User's Manual Rev B / February 2021 / M125 Helium Compressor
97-00020-000
4
4
Introduction
4.1
General Information about the Model 125 Compressor
Trillium US Inc. offers industry-proven compressors such as the Model 125 Compressor described in this manual, at highly
competitive prices, and with flexible configurations. Model 125 compressors are available in low-voltage and in either air or
water-cooled model.
4.1.1
Model 125 Features
The Model 125 compressor is designed for tens of thousands of hours of continuous operation. The main features of the
Model 125 compressor are:
•
Minimal maintenance requirements
•
Removable top cover for easy maintenance
•
No front or rear panels with which to struggle
•
Rack mounting available, which is ideal for ion implanters, cat scanners, and sputtering system applications.
4.1.2
Overview of Model 125 Compressor Design & Operation
Model 125 Helium Compressor is specifically designed to run a single CP-8, CP-8F (low profile), OB-8, or OB-8F cryopump
for 208/230 VAC and 60/50 Hz single phase operation.
The compressor itself consists of four main components:
• Compressor capsule
• Heat exchanger
• Oil mist (vapor) separator
• Adsorber
The
compressor unit
and the cold head are connected by way of helium gas flex lines. The compressor unit, cold head and
helium lines are fitted with self-sealing couplings and are charged with ultra-high-purity (99.999%) helium gas.
The
heat exchanger
removes the heat generated from the process of compressing helium in the capsule. The heat
generated by the capsule must be removed from the oil and the helium gas.
To remove heat from the compressor capsule, oil is used as lubrication and cooling medium. The helium gas as well as oil is
then pumped by way of differential pressure, out of the capsule through the water-cooled or air-cooled heat exchanger.
The cooled oil returns to the capsule to lubricate and cool the capsule.
The helium gas purifying occurs after the heat removal and cooling process. Helium gas purification must occur because the
heat exchanger still has a small amount of oil vapor mixed with it. If this helium gas gets to the cryopump with oil vapor in
it, the oil will freeze and foul the cryopump. The function of the
oil mist (vapor) separator
is to rid the helium gas stream of
this oil vapor. The condensate from the oil is then returned to the capsule. The helium gas still contains a small quantity of
oil vapor at this point.
The
adsorber
then filters out the remaining oil vapor from the helium gas stream. Overtime, the
adsorber
may become
saturated from the oil vapor. Thus, it is important the adsorber be replaced according to the recommended replacement
interval.
4.1.3
Description of Subsystems
Along with the four main components, Table 3-1 describes the subsystems that serve to monitor the operating condition of
the compressor unit and to ensure its safe operation.
