30
ULVAC CRYOGENICS INCORPORATED
12. Maintenance and Inspections
12.1 Daily inspection
Check for the following as daily inspections.
(1) The operating sound generated from each device is normal.
(2) The pressure and flow rate of nitrogen gas are 0.2 MPa and 10 NL/min.
respectively.
(3) Helium gas pressure of SA115-C is within the appropriate range.
When suspended:
1.95 – 2.05 MPa
When in operation:
2.20 – 2.30 MPa
(4) The alarm light of EMP-14A is not lit.
12.2 Periodical maintenance/inspection
Table 12-1
Maintenance interval
Parts
10,000
hours
30,000
hours
40,000
hours
8,000
hours or
2 years
(Shorter)
20,000
hours *3
Coldhead *1
Oil adsorber
Helium pipe joint
GN-10i Air Compressor
GN-10i Filter *2
GN-10i Solenoid valve
Parts
1year
2years
5years
IM-120 Membrane
IM-120 Prefilter
IM-120 tube, joint
IM-120 Fixed throttle valve
IM-120 Check Valve
Check the total operation time of EMP-14A with the hour meter on SA115-C.
When the maintenance interval approaches, the Maintenance light blinks.
*1… The coldhead should be replaced once every 10,000 hours of operation.
However, replace with new ones once every 5 years as the built-in parts may
become deteriorated even if 10,000 hours is not reached,
*2… In addition to table 12-1, clean the filter of the air inlet of GN-10i once a month.
*3… Maintenance intervals vary depending on the operating condition. For
