Ulvac CRYO-U12H, Instruction Manual

Page: 28 / 102

Cryopump Description
1.2 Specifications
Table 1-1 CRYO-U
®
Specifications
U12H U12HSP U12HL
Pumping speed
（
L/s
）
Nitrogen
Hydrogen
Argon
Water
4,000
6,000
3,300
9,500
4,100
6,000
3,400
9,500
4,000
6,800
3,300
9,500
Ultimate pressure (Pa) The order of 10
-7
Maximum throughput
(Pa
･
L/s)
Argon
Hydrogen
2.0 x 10
3
(1.3 x 10
3
) (*4)
4.1 x 10
2
(2.6 x 10
2
) (*4)
2.0 x 10
3
(1.3 x 10
3
) (*4)
4.1 x 10
2
(2.6 x 10
2
) (*4)
2.0 x 10
3
(1.3 x 10
3
) (*4)
4.1 x 10
2
(2.6 x 10
2
) (*4)
Pumping capacity
(Pa
･ L)
Argon
Hydrogen
2.1 x 10
8
9.8 x 10
5
4.4 x 10
8
1.6 x 10
6
3.1 x 10
8
9.8 x 10
5
Cooldown time (min)
（
50/60Hz
）
85/75
(100/90) (*5)
90/80
(105/95) (*5)
90/80
(105/95) (*5)
Weight (kg) (*1) 40 42 40
Refrigerator unit
(Cold head)
R20/R20R/RM20
Compressor unit C30V/C30VR
Compressor unit for
multi-operation (*2)
C30MV/C30MVR
Helium gas supply and
return connectors
1/2 self-sealing couplings
Mounting position Can be operated in any position(*3)
(*1) Shows the weight of standard cryopump. The weight varies depending on the model.
(*2) Multi-operation with C30MVR compressor is possible up to two cryopumps among U12H,
U12HSP,U12HL.
In multi-operation, when one cryopump has already been cooled down and starts cooling down the
other cryopump later, the latter may take longer cool-down time than the time shown in the table above.
(*3) Mounting position may be restricted depending on a kind or quantity of captured gas.
(*4) The values in parentheses are of multi-operation.
1-2 ULVAC CRYOGENICS INCORPORATED