CaloSys Modules
21
Exchanging Filter
10.2.1.
NOTICE
- Instrument damage!
The mass flow controllers in the Control Units are sensitive instruments that must be
protected against dust particles.
Check the air filters of the air supply pumps every month and replace them when dirty but LATEST
every three months. Failure to do so will void the warranty.
Fig. 3 Air pump (Top view)
•
Remove filter cover screw
Fig. 4 Filter cover removed
•
Remove filter cover
