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ULVAC CRYOGENICS INCORPORATED
12. Troubleshooting
When any failure or unusual state is found, perform the fault diagnosis shown in the
following table. When contacting us, check the status lights of sequencer on the electrical
circuit in advance.
Problem
Possible Cause
Corrective Action
(1) The unit fails to start
even if the RUN/STOP
switch is turned on”
(The RUN/STOP button
fails to light.)
The main power source
(breaker) is turned off.
Turn on the main power source.
The main power cable is not
connected.
Connect the main power cable
correctly.
The fuse of MP-300K electrical
circuit is blown.
Replace the fuse with a new
one.
If the fuse is blown repeatedly,
contact us.
The power (breaker) of
MP-300K is turned off
Turn on the power breaker of
MP-300K
The emergency stop switch is
pressed.
Reset the emergency stop
switch by turning it to the right,
and restart.
(2) LN
2
production fails to
start even if the
RUN/STOP switch is
turned on”
(The RUN/STOP switch
lamp comes on.)
The LN
2
level does not reach
the re-starting level.
When LN
2
level is decreased to
lower than 75%, LN
2
production
resumes automatically.
(3) Power breaker is tripped
Short circuit or leak current
occurs.
Contact us.
(4) N
2
GAS ALARM lights.
The RUN/STOP switch
lamp of MP-300K flickers
at the same time
GN-20i is suspended.
Restart GN-20.
N2 supply is declined, or the
pressure goes down
temporarily.
Refer to the 8.4.3 Corrective
action when N2 GAS ALARM
occurs” and re-start the system.
Danger of electric shock exists. Ensure that main power is disconnected before
inspecting the power source or inside the equipment.
Some parts of the equipment may remain in high temperature right after the
shutdown. Use caution to avoid burn injury.
WARNING
