Ulvac G-Tran ISG1, Instruction Manual

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13. Multi-Ionization Gauge SH2/ST2
We recommended a connection with the standard type
When connecting to the SH2-2/ST2-2 serial communication type, FIL ON,
etc., cannot be performed with the sensor. Depending on the cable
connection, there is a risk of damage to the SH2-2 multi-ionization gauge.
Sensor and SH2/ST2 connection cable
The cable to connect the sensor and the SH2/ST2 has a maximum length of
20 m for the 24AWG. To use the sensor with a cable longer than 20 m,
directly connect the SH2 to a power supply or increase the cable diameter.
This section describes the operation of the SH2/ST2 ionization vacuum gauge.
Before reading this section, read the standard operating procedure in the foregoing sections.
13.1.
Sensor Unit Setting: “Sh2”
Turn on the power to this unit and make sure that “Sh2” lights for several seconds.
To display others, press the key several times within 3 seconds after turning on power,
change the display to “Sh2” and make it definite with the key.
For more information about the sensor unit setting, refer to Section 6.
13.2.
Front Panel
13.2.1. Pressure display
Status Pressure indicator LED
In normal measurement
5.0
×
10
-8
Pa to 1.0
×
10
+1
Pa
Below measurement pressure range
0.0
×
10
-8
Pa
Above measurement pressure range and
when pressure protection signal is input Prt
Above measurement pressure range and
when pressure protection signal is not input
FiO
When power is turned on FiF
Immediately after filament is turned on FiO
When degassing is ON Pressure indication DEG is lit
When emission valid is OFF Pressure indication Err blinks
When sensor unit is not connected - - - Err lights
*1: When a CALCULATION function is used, it displays to 10
-11
at the minimum.
10
-10
is “A (A of capital letter)”, 10
-11
is “b (B of small letter)”.Please note “b (B of small
letter)” to make a mistake as '6' of the figure.
13.2.2.
Description of front panel keys
Inscription Function Remarks
PROG Enters into program mode Refer to Section 5.
ZERO Not used
DEG Degassing ON/OFF operation Cannot be operated when RS485 and external I/O
are set
FIL Filament ON/OFF operation Cannot be operated when RS485 and external I/O
are set
13.2.3.
Setting Operation
13.2.3.1. Setting Overview
The following settings are available for turning on the filament or degassing and for changing
over the filament 1/2.
Setting Overview
RS485 communication mode Only RS485 communication is available.
Front panel operation mode Only front panel operation is available.
External I/O operation mode Only external I/O operation is available