAC, Inc.

http://www.ulvac.co.jp/

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Summary of Contents for ULK-10A

Page 1: ...SK00 4802 DC 002 01 No 090317 Heater Replacement Procedure Oil Diffusion Pump Model ULK 10A ULK 14A Components Division ULVAC Inc http www ulvac co jp ...

Page 2: ...eassembly of high vacuum pumps If you are not experienced in disassembly and reassembly of high vacuum pumps contact your local ULVAC service station Before replacement of the heater Disassembly of a pump used for exhausting toxic gas or active gas can be dangerous If a pump was used for exhausting such type of gas seal it completely simultaneously with removing the pump from the system and reques...

Page 3: ... s requirements i Before replacement of the heater i 1 Parts used 1 1 1 Table of Major Parts 1 1 2 Table of Replacement Parts 1 1 3 Bolts used 2 1 4 Miscellaneous 2 2 Tools to use 3 2 1 Table of Working Tools 3 3 Removing the Heater 4 4 Installing the Heater 6 ...

Page 4: ... wool tube 5mm dia 185mm long for heater lead wire 1 pc 6 Glass wool tube 10mm dia 45mm long for heater terminal 2 pcs 7 Glass fiber tape 0 18 mm thick 13 mm wide 300 mm long 8 Heater lead 2 pcs 9 Heat transfer cement 120 g 1 2 Table of Replacement Parts No Description Quantity Check 1 Heater see Note 1 pc 2 Heat resistant heat shrinkable tube 15mm ID 40mm 2 pcs 3 Heat transfer cement 120 g Note U...

Page 5: ...ne screw M5 10 4 pcs 9 Cross recessed head machine screw M5 15 1 pc 10 Spring washer M5 5 pcs 11 Plain washer M5 5 pcs For fixing heater terminal cover 12 Cross recessed head machine screw M5 10 2 pcs 13 Spring washer M5 2 pcs 14 Plain washer M5 2 pcs 1 4 Miscellaneous Quantity or size No Description ULK 10A ULK 14A Check 1 Working fluid ULVOIL D 11 or D 31 800 cc 1 500 cc 2 Intake port gasket NBR...

Page 6: ...Working Tools No Photo Description No Photo Description 1 Torque wrench 5 Nxm 7 Heat resistant gloves 2 Spanner 10 2 pcs 5 1 pc 8 Protective gloves 3 Philips screwdriver 9 Box 10 mm 4 Shockless hammer 10 Spatula 5 Scraper 11 Pliers or cutting pliers 6 Wire brush ...

Page 7: ...hile after having stopped operation You have a risk of getting burned if a part of the body touched it Keep flowing the Coolant as far as the Pump temperature cools down Use a flow meter HWFM for example Flow sight applicable to visually check the Coolant supply source that no water is flowing WARNING Take off the piping following the Install Manual of the system Make airtight completely the Pump ...

Page 8: ... Here see to it that the pump interior is not closed 5 Turn the pump upside down to set the boiler cover side in the up position 6 Remove all connecting terminals of the heater connection in the terminal box 7 Remove the heater terminal cover to remove the heater leads 8 Remove the screws that fix the boiler cover to remove the boiler cover 9 Remove the bolts and nuts that are used to fix the heat...

Page 9: ... 4 Installing the Heater 1 Take care against electric shock and burn Energize the heater with 100V power to preheat it to 90 C Check the temperature on a surface thermometer 2 Take 120 grams of heat transfer cement and apply it to the surface on which the heater is installed on the pump side Here apply a uniform coat of heat transfer cement about 1 cm inside the end ...

Page 10: ...s and nuts inside with a uniform torque of 10 Nxm Then tighten the 4 bolts on the outside with a uniform torque of 10 Nxm Retighten the 3 bolts inside with increased torque of 10 Nxm Finally retighten the 3 bolts outside with increased torque of 10 Nxm 5 Take care against electric shock and burn Energize the heater with 100V power to heat it up to 170 C Here check the temperature on the surface th...

Page 11: ...move it Heater terminal adjustment 10 With the boiler cover being assembled temporarily make sure with a 500V Megger that the insulation resistance between the boiler cover and heater terminal is 10 MΩ or more If not the heater terminal and the boiler cover may be in contact with each other 11 Remove the boiler cover that has been installed temporarily Wrap glass fiber tape around each of the two ...

Page 12: ...ube into the heater terminal Here insert the heat resistant thermal shrinkage tube into the glass wool tube installed by step 11 above 16 Bring the heat resistant shrinkage tube into intimate contact with the lead with the hot gun as shown in the photo below To terminal block Heat resistant thermal shrinkage tube Heater terminal Plane washer Nut Heater terminal Heat resistant thermal shrinkage tub...

Page 13: ...ver is 10 MΩ or more on a 500V Megger If not there is a possibility of the heater terminal not being correctly installed In that event install the heater terminal correctly 19 Bind the 2 heater leads with a glass wool tube 20 Connect the heater lead to the terminal block 21 Restore the pump to the original state This completes heater replacement Before starting the pump reassemble the jet refer to...

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