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Ulvac AxTRAN ISX2, Instruction Manual, Page: 1 / 84

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Ulvac AxTRAN ISX2 Instruction Manual Download Page 1

 

 

No.SK00-7200-EI-003-08 

 

 

 

 

AxTRAN 

 

MODEL ISX2 

 

EXTREME-HIGH VACUUM GAUGE 

 

INSTRUCTION MANUAL 

 

 

This manual is for ultra-high vacuum  gauges of serial 
numbers 00100 and higher.

 

 

Read this manual carefully before using this gauge and keep 
it at hand for immediate reference.

 

 

When used by Torr, the following conversion equations shall be used. 

1[Torr]=1.3332

×

10

2

 [Pa] 

1[Pa]=7.5006

×

10

-3

[Torr]

 

 

 

Components Division, 

ULVAC, Inc. 

2500 Hagisono, Chigasaki City, Kanagawa Prefecture, Japan 253-8543 

http://www.ulvac.co.jp/

Summary of Contents for AxTRAN ISX2

Page 1: ...mbers 00100 and higher Read this manual carefully before using this gauge and keep it at hand for immediate reference When used by Torr the following conversion equations shall be used 1 Torr 1 3332 1...

Page 2: ...I...

Page 3: ...Safety Denotations Safety symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of...

Page 4: ...environment Do not connect the sensor head to an environment where pressure exceeds atmospheric pressure If the pressure in the sensor head exceeds atmospheric pressure the sensor head will be damaged...

Page 5: ...n repacking When shipping the gauge repack it in the same way as on delivery It is shipped bare it may be damaged Maintenance Aluminum electrolytic capacitor and cooling fan are used for the electric...

Page 6: ...lete Nov 13 2013 04 Sensor material Standard Accessories WARRANTY EC DECLARATION OF CONFORTMITY CERTIFICATE OF DECONTAMINATION added Oct 28 2016 05 Baking temperature added Initial setting Degassing T...

Page 7: ...sensor head 11 5 FLOW OF PROGRAM RUN 13 6 STARTING UP GAUGE SUPPLY OF POWER 14 7 FRONT PANEL OPERATION 15 7 1 Filament ON OFF 15 7 1 1 When pressure protection is activated 16 7 2 Initialization 17 7...

Page 8: ...nal 48 11 3 3 Control of filament 48 11 3 4 Control of degassing 48 11 3 5 Reading the gauge status 49 Setting sensitivity factor 49 11 3 7 Setting specific sensitivity factor 49 11 3 8 Setting and re...

Page 9: ...Set point internal circuit 37 Input output connector pin assignment 39 Fig 10 2 Digital output internal circuit 40 Fig 10 3 Data valid signal strobe signal actuating chart 41 Fig 10 4 Data rewriting...

Page 10: ...surement resolution of 0 5 10 10 Pa by reducing the residual current due to soft X rays and electron stimulated desorption ESD ions The unit consists of a sensor head cable and measuring unit The sens...

Page 11: ...output a contact Contact capacity AC 125V max 0 5 A max Contact capacity DC 24 V max 1 0 A max Sensitivity factor setting function Sensitivity factor for nitrogen can be set Specific sensitivity fact...

Page 12: ...mA Sensor head sensitivity 0 023 Pa 1 average value Baking temperature Sensor head 300 Ion collector cable 80 Sensor cable 150 2 3 Utilities Operating temperature range 10 to 40 C Power requirements...

Page 13: ...y F1 Adjusts the offset of the measuring system Pressing the key selects the offset mode and returns to the normal measurement in about 3 minutes Program key PRG Switch to change over to the setting m...

Page 14: ...ion SET 1 lamp SET1 Lit when set point 1 is activated SET 2 lamp SET2 Lit when set point 2 is activated Filament lamp Lit When the filament is ON and the emission current is normal Blink When the fila...

Page 15: ...ont Panel Measurement Value Display Set Value Indicator Fig 3 3 Front panel measurement value display set value indicator Status Function When in the measurement mode Displays the pressure measurement...

Page 16: ...nnector for output of set point and recorder output EXT I O D sub 9 pin socket connector for recorder output and set point output Digital I O and serial communication port by changing it with the opti...

Page 17: ...or Fig 3 5 Set point recorder output connector pin assignment Terminal No Signal identification Terminal No Signal identification 1 REC OUT OUT PUT 6 REC OUT OUT PUT 2 SET1 OUT PUT 7 SET COMMON OUT PU...

Page 18: ...witch for settings DIP switch No ON OFF 1 DC AMP 10 13 A DC AMP 10 14 A 2 Torr Pa 3 Not used Not used 4 Not used Not used 5 Not used Not used 6 Not used Not used 7 Not used Not used 8 Not used Not use...

Page 19: ...he bottom panel in the controller is opened Name Inscription Function Grid line fuse F1 Inserted in the DEGAS line of the grid Protects the electric circuit in case the grid line is shorted by a load...

Page 20: ...o a strong impact or vibration sideways when it is slackened by heat it may break or contact with the grid electrode 4 2 3 Connecting the controller and sensor head Connect the sensor head sensor head...

Page 21: ...nected when there is a potential difference you may get electric shock The connectors on both ends of the sensor head cable are at the same potential as their ground Before connecting removing the cab...

Page 22: ...et point 1 setting page 20 Set point 2 setting page 21 Sensitivity factor setting page 22 Specific sensitivity factor setting page 23 Degassing time setting page 24 Filament No selection page 25 Recor...

Page 23: ...h on the front panel of the controller to feed power POW appears and setup is completed SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO The portion in the left figure lights 0 00 10 is displayed on...

Page 24: ...mally the lamp above the FIL key lights and measurement starts MESU status If the filament is on but electron current is not flowing normally the lamp above the FIL key blinks SE T 2 SE T 1 0 1 I NT P...

Page 25: ...e the following display will appear The recorder output is zero volt First adjust offset with the offset key If there is no change the pressure is below the measurable pressure SE T 2 SE T 1 0 1 I NT...

Page 26: ...ad were inspected and calibrated in a pair 7 3 Offset See page 63 SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO OFS Adjusts the offset of the meter manually OFS is displayed during offset adjustm...

Page 27: ...Degassing is feasible even before the set time elapses The set time count will be reset if degassing is turned off before elapse of the set time The recorder output is 10 V during degassing SE T 2 SE...

Page 28: ...being set will not be retained The set values saved immediately before will be the set values CAUTION Inputs from the front panel are not feasible when in the REMOTE status Always reset them before i...

Page 29: ...OFF SET PRO SET1 Each time the key is pressed the numeric value of the blinking portion changes Press the key when a desired value is displayed to transfer control to the SET1 status SE T 2 SE T 1 0...

Page 30: ...DEG OFF SET PRO SET2 Each time the key is pressed the numeric value of the blinking portion changes Press the key when a desired value is displayed to transfer control to the SET1 status SE T 2 SE T...

Page 31: ...umeric value of the blinking portion changes Press the key when a desired value is displayed to transfer control to the SENS status SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO SENS Each time th...

Page 32: ...ges Press the key when a desired value is displayed to transfer control to the REL status SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO REL Each time the key is pressed the numeric value of the b...

Page 33: ...ired value is displayed to transfer control to the DEGAS status SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO DEGAS Each time the key is pressed the numeric value of the blinking portion changes...

Page 34: ...ol to the REC status To use filament 2 press the key with FIL _2 selected to transfer control to the REC status 8 7 Recorder Selection See page 33 If the setting is not changed press the key to transf...

Page 35: ...AP The portion in the left figure blinks after the segment indicator displays FLt __ for about 1 second Each time the key is pressed the numeric value of the blinking portion changes FLt 00 FLt 01 FLt...

Page 36: ...for about 1 second Each time the key is pressed the numeric value of the blinking portion changes OFS 00 OFS 01 OFS 02 OFS 06 OFS 12 OFS 24 OFS 00 cyclically Press the key when a desired value is disp...

Page 37: ...ER F I L DEG OFF SET PRO BPS The portion in the left figure blinks after the segment indicator displays bPS __ for about 1 second Each time the key is pressed the numeric value of the blinking portion...

Page 38: ...only in the front panel setting Input can be made from the front panel and through communication RS 232C The value set last is saved as the set value Example If 5 27 10 2 is set from the front panel a...

Page 39: ...ugh the communication RS 232C The value entered last will be saved Example If 5 0 10 2 is set from the front panel and 3 00 10 5 is set later through the communication RS 232C the value set from the f...

Page 40: ...communication RS 232C The degassing time set last is saved Example If 30 is set from the front panel and 50 is set through the communication later the value set from the front panel will be erased and...

Page 41: ...e sensor head depends on the distance between the filaments grid and ion collector electrode The sensitivity differs slightly between filament 1 and filament 2 because the distance between filaments 1...

Page 42: ...AS 10 00 V When offset OFS 10 00 V When initialized INT 10 00 V 9 5 3 LIN output An analog voltage of 0 to 10 V proportional to the mantissa part is outputted that is 0 00 V when the mantissa part of...

Page 43: ...34 Fig 9 1 Recorder output graph linear Example of recorder output when pressure is rising Example of recorder output when pressure is lowering...

Page 44: ...e value Pa Output voltage V 5 00 10 3 7 500 1 00 10 7 3 100 1 00 10 3 7 100 5 00 10 8 2 500 5 00 10 4 6 500 1 00 10 8 2 100 1 00 10 4 6 100 5 00 10 9 1 500 5 00 10 5 5 500 1 00 10 9 1 100 1 00 10 5 5...

Page 45: ...0 1 sec interval LOG V 0 1 sec interval REC HOLD V 0 1 sec interval Place of 1 of mantissa part Place of 0 1 of the mantissa part Place of 0 01 of the mantissa part Place of exponent part Place of 0 0...

Page 46: ...er COM a contact b contact is output per set point The contact capacity is AC 125 VMAX 0 5 AMAX DC 24 VMAX 1 0 AMAX However it is recommended to use it at below 24 VDC so as not to bring the noise sou...

Page 47: ...ready possessed from a panel a board 2 Please install the harness which is attached to an option board on a board two places Install an attached spacer 3 Please insert the main body of option board fr...

Page 48: ...ON VALID OK NG OUT PUT 36 PRESSURE DATA B b2 OUT PUT 12 DATA VALID OK NG OUT PUT 37 PRESSURE DATA B b3 OUT PUT 13 PRESSURE DATA OUT PUT 38 PRESSURE DATA C b0 OUT PUT 14 PRESSURE DATA C b3 OUT PUT 39 P...

Page 49: ...ally output between pin 5 of the EXT I O connector and each signal line Internal 5V power Output signal Open collector 5 EXT OUT COM IS O GN D PH 4 GN D 23 48 D GND 24 49 A GND Fig 10 2 shows the digi...

Page 50: ...4 Data rewriting time chart 1 Data are output at intervals of about 100 ms in which data are rewritten at intervals of 1 ms CAUTION If data are loaded during data rewriting DATA VALID Hi correct disp...

Page 51: ...ime The Ton time is the transistor charge discharging time and the Toff time is the transistor charging time Therefore it varies with the load resistor connected to the open collector In order to term...

Page 52: ...e 1 2 of HP3 shorting Refer to external control using the internal power supply Fig 10 7 and connect the ANALOG GND terminal or DIGITAL GND terminal 23 24 48 49 and each signal by means of a relay con...

Page 53: ...roller power according to the line voltage on the controller side Referring to external control using the external power supply in Fig 10 8 connect the minus side GND of the power supply on the contro...

Page 54: ...ch operation simultaneously If input simultaneously either operation may not be actuated Provide a time difference between actions Fig 10 9 Method of external control The filament can be protected wit...

Page 55: ...e feed Japanese shift code KI 1A70 KO 1A71 Transmission distance 15 m 11 1 2 Baud rate setting Refer to 8 10 Baud Rate Setting It is factory set at 9600 bps 11 1 3 Communication cable connector The co...

Page 56: ...AUTO mode time in XX minutes SE X XXE XX OK or NG Sets sensitivity factor SR X XX OK or NG Sets specific sensitivity factor R1 X XXE XX Reads data of setpoint 1 R2 X XXE XX Reads data of setpoint 2 S1...

Page 57: ...K is sent back in response and if it is NG NG is sent back in response To turn ON the filament send F1 command If this setting is OK OK is sent back in response and if it is NG NG is sent back in resp...

Page 58: ...reading the setpoint Command Parameter Response Data Explanation of function R1 X XXE XX Reads data of setpoint 1 R2 X XXE XX Reads data of setpoint 2 S1 X XXE XX OK or NG Sets setpoint 1 S2 X XXE XX...

Page 59: ...30 60 or 90 To know the value of the set filter send T1 command In the case of 3 digit display the controller sends back XX in response to this inquiry In the absence of setting through communication...

Page 60: ...lied The details of data are as follows Items 0 X1 Fil 2 1 Setting condition Fil2 Fil1 X2 Fil ON OFF OFF ON X3 Em Valid NG OK X4 DeGas ON OFF OFF ON X5 PROTECT Pressure protection OFF ON X6 SetPoint2...

Page 61: ...uble from other items The power line in the controller is disconnected Disconnection or short has occurred in the power line in the controller inline filter wiring power switch transformer switching p...

Page 62: ...ge 75 Note After checking the ion collector coaxial contact for insulation using a Megger short the points measured by the Megger to discharge the charge If it is reconnected without discharging the D...

Page 63: ...O connector Reset REMOTE from the front panel Measured pressure differs largely from expected value Possible cause Corrective action Sensor head cable has blown out or insulation has failed resulting...

Page 64: ...0 VAC Filament is turned ON above the measurable pressure range Check pressure using a Pirani gauge or other vacuum gauge If the pressure is too high gas cannot be ionized normally and the ion current...

Page 65: ...sensor head with a new one Erroneous wiring or broken wire of the EXT I O connector Correct the wiring and check continuity using a circuit tester See page 39 Control operation from I O connector can...

Page 66: ...ctrode to be connected is incorrect When relay contact input unit is used it is often the case that one side is connected to the power supply In this case connect the common side of the gauge to the m...

Page 67: ...ing rewriting 1 ms Perform processing by DATA VALID signal See page 40 Communication cannot be established Possible cause Corrective action Cable specifications differ RS 232C cables include the strai...

Page 68: ...a or less 2 The necessary electrode bias between the filament and the grid must be impressed 3 The temperature of the filament must be a necessary temperature 4 The surface area of the filament must b...

Page 69: ...electrons emitted from the filament electron current Ie number of ions produced ion current Ii and density of gas molecules pressure P Ii k Ie P 1 Ii Ion current A k Sensitivity Pa 1 Ie Electron curre...

Page 70: ...le water oxygen etc tend to emit a large amount of ESD ions while stable gases tend to emit a small amount of ions When a relatively active gas pressure is measured by a normal ion gauge in an ultra h...

Page 71: ...d in the ion collector and the background signal by offset of the electron amplifier The background signal is measured by setting Vbe in the figure above to 150 V potential at which ions are not detec...

Page 72: ...able and connector Especially humidity can be a cause of changing the electrical resistance value on the electrical board and the characteristics of the circuit itself The insulator PTFE used for the...

Page 73: ...assume that the vacuum gauge corrected for nitrogen indicates P N2 when gas x is admitted into the vacuum layer Pressure P x of the actual gas x at this time is given by the following equation P x P...

Page 74: ...1 30 0 17 146 70 SF6 2 50 2 41 Linear relationship holds between Srj and Xj and when Srj of the gas is unknown it can be predicted from Xj 200 80 Hg 3 30 1 04 2 07 0 04 16 10 CH4 1 58 1 63 0 30 30 18...

Page 75: ...usly displays the software version and starts up this gauge SE T 2 SE T 1 0 1 I NT POWER F I L DEG OFF SET PRO TEST Turning on power with both the key and key held down displays the figures at left Ex...

Page 76: ...e local ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm and...

Page 77: ...68 16 16BEC DECLARATION OF CONFORTMITY...

Page 78: ...he product warranty period Table Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board Cha...

Page 79: ...70 18 18BCERTIFICATE OF DECONTAMINATION...

Page 80: ...71 19 19BRELATED DRAWINGS Fig 19 1 ISX2 compatible sensor heads...

Page 81: ...72 Filament common Orange Filament 1 Yellow Filament 2 Blue Grid Green Vbe Red Vba White Fig 19 2 Sensor head electrode location...

Page 82: ...73 Fig 19 3 Dimensional drawing...

Page 83: ...are as shown above When screw holes are tapped in the panel the screw size is M5 or M4 If they are not tapped and fixed with nuts on the rear use 5mm dia or 4mm dia screws Fig 19 4 Vacuum gauge mount...

Page 84: ...Pin No Signal identification Pin No Signal identification 1 FIL1 yellow A Vbe red 2 Vba white B Vba white 3 Vgf green C Vgf green 4 FIL COM orange D GND black 5 NC E FIL1 yellow 6 Vbe red F FIL2 blue...

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