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Ulvac G-Tran IM1R1, Instruction Manual, Page: 1 / 84

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Ulvac G-Tran IM1R1 Instruction Manual Download Page 1

 

 

No. SK00-8431-003-09 

 

 
 

G-TRAN SERIES 

MODEL IM1R1/IM2R1   

4CH DIGITAL DISPLAY UNIT   

INSTRUCTION MANUAL 

 

 
 

 

This manual is for the display units of the following 
serial numbers. 

IM1R1:Serial No. 10134G and higher 

IM2R1:Serial No. 01597 and higher 

 

 

 

Read this manual before operation and keep it at hand 
for immediate reference. 

 

 

Components Division, 

ULVAC, Inc. 

 

2500 Hagizono, Chigasaki City, Kanagawa-ken, Japan 

 

http://www.ulvac.co.jp/ 

 

 

 

Summary of Contents for G-Tran IM1R1

Page 1: ...ual is for the display units of the following serial numbers IM1R1 Serial No 10134G and higher IM2R1 Serial No 01597 and higher Read this manual before operation and keep it at hand for immediate refe...

Page 2: ...ii...

Page 3: ...are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of urgency of danger when failure to...

Page 4: ...this unit and to devices connected to this unit and a risk of fire Excessive vacuum chamber pressure Do not connect this unit in a location where the gauge head s internal pressure exceeds atmospheri...

Page 5: ...ground leakage and fire if water penetrates inside this unit Foreign object insertion Protect this unit so that metallic and flammable foreign objects cannot enter the interior of this unit from the...

Page 6: ...y There is a risk of damage if this unit is transported without packaging or transported attached to the equipment Maintenance The electrical circuitry inside this unit uses aluminum electrolytic capa...

Page 7: ...OL MODE 17 4 3 3 Setting of serial communication speed BAUD RATE VALUE 19 4 3 4 Setting of LCD contrast LCD CONTRAST SET 20 4 3 5 FIL HV On Off DeGas On Off 21 4 3 6 ZERO point atm point adjustment an...

Page 8: ...has changed but the segment indicator remains at a certain indication 70 7 3 Pressure indication is not FU LL under atmospheric pressure 70 7 4 Pressure has increased but the segment LED indicates 0 0...

Page 9: ...Measurement unit Box unit Analog communication Pirani BPR2 Ionization BMR2 Sensor unit Analog Pirani SP1 Analog CCG SC1 Analog communication Pirani atmospheric pressure SW1 Analog communication Ioniza...

Page 10: ...DEG Communication mode Remote mode RS MODE CAL function Calculating function CAL Ionization gauge In this manual the ionization gauge means both the hot cathode ion gauge and cold cathode ion gauge un...

Page 11: ...asily by connecting it to the sensor unit or box unit and the operating state to be known at a glance Measurement can be made by remote operation through the display unit It has four independent press...

Page 12: ...om the measuring unit Data output ch1 to ch4 Pseudo log output 0 10 VDC linear signal in each digit Update time SP1 SC1 BPR2 BMR2 SH2 ST2 50 ms SW1 70 ms Resolution 10 mV Accuracy 0 5 50 mV at the man...

Page 13: ...ensor is used 5 Indicates the indicating accuracy of the display unit Refer to respective instruction manuals for the measurement accuracy 6 The pressure measurement range of the ionization sensor and...

Page 14: ...R1 S N01385or higher Hot cathode ion gauge IG BMR2 Box type 5 0E 8 to 9 9E0 Metal type sensor head Hot cathode ion gauge IG3 SH2 Sensor type 5 0E 8 to 9 9E0 Metal type sensor head IM1R1 S N10134Gor hi...

Page 15: ...ON setting combination mode On Off Recorder output setting in combination mode Setting end 2 sec or more CALCULATION SET sensitivity factor setting HV Press SET setting pressure of HV ON 1sec or more...

Page 16: ...y Changes over the mode to Setting of serial communication speed 4 f2 key Changes over the mode to Setting of LCD contrast 5 LOCK key Changes over the mode to Setting of operation mode Holding down th...

Page 17: ...nsor In the setting mode displays the set item 3 Filament high voltage degas FIL HV DEGAS When the ion gauge Ch1 is used displays the filament high voltage status Degas is used only with the hot catho...

Page 18: ...or Connects to the G TRAN sensor box unit Treated as Ch2 to 4 sensor Sensors that can be connected are Pirani gauge SP1 BPR2 Atmospheric pirani gauge SW1 3 4 5 IO connector Analog output of measuremen...

Page 19: ...transfer control to a desired set mode 4 3 1 Setting of display mode The mode can be changed with the Disp key The mode can be transferred from Display mode 1 to 3 in sequence by input of Disp key Fi...

Page 20: ...nnected NC Sensor not connected Selection of IG and CCG can be set only for ch1 Refer to the next paragraph CH COMBINATION setting for the setting of IG1 2 If the sensor is not connected to each chann...

Page 21: ...signates the sensor number Sensor Displays the sensor connection status Selection of filament Only when the sensor is IG Displays the FIL1 or 2 selection status Set point Displays the setpoint set sta...

Page 22: ...splay with the cursor key The currently selected channel is shown with Status display LCD Status 10 Pressure measuring status NC Sensor not connected Sensor is not connected set ERROR PG filament open...

Page 23: ...isplay mode is set at Display mode 3 the operating status may be displayed in addition to the pressure value Fig 4 3 6 Status display ERROR When PG is set Indicates the sensor filament burnout status...

Page 24: ...ally turned off However it is necessary to enter FIL HV OFF as resetting action status reset because the PROTECT status is not automatically reset IG CCG FIL OFF Indicates the filament OFF status when...

Page 25: ...en REMOTE1 or 2 is set References About remote operation p 44 About serial communication p 48 4 3 2 1 Front panel operation effective in each mode Effective inputs of front panel vary with the control...

Page 26: ...t only status monitor is available 4 3 2 3 Communication function effective in each mode Local mode front panel operation Remote mode 1 external IO control Remote mode 1 communication control Effectiv...

Page 27: ...selecting it with the cursor key The communication speed set value is displayed on the LCD panel The set range is as follows Communication speed 9600 19200 38400 57600 When power is turned on the prev...

Page 28: ...ransfer control to the setting mode with the f 2 key Exit the setting mode with the f2 key after selecting it with the cursor key When power is turned on the previous setting when power was turned off...

Page 29: ...filament and filament step will be released for some time after it is lit and the pressure will rise temporarily so that a higher pressure will be indicated for a while Also the sensor head sensitivi...

Page 30: ...gassing automatically to protect the filament when pressure has risen When it is actuated the PRT lamp on the front panel will light To reset PROTECT turn OFF the FIL ON signal that has been input Whe...

Page 31: ...CH COMBNATION OFF Select the channel to be configured for by cursor key Hold FIL HV more than 1sec ZERO point and atm adjustment Hold FIL HV more than 5sec ZERO point and atm reset Refer to The instr...

Page 32: ...ransfers control to the next item The PROG key exits the setting mode Operation to exit the setting mode can also be performed during setting Operating condition of this mode Ch4 Vacuum gauge type All...

Page 33: ...uating point p 28 3 Setting of combination mode CH COMBINATION Permits setting of combination action mode of ion gauge and Pirani gauge between ch1 and ch2 When the combination mode is designated sele...

Page 34: ...gauge filament setting 1 BMR2 IG1 FIL2 Ion gauge filament setting 2 BMR2 IG2 FIL1 Ion gauge filament setting 1 BMR2 combination mode IG2 FIL2 Ion gauge filament setting 2 BMR2 combination mode IG3 FIL...

Page 35: ...ectively Any ion gauge can be used if the combination mode is set at OFF but it is requested to check the type of your ion gauge in setting to prevent erroneous action IG 3 After setting each ch make...

Page 36: ...the range it is changed to the nearest value If the set value is out of the range ERR will be displayed at upper right of the LCD Enter it again IG1 IG2 IG3 IG4 5 0E 08 9 9E 00 Pa PG 4 0E 01 3 0E 03 P...

Page 37: ...e of filament or HV ON Hot cathode ion gauge Filament ON 2Pa Cold cathode ion gauge High voltage ON user setting default 0 6Pa 3 Type of vacuum gauge that permits setting of the combination mode ch1 S...

Page 38: ...N is set control is transferred to the setting of recorder output Fig 4 4 3 Combination mode setting Remark Sensor setting in combination mode When using Hot Cathode Ionization Gauge in combination mo...

Page 39: ...digit Pseudo logarithmic output in 1V step E 04 E04 E 05 E03 E 06 E02 E 07 E01 E 08 E00 UNIT ch1 Index digit 1V pseudo log or log output ch1 Ionization gauge ch2 SP1 BPR2 PG or SW1 PG2 Reference p 38...

Page 40: ...5 0 10 2 Pa 6 50 V V on order of 10 8 CAL ON 9 9 10 3 4 9 102 7 49 V on order of 10 5 CAL ON 7 5 10 2 3 7 10 3 7 37 V on order of 10 10 CAL ON 0 1 10 3 5 0 10 6 6 50 V on order of 10 12 Setpoint when...

Page 41: ...played on LCD and re input is required 4 When the CAL function is made definite CAL lights on the LED at upper right 5 To exit the setting mode hold down the PROG key for two seconds or more To contin...

Page 42: ...PROG key and ENT key displayed on LCD 2 Set an item and value with the cursor key 3 Make the setting definite with the ENT key If the set value is out of the range ERR will be displayed on LCD and re...

Page 43: ...ctor CN1 ch1 BPR2 SP1 SW1 BMR2 SH2 SC1 CN2 ch2 BPR2 SP1 SW1 CN3 ch3 CN4 ch4 Reference About compatible measuring unit p 6 Connect the sensor connector to the IO connector of the measuring unit Sensor...

Page 44: ...nal output 1 8 Sensor error signal output from ch1 4 When the ion gauge is used the following signals can be used Filament high voltage On Off IG CCG The following can be used only for the hot cathode...

Page 45: ...Setpoint 5 D OUT 6 Setpoint 2 D OUT 31 Setpoint 6 D OUT 7 Setpoint 3 D OUT 32 Setpoint 7 D OUT 8 Setpoint 4 D OUT 33 Setpoint 8 D OUT 9 ERROR 1 OUT D OUT 34 ERROR 3 OUT D OUT 10 ERROR 2 OUT D OUT 35 E...

Page 46: ...10 1 E Pa 5 0 10 1 0 50 4 0 10 1 0 40 0 0 10 1 0 00 Atmospheric pirani sensor SW1 Pressure display value Pa Output voltage V Pressure display value Pa Output voltage V 1 2 10 5 8 079 5 0 10 1 4 699 1...

Page 47: ...easuring unit p 6 Reference Setting of recorder output in combination mode p 31 Ion gauge SH2 ST2 Pressure display value Pa Output voltage V Pressure display value Pa Output voltage V 9 9 10 0 6 497 1...

Page 48: ...imit 1 7 V or less In case of filament burnout 9 V or more Ion gauge BMR2 Operating status Measurement value output voltage Filament High Voltage Off 10V Filament High Voltage On E V OK Voltage corres...

Page 49: ...set The following is an explanation of the recorder output when the combination mode is set For the setting refer to the setting of recorder output when in the combination mode p 31 Combination mode R...

Page 50: ...0 Measurement value output voltage is converted to pressure value by the following equation when CAL is OFF P 10 V E 10 8 E Pa where P Pressure value Pa V Measurement value output voltage V E V from w...

Page 51: ...th IG the measurable pressure range differs from that in the independent mode The actual effective measurement range depends on the specification of the measuring unit UNIT1 IG UNIT2 PG Measured press...

Page 52: ...5 65 5 55 9 9E 2 1 0E 2 5 49 5 05 9 9E 7 1 0E 7 0 99 0 55 9 9E 8 5 0E 8 0 49 0 25 5 2 3 About remote operation IG CCG The ion gauge connected to ch1 can be remotely operated from the IO connector In...

Page 53: ...T 2 ___ ON OFF Setpoint output is given by the action of the internal transistor when the measurement value becomes smaller than the set pressure Lo output when setpoint is ON What is a setpoint Setpo...

Page 54: ...and if required Setpoint of measuring unit and display unit Setpoints of the display unit sensor unit and box unit are independent of each other Therefore if the setpoint signal of the display unit a...

Page 55: ...ssion Valid is OK This function is available only with the hot cathode ion gauge BMR2 SH2 Reference About ion gauge operation p 21 Discharge OK NG Discharge OK NG If discharge is off or failure in it...

Page 56: ...ation ID loading Measurement value status loading Status loading Combination mode setting loading Setpoint set value loading Setpoint status loading CAL setting loading REMOTE1 IO control REMOTE2 Comm...

Page 57: ...4 bits uppercase character 0 9 A F CR Carriage return Convert all in the ASCII code 5 3 3 2 Response of display unit to commands When request for processing is successful Response O K CR When the con...

Page 58: ...it of each channel is transmitted in response 1 4 T P space G CR P G 2 I G 1 I G 2 I G 3 I G 4 C C G N C Reference Setting of sensor type p 26 5 3 3 4 Saving ID saving of equipment connected to each c...

Page 59: ...int status STSH STSL reflects the set status of Ch 1 2 Response CH D X X E X X SH SL STSH STSL CR X XE XX Pressure value SH Higher 4 bits of status SL Lower 4 bits of status STSH Higher 4 bits of setp...

Page 60: ...setpoint is set Example of set status STSH higher 4 bits STSL lower 4 bits Setpoint 8 7 6 5 4 3 2 1 ch1 ch2 ch3 ch1 NC ch1 ch1 NC Setting of ch1 decimal 1 0 0 1 0 1 1 0 Setting of ch2 hexadecimal 9 6...

Page 61: ...always 0 FIL ON OFF 1 ON 0 OFF DEGAS ON OFF 1 ON 0 OFF With CCG always 0 CCG 4 34H 0 30H B7 NC 0 0 B6 HV ON OFF 1 0 B5 NC 0 0 B4 NC 0 0 With CCG HV ON OFF 1 ON 0 OFF SL lower 4 bits IG CCG Bit No Sign...

Page 62: ...he case of the request above CAL setting is Off and the set value is stored C W 0 CR Response 0 K CR or N G CR If attempt is made to set a value in excess of the set range NG will be sent back and the...

Page 63: ...to set a value in excess of the set range NG will be sent back and the set value will not be changed Reference About setpoint output p 45 5 3 3 12 Loading all setpoint status Requests the loading of...

Page 64: ...W S CR S is 8 when the combination mode is ON or 0 when the combination mode is OFF Response O K CR or N G CR If the setting of the sensor type is not appropriate NG will be transmitted in response 5...

Page 65: ...or N G CR Recorder output set status when combination mode is set CSH higher 4 bits Bit No Signal identification Value ASCII code 0 30H 8 38H 4 34H 2 32H B7 Ch1 measurement value 0 1 0 0 B6 Ch2 measu...

Page 66: ...W1 Request CH Z E R CR Response O K CR Or N G CR Atm adjustment command for SW1 Writes in the Atm adjustment command for SW1 Request CH A T M CR Response O K CR Or N G CR Reset command for Zero Atm se...

Page 67: ...T d t 0 1 0 1 5 TC5 ENQ TC8 NAK 5 E U e u 0 1 1 0 6 TC6 ACK TC9 SYN 6 F V f v 0 1 1 1 7 BEL TC10 ETB 7 G W g w 1 0 0 0 8 FE0 BS CAN 8 H X h x 1 0 0 1 9 FE1 HT EM 9 I Y i y 1 0 1 0 A FE2 LF SUB J Z j z...

Page 68: ...ing the display unit Refer to the figure below for the cutting of the panel to be installed Also refer to the figure below for how to use the clamp The thickness of the panel to be installed should be...

Page 69: ...61 Turn the clamp screw counterclockwise to loosen it before mounting the panel Mounting plate 1 to 6 mm thick Side view...

Page 70: ...62 6 2 2 Dimensional drawings Fig 6 2 2 Dimensional drawings Rear view Side view Front view Panel...

Page 71: ...C100V DC24V RS232C I O CH1 BMR2 CH2 BPR2 CH3 BPR2 CH4 BPR2 Fig 6 2 3 Connection diagram Main power 100 VAC 24 VDC The measuring unit in this figure is an example of combination Remote I O Recorder out...

Page 72: ...and the sensor head Securely tighten the connector fixing screw Do not mistake the pin No when supplying power to the display unit References Rear panel p 10 About sensor connector p 35 About externa...

Page 73: ...brochures for more information Modular connector cables Plug model Crimping tool model Maker Modular plug and tool TM3P 64P Flat cable for strand TC 2220 64 01 Hirose Electric TM4P 64P Round cable fo...

Page 74: ...4 core or 6 pole 6 core modular connector CAB First verify that the cut surface of the wire is perpendicular to the cable If the cut surface is oblique the wire will not reach the pressure connected e...

Page 75: ...me take record of which color of the end is at extreme right with respect to the lock claw of the connector This is necessary when installing the opposite side CAB Insert the connector into which the...

Page 76: ...trol from the display unit Refer to the measuring unit instruction manual for more information 6 3 2 About cable connecting to measuring unit and display unit Use the Dsub 15 pin straight cable Connec...

Page 77: ...er GND 10 OUT COM IO output GND 13 DEGAS ON OFF 15 GND measurement value GND 1 ST2 is setting only filament1 SC1 connector pin assignment CN1 CCG Terminal No Signal identification Direction of signal...

Page 78: ...be checked and repaired at ULVAC Failure of display unit internal circuit To be checked and repaired at ULVAC 7 2 Pressure has changed but the segment indicator remains at a certain indication Possibl...

Page 79: ...unit is used Check the cable for continuity by a circuit tester If the cable is open replace it Sensor head filament has burnt out Change over the filament to the other one or replace the sensor head...

Page 80: ...ive action Filament protection is actuated due to high pressure Check pressure by another vacuum gauge such as Pirani gauge Operation is performed on the front panel in LOCK ON state Or remote operati...

Page 81: ...head electrode Check insulation between the electrodes and between wall of the sensor head by a Megger The Megger indication must be infinite Measuring unit manual If insulation failure is verified r...

Page 82: ...ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm and flood d...

Page 83: ...75 9 Certificate of Decontamination...

Page 84: ...s not the product warranty period Table1 Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit B...

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