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10997-D02
MAX300 Series 3-Axis Flexure Stages
Fig. 1.6 Manual Drives
The external piezo actuator can be fitted in-line with the standard drives described on
the previous page. The DRV120 provides an additional 20 µm of piezo travel.
Fig. 1.7 Compatible Piezo Actuators
DRV3 differential micrometer drive
DRV004 thumbscrew drive
DRV120
External piezo actuator
with feedback