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User's Manual Rev B / February 2021 / M125 Helium Compressor
97-00020-000
1
2
Preface
2.1
About Trillium US Inc.
Trillium US Inc., an Oregon based company, specializes in the manufacture and repair of cryogenic vacuum pumps,
cryocoolers (refrigerators) and helium compressors for semiconductor, optical coating, linear accelerators, medical
equipment, and R&D applications.
You can find just what you need from our range of products and support services:
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New Equipment - cryopumps, compressors, cryocoolers, and cryopump controllers such as the Model 125 Helium
Compressor described in this manual.
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Comprehensive range of accessories for the installation of whole systems and a complete range of spare parts to repair
cryopumps and compressors.
2.2
Other Services from Trillium US Inc.
Trillium US Inc. offers comprehensive refurbishment services for its own equipment as well as for that of most of our
competitors. Our products and services are available through our global network of agents and dealers.
•
Repair and refurbishment services - We offer our own quality products, as well as most other manufactures models,
often with off-the-shelf availability.
•
Exchanges - We offer our own quality products, as well as most makes of cryopumps and helium compressors, which
are refurbished and fully warranted.
•
Technical Support - Our support engineers will help determine if your cryopump system is operating correctly so that
you can get your system back to optimum efficiency as soon as possible.
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To contact Trillium US Inc. Technical Support:
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E-mail:
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Telephone: 1-512-441-9258 or Toll Free: 1-800-404-1055
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Installation - On-site installation services are available to guarantee performance and save you time.
•
Training - We offer on-site training to help you and your staff to know more about your cryopump and compressor
systems. Our training will give you confidence and the ability to maintain a highest possible uptime for your system.
2.3
About this Manual
The purpose of this manual is to provide our customers using the Model 125 Helium Compressor with the information
needed to safely and efficiently operate the compressor when operating as part of a cryogenic refrigeration system. Such a
system is often comprised of the following equipment:
•
Model 125 helium compressor unit
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Cold head(s) or cryopump(s)
•
Connecting helium lines
This manual describes the design, operation and maintenance of the Model 125 helium compressor unit.
2.4
Compatibility
The Model 125 Helium Compressor is compatible with the cryopumps and cold heads described in Table 1-1. Each Model
125 Helium Compressor can be used to run one such cryopump or cold head.