15
Chapter 5
Specification
5.1
Specification
Stage Specifications
Drive Specifications
Parameter
Value
Travel
13 mm
Travel Mechanism
Crossed Roller Bearings
Deck Height
62.5 mm (2.46”)
Optical Axis Height
75 mm (2.95”)
Max Load Capacity
4.4 kg (9.7 lbs)
Mounting Barrel
Ø 9.5 mm (Ø 0.38”)
Pitch and Yaw
X: ±125 µrad
Y: ±75 µrad
Z: ±150 µrad
Straightness
± 10 µm
Parameter
Value
Travel Range
Coarse: 13mm (1/2”)
Fine: 300 µm
Resolution
Coarse: 5.0 µm
Fine: 0.5 µm
Coarse Adjustment
(with Vernier Scale)
500 µm per rev
Fine Adjustment
(with Vernier Scale)
50 µm per rev.