Tektronix KEITHLEY 8010 User Manual Download

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Model 8010 High Power Device Test Fixture User's Manual

Section 7: High voltage capacitance measurements

8010-900-01 Rev. C / March 2017

7-23

Figure 95: CVU Connection Compensation

Figure 96: ACSBE Multimode HVCV Test

Summary of Contents for KEITHLEY 8010

Page 1: ...User s Manual 8010 900 01 Rev C March 2017 P8010 900 01C 8010 900 01C www tek com keithley Model 8010 High Power Device Test Fixture A Greater Measure of Confidence ...

Page 2: ...f Keithley Instruments is strictly prohibited All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Other brand names are trademarks or registered trademarks of their respective holders Microsoft Visual C Excel and Windows are either registered trademarks or trademarks of Microsoft Corporation in the United States and or other countries Document num...

Page 3: ...ts may be connected to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to mains Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that ...

Page 4: ...read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from ele...

Page 5: ...itry 2 12 Using the access port on the Model 8010 2 12 Working with devices and instruments 3 1 Safety information 3 1 Device test boards 3 2 Installing a device in the axial posts 3 4 Installing a device in the TO socket 3 5 Using the insulating plug 3 6 Using the 8010 DTB CT 3 6 Installing Tektronix socket adapters 3 7 Measurement considerations 3 7 Local and remote sense measurements 3 7 Suppre...

Page 6: ...ce and make connections 5 3 Set up communication 5 3 Example program code 5 4 Example program usage 5 9 On state characterization of a power MOSFET 6 1 Introduction 6 1 Equipment required for this example 6 2 Connect instruments to the Model 8010 6 2 Install the device and make connections 6 6 Suppressing device oscillations optional 6 7 Set up communication 6 8 Example program code 6 9 Example pr...

Page 7: ... performing HV C V measurements 7 22 Frequently asked questions 8 1 Noisy low current measurements 8 1 Interlock error message 8 1 Can high current SMUs be used separately inside the fixture 8 2 The device is oscillating How do I correct this 8 2 Can I use local sense for high current or lower power SMUs 8 2 Can I operate the test fixture with the lid open 8 3 Maintenance 9 1 Replacing the boards ...

Page 8: ...aceable socket module test boards allow for a variety of package types including the user supplied socket types The Model 8010 allows you to connect one Model 2657 High Power SourceMeter for up to 3 KV testing You can connect up to two Model 2651 High Power SourceMeters for 15 A DC testing or 50 A or 100 A pulse testing For lower power terminals you can connect up to two other SourceMeters such as...

Page 9: ...e The 8010 CTB Customizable Test Board allows you to add your own socket The 8010 DTB 220 Test Board is for use with three terminal TO 220 or TO 247 devices and is limited to 1000 V and the maximum rated current of the test fixture Additionally the 8010 DTB CT Curve Tracer Adapter Test Board allows you to use the same socket style installed in Tektronix Series Curve Tracers Extended warranty Addit...

Page 10: ...uture shipment Accessories See the Model 8010 High Power Device Test Fixture Interconnection Reference Guide for details on provided accessories Characteristics For indoor use only Maximum signal voltage signal or guard to any signal Three lug high voltage triaxial connector 3280 V Three lug standard triaxial connector 210 V Eight pin screw terminal connector 40 V Two pin high current screw termin...

Page 11: ...the Model 8010 2 12 Rear panel overview Instrument connections are made to the rear panel of the Model 8010 The rear panel of Model 8010 is shown below Descriptions of the rear panel connections are provided after the graphic Figure 1 Model 8010 rear panel The rear panel options are described on the following pages Section 2 Connecting instruments ...

Page 12: ...ents Connections are as follows SHI Sense HI HI HI SLO LO sense LO The Model 2600 1 connectors provide sense HI HI LO and sense LO input connections for Model 2600 instruments Connections are as follows SHI Sense HI HI HI SLO LO sense LO The 4200 SMU connectors provide sense HI and HI input connections for Model 4200 SMU instruments Connections are as follows SHI Sense HI HI HI The 4200 GND UNIT c...

Page 13: ...cks connected You can use any one of the interlock connectors Installing the test boards The Model 8010 is shipped with two 8010 DTB Device Test Boards installed The boards include connections for TO 247 and axial lead devices The Model 8010 is also shipped with an 8010 CTB Customizable Test Board which allows you to add your own connections In addition you can purchase the 8010 DTB 220 Device Tes...

Page 14: ... connected to the test fixture through connected devices or devices under test DUTs 2 In the test fixture remove the four Phillips flat head screws that secure the board you want to replace 3 Set the replacement board in place with the yellow connectors connectors 3 and 6 oriented toward the rear of the fixture Line up the pre drilled screw holes in the board with the screw holes in the fixture 4 ...

Page 15: ...the interlock switch is engaged The output is not automatically turned on when the interlock switch is engaged Any instruments connected to the Model 8010 must either be powered on or disconnected from the interlock if powered off For detailed information on the interlock requirements for a specific SMU see the reference manual for that SMU Rear panel connections This section describes the connect...

Page 16: ...12 SMUs If there is a device under test DUT failure this circuitry protects the SMUs from high voltage from the Model 2657 The LO terminal is connected to chassis ground if you connect the Model 2611 or 2612 to the Model 8010 through the Model 2600 TRIAX Do not convert triaxial cables to BNC cables Using BNC cables will remove protection from SourceMeter Instrument voltages and may result in instr...

Page 17: ...Model 8010 High Power Device Test Fixture User s Manual Section 2 Connecting instruments 8010 900 01 Rev C March 2017 2 7 Figure 3 Model 8010 to Model 2611 or 2612 rear panel connections ...

Page 18: ...ry for the Model 2635 and 2636 SMUs In the case of a device under test DUT failure this circuitry protects the SMUs from high voltage from the Model 2657 Do not convert triaxial cables to BNC cables Using BNC cables will remove protection from SourceMeter Instrument voltages and may result in instrument damage You must use triaxial cables Figure 4 Model 8010 to Model 2635 and Model 2636 rear panel...

Page 19: ...erlock is not necessary because output voltage of the Model 2651 is below hazardous levels The CA 558 2 cable is shown here in case you want to use Output Enable to shut off the output when the Model 8010 lid is opened To activate Output Enable refer to the Model 2651 Reference Manual Output Enable can be activated using the front panel or by remote control Figure 5 Model 8010 to Model 2651 wiring...

Page 20: ...Section 2 Connecting instruments Model 8010 High Power Device Test Fixture User s Manual 2 10 8010 900 01 Rev C March 2017 Model 2657 connections Figure 6 Model 8010 to Model 2657 rear panel connections ...

Page 21: ... a device under test DUT failure this circuitry protects the SMUs from high voltage from the Model 2657 The LO terminal is connected to chassis ground once you connect the Model 4200 or 4210 SMU to the Model 8010 Do not convert triaxial cables to BNC cables Using BNC cables will remove protection from SourceMeter Instrument voltages and may result in instrument damage You must use triaxial cables ...

Page 22: ...on the Model 8010 The rear panel of the lid of the Model 8010 contains an access port This port can be used to bring in connections for external instrumentation For example you could route oscilloscope probes through the access port to the device under test or to the guard terminal of the instruments connected to the Model 8010 Before removing the access port cover plate make sure you remove all p...

Page 23: ... User s Manual Section 2 Connecting instruments 8010 900 01 Rev C March 2017 2 13 If you want to use the oscilloscope voltage probe to monitor the instrument output connect the probe to the Guard terminal to avoid loading the device under test ...

Page 24: ... fixture Ensure that wires do not protrude beyond the fixture lid and that the lid will close securely Exposed wire may result in electric shock causing death or serious injury Hazardous voltages may be present on the output and guard terminals To prevent electrical shock that could cause injury or death never make or break connections to the Model 8010 while the output from the SourceMeter Instru...

Page 25: ...st boards The Model 8010 DTB 8010 DTB 220 8010 DTB CT curve tracer and 8010 CTB customizable test board device test boards include sockets for three terminal and axial lead devices see the next graphics The connections available on the boards allow you to make 2 wire local or 4 wire remote test connections Figure 8 8010 DTB Figure 9 8010 DTB 220 ...

Page 26: ...ruments 8010 900 01 Rev C March 2017 3 3 Figure 10 8010 DTB CT Figure 11 8010 CTB The socket has true remote sense connections to each pin with two binding posts connected to each terminal of the device One set of binding posts is intended for force connections and the other for sense connections ...

Page 27: ...ror due to lead resistance Figure 12 Force and sense posts Two 8010 DTB high power socket module test boards are installed in the Model 8010 The Model 8010 is also shipped with an 8010 CTB Customizable Test Board which allows you to add your own connections In addition you can purchase the 8010 DTB 220 Device Test Board for use with three terminal TO 220 or TO 247 devices You can also purchase rep...

Page 28: ...g if used from the three pin socket 2 Verify that the four axial terminal posts are not connected to anything 3 Place the TO 220 or TO 247 device into the pins of the three pin socket If you are installing a two terminal device place the device into the outer pins See Off state characterization of a power MOSFET and On state characterization of a power MOSFET on page 6 1 for examples The two termi...

Page 29: ... cause measurement errors You should insert the insulating plug into the three pin socket when testing devices with axial leads in 4 wire sense mode where a short between force and sense will cause measurement errors Do not use the insulating plug when testing devices with higher resistance greater than 1 MΩ Using the plug for these tests may cause leakage measurement errors Using the 8010 DTB CT ...

Page 30: ...rminal Figure 15 Model 8010 DTB CT assembly Measurement considerations The following topics describe some considerations you should be aware of when taking measurements Local and remote sense measurements With the Model 8010 you can make measurements using either 2 wire local or 4 wire remote sensing Examples of each are shown in the Model 8010 Interconnection Reference Guide The 2 wire local or 4...

Page 31: ... 8 8010 900 01 Rev C March 2017 The 2 wire sensing method requires only two test leads However as shown in the following figure test lead resistance can seriously affect the accuracy of 2 wire resistance measurements particularly when measuring smaller resistance values Figure 16 Two wire resistor sensing ...

Page 32: ...nt through the sense leads is negligible and the measured voltage is essentially the same as the voltage across the resistor under test Figure 17 Four wire resistance sensing Four wire remote sense is recommended when device resistances are low enough less than 1 kΩ that resistance in the test leads will cause significant error in the measurement For more information in the Series 2600 or Model 26...

Page 33: ...is device dependent However typical gate resistor values range from tens to hundreds of ohms If the gate remains unstable after inserting a dampening resistor enable the high capacitance mode if available on the SMU connected to the gate How to insert a resistor on a device terminal The Model 8010 is equipped to connect a standard resistor with axial leads to any device terminal To connect a resis...

Page 34: ...e configuration the sense lead of the SMU will need to be connected to the same side of the resistor as the source lead To connect both the sense and source leads to the same side of the resistor stack the ends of the force and sense lead jumpers together then connect them to the customer supplied alligator clip Figure 19 Four wire remote sense with gate resistor ...

Page 35: ...the DUT Observe that inductance is related to the loop area between the HI and LO leads of the high current conductor The Keithley Model 2651 KIT cable assembles are designed to have low resistance inductance and these cables are recommended whenever the Model 2651 High Power System SourceMeter instrument is used Excessive inductance may slow the rise time of a pulse and result in inaccurate fast ...

Page 36: ...sitic or nonparasitic leakage paths An example of parasitic resistance is the leakage path across the insulator in a coaxial or triaxial cable An example of nonparasitic resistance is the leakage path through a resistor that is connected in parallel to the DUT Guard is typically used to drive the guard shields of cables and test fixtures Guard is extended to a test fixture from the cable guard shi...

Page 37: ...LO adversely affecting the DUT low current or high resistance measurement Also in the next figures the driven guard is connected to the cable shield and extended to the metal guard plate for the insulators Since the voltage on either end of RL1 is the same 0 Vdrop no current will flow through the leakage resistance path Therefore the SourceMeter instrument only measures the current through the DUT...

Page 38: ...ense HI and Sense LO cables at the device connections panel of the Model 8010 Overview Model 8010 capacitance voltage C V measurements use two or three bias tees to couple the DC bias from a SMU instrument with the AC signal from an impedance measurement instrument These bias tees can enable C V measurements with DC bias up to 3000 V and AC measurement frequencies up to 1 MHz Connections are suppo...

Page 39: ...ched to a known protective earth safety ground before powering on instruments Failure to attach the ground wires to a known protective earth may result in electric shock Making measurements through the bias tee The bias tees include a switch that allows the user to optimize the measurements For advanced users the switch can be controlled by setting an appropriate bias level on the AC inputs Comple...

Page 40: ...r 2600 RBT 200 The bias tees typical capacitance measurement are input Ciss output Coss and transfer capacitance Crss Cres measurements If you want to use the bias tees for AC and DC measurements and then make DC only measurements in this case you do not have to physically remove bias tees from your configuration This is possible since the bias tees can be programmed from AC DC mode to DC only mod...

Page 41: ...bias tees are fully guarded and are configured for triaxial connections so that the low current DC measurements may be performed through the bias tee see next figure Figure 25 Model 8010 single bias tee block diagram Bias tee modes Each CVU 3K KIT and CVU 200 KIT bias tee can be configured in one of three modes 1 I V mode on page 3 19 2 C V mode on page 3 20 3 C V Hi I mode on page 3 20 Keep in mi...

Page 42: ... measurements Example tests Ciss Coss 10 V Closed Closed 1 The control voltage is a DC voltage driven at the AC input of the bias tee Each control voltage must be maintained within 250 mV A minimum drive current of 15 mA is required to close any of the desired switches 2 Dependent on test system inductance 3 Dependent on test system inductance I V mode This is the default state for the bias tees U...

Page 43: ...ment mode DC bias 1 A most closely mimics a traditional bias tee It is ideal for performing C V measurements where DC bias current up to 1 A is required This high current may be useful for making C V measurements on a semiconductor device in the on state In this mode both bias tee AC and DC switches are closed Compared to the off state C V mode C V measurements in this mode are degraded below 100 ...

Page 44: ... Section 3 Working with devices and instruments 8010 900 01 Rev C March 2017 3 21 The following graphic shows how to use the external bias tees for making up to 3 kV capacitance measurement connections Figure 29 CVU 3K KIT 2 Terminal measurement connections ...

Page 45: ...r Device Test Fixture User s Manual 3 22 8010 900 01 Rev C March 2017 The following graphic shows how to use the external bias tees for making up to 200 volt capacitance measurement connections 400 V differential Figure 30 CVU 200 KIT 2 Terminal measurement connections ...

Page 46: ... tees Additionally make sure the grounding plug is in a grounded outlet 1 Connect ground wires to the mounting bracket of the remove bias tee kit 2 Mount the bias tees on the mounting bracket and secure with the screws see below diagram Figure 31 Grounding wires connected to grounding bracket bias tee attachment example Capacitance measurements through the Model 8010 are meant to be two wire local...

Page 47: ...l posts are disconnected and place the two terminal TO 247 device into the 3 pin socket Figure 32 Model 8010 CVU 3K KIT 2 terminal DUT connection The following graphics show the connections for the open and short cable compensation measurements Make sure that you do not have a device inserted in the test fixture device socket For more information about open and short compensation refer to the next...

Page 48: ...terminals Figure 34 Model 8010 CVU 3K KIT 2 term DUT terminal short connection The following shows a two terminal axial DUT This configuration can be used for testing two terminal TO 247 devices as well When testing two terminal TO 247 devices remove the plug from the socket if inserted Make sure the four axial device terminal posts are disconnected and place the two terminal TO 247 device into th...

Page 49: ...4210 CVU capacitance voltage instrument is a four terminal instrument that includes remote sense capability A C V meter includes an AC voltage source and an AC ammeter The sense leads are used to maintain the voltage at the device terminals As with all AC measurements ensure a good connection between the shields of all the terminals at the DUT The integrity of this connection becomes increasingly ...

Page 50: ...the test instrument including the distance between the test instrument leads Run the short compensation routine on the C V instrument and it will measure impedance across the frequency to capture the stray capacitance When performing C V measurements with the CVU 3K KIT or the CVU 200 KIT option short and open compensation help to cancel the impact of the capacitance resistance and inductance of t...

Page 51: ...ed in ACS Basic to safely discharge the bias tee and device capacitance after completing a High Voltage C V test Note that an operator error a power outage or an unforeseen event can leave a dangerous charge in the system Therefore the Model CVU 3K KIT includes the 8020 DP High Voltage Discharge Probe Use this discharge probe to manually discharge the bias tee capacitance and system capacitance wi...

Page 52: ...itance Figure 40 8020 DP High Voltage Discharge Probe Prior to connecting the Model 8020 DP discharge probe be sure that the Model 8010 has been connected to protective earth Refer to section 2 Connection safety 1 Make sure that the Model 8010 has been connected to protective earth as in the example illustration below Figure 41 Grounding cables attached to the rear of the Model 8010 ...

Page 53: ...Test Fixture User s Manual 3 30 8010 900 01 Rev C March 2017 2 Make sure that grounding wires are connected to protective earth safety ground screw terminals of the remote bias tee mounting bracket see illustration below Figure 42 Grounding the remote bias tee mounting bracket ...

Page 54: ...rge probe ground cable to the protective earth safety ground screw terminal on the bias tee Nothing else should be connected to the protective earth safety ground screw terminal Do not stack protective earth cables Figure 43 8020 DP connected to bias tee bracket ground Do not open and remove the Model 8010 cover until you have properly grounded the discharge probe ...

Page 55: ... fixture cover 5 While holding the discharge probe handle use the probe to contact the terminals on the device test board that contact the 2657 HI and SHI terminals Maintain contact for at least one second to safely discharge system capacitance see the next graphics Figure 44 8020 DP contacting 8010 HI terminal Figure 45 8020 DP contacting 8010 SHI terminal ...

Page 56: ...ections of the 2657 use the discharge probe to contact the center conductor of the HI and SHI BNC connectors Hold there for at least one second to safely discharge system capacitance Figure 46 8020 DP contact HI BNC connector 6 Use the probe to contact the 2657 GUARD banana jack Hold for at least one second to safely discharge system capacitance Figure 47 8020 DP contact GUARD banana jack ...

Page 57: ... is in the off state and a voltage is measured that corresponds to the drain to source breakdown voltage For Idss measurements a drain voltage Vds versus drain current Id curve is generated while applying a gate voltage Vgs that ensures that the device is in the off state The Model 2657 is used to supply the drain voltage and make measurements of drain voltage and drain current The Series 2600 is ...

Page 58: ...mblies One CA 558 2 interlock cable Model 2611 or 2612 only Adapter to connect the SMU to the Model 8010 One Model 2600 TRIAX triaxial adapter Cables to connect instruments to the device in the Model 8010 Two Model CA 563 and two Model CA 560 0 cables One GPIB cable or Ethernet cable One TSP Link cable Device connections Connect instruments to the Model 8010 Refer to the appropriate figures below ...

Page 59: ...Device Test Fixture User s ManualSection 4 Off state MOSFET characterization of a power MOSFET 8010 900 01 Rev C March 2017 4 3 Figure 48 Model 8010 to Model 2611 or 2612 rear panel connections for MOSFET application example ...

Page 60: ...SFET characterization of a power MOSFETModel 8010 High Power Device Test Fixture User s Manual 4 4 8010 900 01 Rev C March 2017 Figure 49 Model 8010 to Model 2635 or 2636 rear panel connections for MOSFET application example ...

Page 61: ...el 8010 High Power Device Test Fixture User s ManualSection 4 Off state MOSFET characterization of a power MOSFET 8010 900 01 Rev C March 2017 4 5 Figure 50 Model 8010 to Model 2657 rear panel connections ...

Page 62: ...onnect instruments to the device 1 Ensure that the Model 8010 DTB test board is installed Refer to Installing the test boards on page 2 3 2 Remove the insulating plug if installed 3 Install the device in the socket so that the gate terminal is connected to pins 1 and 4 of the device test board 4 Make the connections as shown in the graphic below Figure 51 Three terminal DUT with a Model 2657 and a...

Page 63: ...pported communication interfaces for the instruments Figure 52 Remote interface and TSP Link communications setup Item Description Qty Notes 1 IEEE 488 connection 1 GPIB Model 8010 is IEEE Std 488 1 compliant 2 LAN connection 1 Model 8010 is LXI version 1 4 Core 2011 compliant It supports TCP IP and complies with IEEE Std 802 3 ethernet 10 or 100 Mbps This is available from Keithley Instruments se...

Page 64: ...a TSP script to perform the measurement The script includes two separate functions for configuring the System SourceMeter Instrument and returning the raw current and voltage readings from the reading buffer The script is written using Test Script Processor TSP functions rather than as a single block of in line code TSP functions are similar to functions in other programming languages such as Micr...

Page 65: ...ied by the Model 2657 from drain to source Id measDelay Measurement delay before making the drain voltage measurement Vgs igLimit Current limit compliance for the SMU connected to the FET gate terminal vdLimit Voltage limit compliance for the SMU connected to the FET drain terminal numNPLC Integration time for the drain voltage measurement in number of power line cycles Example usage BVdss 0 0 001...

Page 66: ...7 measDelay seconds Measurement delay after applying drain current and before measuring BVdss igLimit amps Current limit for the Series 2600 SourceMeter Instrument connected to the MOSFET gate terminal vdLimit volts Voltage limit compliance for the Model 2657 connected to the MOSFET drain terminal should be greater than or equal to the expected BVdss value numNPLC not applicable Integration time s...

Page 67: ...de while the FET is in the off state Monitors the current measurement to see if the current limit has been reached When the current limit has been reached the voltage sweep is aborted With this method a second System SourceMeter is used to apply a voltage from gate to source Vgs This example uses a TSP script to perform the measurement The script includes two separate functions for configuring the...

Page 68: ...gateV Applied gate voltage bias Vgs startV Starting drain voltage Vds stopV Final drain voltage Vds numSteps Number of points in the drain voltage sweep measDelay Measurement delay measRange Current measurement range for the drain current measurements iLimit Current limit compliance for the drain current numNPLC Integration time in the number of power line cycles Example Usage Idss 0 10 1760 500 0...

Page 69: ...source levelv voltage Run the test node 2 smua source output 1 smua source output 1 delay 1 for i 1 numSteps do smua measure iv smua nvbuffer1 smua nvbuffer2 Remove the following 4 lines if you do not want to monitor for compliance testCmpl smua source compliance if testCmpl true then break end smua source levelv voltage step voltage voltage step end Turn off the SMUs to complete the test smua sou...

Page 70: ...ment delay after applying drain voltage and before measuring drain leakage current measRange amps Fixed current measurement range used to measure drain leakage current iLimit amps Current limit compliance for the Model 2657 connected to the MOSFET drain terminal numNPLC not applicable Integration time specified as the number of power line cycles An example of how to call this function is shown her...

Page 71: ...Model 8010 High Power Device Test Fixture User s ManualSection 4 Off state MOSFET characterization of a power MOSFET 8010 900 01 Rev C March 2017 4 15 Figure 53 Example output data ...

Page 72: ...a pulse and generate high speed current and voltage waveforms Equipment needed One Model 8010 High Power Test Fixture with the Model 8010 DTB or Model 8010 DTB 220 board installed on the high current side of the test fixture see Installing the test boards on page 2 3 for more information One Model 2651 High Power System SourceMeter instrument One device with axial leads such as a resistor or diode...

Page 73: ...0 Connect the Model 8010 to the Model 2651 as shown in the graphic below This example does not use the interlock although the connections for the interlock are shown in the following graphic If you want to use the test fixture interlock and output enable see the Model 2651 Reference Manual and the section Using output enable Figure 54 Model 8010 to Model 2651 wiring diagram ...

Page 74: ...for information on installing the device test boards 2 Install the device in the axial posts 3 Insert the insulating plug in the 3 terminal socket Refer to Using the insulating plug on page 3 6 for more detail 4 Make the connections as shown in the graphic below Figure 55 Two terminal axial DUT with a Model 2651 connected remote sense Set up communication The communication setup is illustrated in ...

Page 75: ...the test and outputs the collected data in a format that can be copied and pasted from the instrument console to a Microsoft Excel spreadsheet The script is written using Test Script Processor TSP functions rather than as a single block of in line code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic They must be called before the cod...

Page 76: ...tage level of the pulse in volts pulseWidth The width of the pulse in seconds 100e 6 pulseWidth 4e 3 pulseLimit The current limit of the pulse in amps numPulses The number of pulses to output Example Usage CapturePulseV 5 300e 6 50 5 function CapturePulseV pulseLevel pulseWidth pulseLimit numPulses if numPulses nil then numPulses 1 end Configure the SMU reset smua reset smua source func smua OUTPU...

Page 77: ...NT_ID Configure SMU Trigger Model for Sweep Pulse Output Pulses will all be the same level so set start and stop to the same value and the number of points in the sweep to 2 smua trigger source linearv pulseLevel pulseLevel 2 smua trigger source limiti pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure the A...

Page 78: ...numPulses if numPulses nil then numPulses 1 end Configure the SMU reset smua reset smua source func smua OUTPUT_DCAMPS smua sense smua SENSE_REMOTE smua source rangei pulseLevel smua source leveli 0 The bias level smua source limitv 10 The DC limit Use a measure range that is as large as the biggest possible pulse smua measure rangev pulseLimit smua measure rangei pulseLevel Select the fast ADC fo...

Page 79: ...tart the measurements before the source action takes place so we must configure the ADC to operate asynchronously of the rest of the SMU trigger model actions Measure I and V during the pulse smua trigger measure iv smua nvbuffer1 smua nvbuffer2 Return the output to the bias level at the end of the pulse smua trigger endpulse action smua SOURCE_IDLE smua trigger endsweep action smua SOURCE_IDLE sm...

Page 80: ...e call to this function is as follows CapturePulseV 10 300e 6 50 5 This call will output five 10 V pulses with a 300 µs pulse width The pulses will be limited to 50 A and have a 1 percent duty cycle At the completion of the pulsed outputs the source measure unit SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste ...

Page 81: ...utput one 20 A pulse with a 1 ms pulse width The pulse will be limited to 10 V and have a 1 duty cycle At the completion of the pulsed output the SMU output is turned off The resulting data from this test will be returned in a Microsoft Excel compatible format you can cut and paste the output from the console that can be used for graphing and analysis This data was generated with a 100 mΩ load Fig...

Page 82: ...0 It demonstrates how to program the two Model 2651 SourceMeter instruments and a Series 2600 instrument to measure the on resistance Rds On of a power MOSFET and generate Rds On compared to drain current Id curve for a fixed gate voltage The two Model 2651 instruments are used to supply the drain current and take measurements of drain voltage and drain current The Series 2600 instrument is used t...

Page 83: ...the Series 2600 to the Model 8010 One Model 2600 TRIAX adapter for Models 2611 and 2612 Cables to connect instruments to the device in the Model 8010 One Model CA 562 2 one Model CA 562 0 three Model CA 560 0 one Model CA 560 2 and two Model 563 cables One CA 558 2 interlock cable One GPIB cable or Ethernet cable Two TSP Link cables Connect instruments to the Model 8010 Make connections between th...

Page 84: ...er Device Test Fixture User s Manual Section 6 On state characterization of a power MOSFET 8010 900 01 Rev C March 2017 6 3 Figure 58 Model 8010 to Model 2611 or 2612 rear panel connections for MOSFET application example ...

Page 85: ...characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual 6 4 8010 900 01 Rev C March 2017 Figure 59 Model 8010 to Model 2635 or 2636 rear panel connections for MOSFET application example ...

Page 86: ...zation of a power MOSFET 8010 900 01 Rev C March 2017 6 5 If you want to use the test fixture interlock and output enable see the Model 2651 Reference Manual and the section Using output enable Figure 60 Model 8010 to Model 2651 rear panel connections for the MOSFET application example ...

Page 87: ... 8010 DTB or Model 8010 DTB 220 test board is installed Refer to Installing the test boards on page 2 3 for information on installing the device test boards 2 Remove the insulating plug if installed 3 Install the device in the socket so that the gate terminal is connected to pins 1 and 4 of the device test board 4 Make the connections as shown in the graphic below Figure 61 Three terminal DUT with...

Page 88: ...rmine an appropriate resistance value by trial and error Resistors are not supplied with the Model 8010 but customer supplied leaded resistors may be easily installed in the Model 8010 To add a series gate resistor in the Model 8010 1 Loosen the binding post that is connected to pin 4 of the device test board 2 Insert one end of the resistor into the opening at the base of the binding post 3 Tight...

Page 89: ...es communication between two instruments Commands for the Model 2651 SMU 2 node 2 and the Series 2600 SMU 3 node 3 are sent over the TSP Link interface Figure 63 GPIB communication example for Rds on sweep To set the TSP Link node number using the front panel interface 1 Press the MENU key 2 Select TSPLink 3 Select NODE 4 Use the navigation wheel to adjust the node number 5 Press the ENTER key to ...

Page 90: ...uffers Executes the test Returns the collected data in a format that can be copied from the instrument console and pasted into a Microsoft Excel spreadsheet The script is written using Test Script Processor TSP functions rather than as a single block of in line code TSP functions are similar to functions in other programming languages such as Microsoft Visual C or Visual Basic They must be called ...

Page 91: ...is function uses two 2651 SMUs to perform a pulsed Rds on sweep with currents up to 100A Parameters gateLevel The gate level to be used during the sweep dstart The starting current level of the drain sweep dstop The ending current level of the drain sweep dsteps The number of steps in the drain sweep pulseWidth The width of the drain pulse in seconds pulsePeriod The time from the start of one drai...

Page 92: ...ondition smua measure nplc 0 005 smua measure rangev pulseLimit smua measure autozero smua AUTOZERO_ONCE smua measure delay pulseWidth 1 localnode linefreq smua measure nplc 20e 6 Set the delay so that the measurement is near the end of the pulse Prepare the reading buffers smua nvbuffer1 clear smua nvbuffer1 collecttimestamps 1 smua nvbuffer1 collectsourcevalues 1 smua nvbuffer1 fillmode smua FIL...

Page 93: ...se node 2 smua SENSE_REMOTE node 2 smua source offmode node 2 smua OUTPUT_NORMAL node 2 smua source offfunc node 2 smua OUTPUT_DCAMPS node 2 smua source offlimitv 10 Set off limit SMU is a 0 A current source with 10 V limit when output is turned off node 2 smua source rangei math max math abs dstart 2 math abs dstop 2 node 2 smua source leveli 0 Sets the DC bias level node 2 smua source limitv 10 ...

Page 94: ...NT_ID node 2 smua trigger measure stimulus 0 node 2 smua trigger endpulse stimulus node 2 trigger timer 1 EVENT_ID node 2 smua trigger source action node 2 smua ENABLE Configure the 2600 Gate SMU node 3 smua reset node 3 smua source func node 3 smua OUTPUT_DCVOLTS node 3 smua sense node 3 smua SENSE_REMOTE node 3 smua source levelv gateLevel node 3 smua source highc node 3 smua ENABLE If you find ...

Page 95: ...combined SMU data and Rds on readings in a format that is copy and paste compatible with Microsoft Excel function PrintDualSmuRdsonData Print the gate SMU readings print Gate SMU r nSource Value tVoltage tCurrent print string format 0 2f t g t g r n node 3 smua nvbuffer1 sourcevalues 1 node 3 smua nvbuffer2 1 node 3 smua nvbuffer1 1 Print column headers print Timestamp tSource Value tVoltage 1 tCu...

Page 96: ...last step in the drain sweep dsteps Not applicable The number of steps in the drain sweep pulseWidth Seconds The width of the pulse in the drain sweep pulsePeriod Seconds The time between the start of consecutive pulses in the drain sweep pulseLimit Volts The voltage limit of the pulses in the drain sweep An example call to this function is as follows DualSmuRdson 10 1 100 100 500e 6 50e 3 10 This...

Page 97: ...Section 6 On state characterization of a power MOSFET Model 8010 High Power Device Test Fixture User s Manual 6 16 8010 900 01 Rev C March 2017 Figure 64 Example Rds on curves for a power MOSFET device ...

Page 98: ...the Model 8010 equipped with the optional CVU 3KV KIT and CVU 200V KIT bias tee kits The bias tees are designed to remain connected whether you are making DC only measurements or AC DC measurements The tees also include a switch allowing measurement optimization eliminating the need for connection changes You will also configure the ACS Basic software to communicate with these instruments and perf...

Page 99: ...e Test Fixture 2600 PCT 2B High Current Parametric Curve Tracer PCT CVU Parametric Curve Tracer Capacitance Voltage Unit CVU 200 KIT Capacitance Voltage Unit 200 V Kit Part number Description 8010 Model 8010 High Power Device Test Fixture 2600 PCT 1B Low Power Parametric Curve Tracer PCT CVU Parametric Curve Tracer Capacitance Voltage Unit CVU 200 KIT Capacitance Voltage Unit 200 V Kit Connect the...

Page 100: ...tance measurements 8010 900 01 Rev C March 2017 7 3 Power MOSFET capacitance Crss Cgd CVU 3K KIT measurement The next graphic shows the capacitance measurement test connections for the Crss and Cgd tests using the CVU 3K KIT 3 terminal Figure 65 Model 8010 and CVU 3K KIT_3 Term_CRSS_CGD ...

Page 101: ...010 900 01 Rev C March 2017 Power MOSFET capacitance Ciss Coss Cgs Cds CVU 3K KIT measurement The next graphics show how to connect the cables for Ciss Coss Cgs and Cds testing Notice that you only need to make some minor cabling changes to accomplish these tests Figure 66 8010 and CVU 3K KIT Ciss Coss Cgs Cds ...

Page 102: ...ce measurements 8010 900 01 Rev C March 2017 7 5 Power MOSFET capacitance Crss Cgd CVU 200 KIT measurement The next graphic shows the capacitance measurement test connections for the Crss and Cgd tests using the CVU 200 KIT 3 terminal Figure 67 Crss capacitance measurement test connections ...

Page 103: ...900 01 Rev C March 2017 Power MOSFET capacitance Ciss Coss Cgs Cds CVU 200 KIT measurement The next graphics show how to connect the cables for Ciss Coss Cgs and Cds testing Notice that you only need to make some minor cabling changes to accomplish these tests Figure 68 Model 8010 and CVU 200 KIT Ciss Coss Cgs Cds ...

Page 104: ...est connections To install a test device and connect instruments 1 Ensure that the Model 8010 DTB test board is installed 2 Remove the insulating plug from the three pin socket if installed 3 Install the test device in the socket so that the Gate terminal is connected to pins 1 and 4 of the device test board 4 Make the cable connections as shown in the graphics below Figure 69 Connecting to the de...

Page 105: ...er to the Optimizing cables and connections for high voltage CV measurements on page 3 26 topic The next figure shows how to perform an open connection test without a device inserted Figure 70 Model 8010 and CVU 3K KIT 3 terminal DUT open for Ciss and Coss connections The next figure shows how to perform a short connection test without a device inserted and how to install a short between the fixtu...

Page 106: ...on test without a device inserted and how to install a short between the fixture terminals that normally would be connected to the source and drain of the FET Figure 72 Model 8010 and CVU 3K KIT 3 terminal DUTshort for Coss connection Model 8010 and CVU 3K KIT Cgd and Crss test connections Figure 73 Connecting to the device for Cgd and Crss measurements using the Model 8010 and CVU 3K KIT ...

Page 107: ...hout a device inserted Figure 74 Model 8010 and CVU 3K KIT 3 terminal DUT open for Cgd and Crss connections The next figure shows how to perform a short connection test without a device inserted and how to install a short between the fixture terminals that normally would be connected to the gate and drain of the FET Figure 75 Model 8010 and CVU 3K KIT 3 terminal DUT short for Cgd and Crss connecti...

Page 108: ...v C March 2017 7 11 Model 8010 and CVU 3K KIT Cgs test connections Figure 76 Connecting to the device for Cgs measurements using the Model 8010 and CVU 3K KIT The next figure shows how to perform an open connection test without a device inserted Figure 77 Model 8010 and CVU 3K KIT 3 terminal DUT open for Cgs connection ...

Page 109: ...ort connection test without a device inserted and how to install a short between the fixture terminals that normally would be connected to the gate and source of the FET Figure 78 Model 8010 and CVU 3K KIT 3 terminal DUT short for Cgs connection Model 8010 and CVU 3K KIT Cds test connections Figure 79 Connecting to the device for Cds measurements using Model 8010 and CVU 3K KIT ...

Page 110: ...est without a device inserted Figure 80 Model 8010 and CVU 3K KIT 3 term DUT terminal open for Cds connection The next figure shows how to perform a short connection test without a device inserted and how to install a short between the fixture terminals that normally would be connected to the drain and source of the FET Figure 81 Model 8010 and CVU 3K KIT 3 terminal DUT short for Cds connection ...

Page 111: ...nstall a test device and connect instruments 1 Ensure that the Model 8010 DTB test board is installed 2 Remove the insulating plug from the three pin socket if installed 3 Install the test device in the socket so that the Gate terminal is connected to pins 1 and 4 of the device test board 4 Make the cable connections as shown in the graphic below Figure 82 Connecting to the device for Ciss and Cos...

Page 112: ...r to the Optimizing cables and connections for high voltage CV measurements on page 3 26 topic The next figure shows how to perform an open connection test without a device inserted Figure 83 Model 8010 and CVU 200 KIT 3 terminal DUT open for Ciss and Coss connections The next figure shows how to perform a short connection test without a device inserted and how to install a short between the fixtu...

Page 113: ...ion test without a device inserted and how to install a short between the fixture terminals that normally would be connected to the source and drain of the FET Figure 85 Model 8010 and CVU 200 KIT 3 terminal DUT short for Coss connection Model 8010 and CVU 200 KIT Cgd and Crss test connections Figure 86 Connecting to the device for Cgd and Crss measurements when using the Model CVU 200 KIT ...

Page 114: ...out a device inserted Figure 87 Model 8010 and CVU 200 KIT 3 terminal DUT open for Cgd and Crss connections The next figure shows how to perform a short connection test without a device inserted and how to install a short between the fixture terminals that normally would be connected to the gate and drain of the FET Figure 88 Model 8010 and CVU 200 KIT 3 terminal DUT short for Cgd and Crss connect...

Page 115: ... Rev C March 2017 Model 8010 and CVU 200 KIT Cgs test connections Figure 89 Connecting to the device for Cgs measurements using the Model 8010 and CVU 200 KIT The next figure shows how to perform an open connection test without a device inserted Figure 90 Model 8010 and CVU 200 KIT 3 terminal DUT open for Cgs connection ...

Page 116: ...9 The next figure shows how to perform a short connection test without a device inserted and how to install a short between the fixture terminals that normally would be connected to the gate and source of the FET Figure 91 Model 8010 and CVU 200 KIT 3 terminal DUT short for Cgs connection Model 8010 and CVU 200 KIT Cds test connections ...

Page 117: ...test without a device inserted Figure 92 Model 8010 and CVU 200 KIT 3 terminal DUT open for Cds connection The next figure shows how to perform a short connection test without a device inserted and how to install a short between the fixture terminals that normally would be connected to the drain and source of the FET Figure 93 Model 8010 and CVU 200 KIT 3 terminal DUT short for Cds connection ...

Page 118: ...C March 2017 7 21 Set up communication You can use the next graphic as a guide for setting up your instruments to communicate with each other You will need GPIB and TSP Link cables in order to run any of the supported communication interfaces for the instruments Figure 94 Model 8010 GPIB and TSP Link communications setup ...

Page 119: ...mode Capacitance measurement test modules in ACS Basic include Generic_HVCV_Test which can be used to measure capacitance measurement up to 4 device terminals Power MOSFET capacitance tests Ciss Coss Crss Cgd Cgs and Cds PowerBJT capacitance tests Cibo Cobo Ccb Cce and Ceb IGBT capacitance test Cies Coes Cce Cgc and Cge The following test modules demonstrate the software user interface see the nex...

Page 120: ... 8010 High Power Device Test Fixture User s Manual Section 7 High voltage capacitance measurements 8010 900 01 Rev C March 2017 7 23 Figure 95 CVU Connection Compensation Figure 96 ACSBE Multimode HVCV Test ...

Page 121: ...Section 7 High voltage capacitance measurements Model 8010 High Power Device Test Fixture User s Manual 7 24 8010 900 01 Rev C March 2017 Figure 97 ACSBE Ciss Test ...

Page 122: ...ion which will result in larger leakage currents If you are using the boards for low leakage measurements inspect and clean the device test boards regularly See How to clean the Model 8010 Test Fixture on page 9 1 for detail Interlock error message The SourceMeter Instrument SMU output will not turn on and I get an error message about the interlock on the SMU front panel What is wrong The lid of t...

Page 123: ...vice channel To dampen these oscillations and stabilize the gate you can insert a resistor between the gate of the device and the SourceMeter Instrument SMU connected to the gate See How to insert a resistor on a device terminal on page 3 10 for details The appropriate gate resistor value is device dependent However typical gate resistor values range from tens to hundreds of ohms If the gate remai...

Page 124: ...the lid is open the interlock is disengaged and any SourceMeter Instruments SMUs with outputs that are configured for high voltage will not turn on Low voltage SMUs may still operate with the lid open and without the interlock connected For example the Model 2651 will still operate if the output enable function is not activated Additionally the Models 2611 2612 2635 2636 and 4200 SMU will operate ...

Page 125: ...as needed For replacement instructions see Installing the test boards on page 2 3 How to clean the Model 8010 Test Fixture To prevent contamination that may degrade performance use care when handling or servicing the test fixture To avoid damage to the test fixture do not use any abrasive or chemical cleaning agents To clean the Model 8010 1 Remove power from all instruments that are connected to ...

Page 126: ...Connector and socket cleaning The performance of connectors and sockets can degrade because of dirt build up or improper handling You can clean connectors and sockets with methanol dipped cotton swabs After cleaning connectors and sockets allow them to dry for at least one hour in a 50 C low humidity environment ...

Page 127: ...so available as a PDF on the CD ROMs that came with the test fixture For more detailed information about the SourceMeter instruments refer to the SourceMeter instrument reference manuals The CD ROMs that are included with your test fixture contain the following Model 8010 product document in PDF The Interconnection Reference Guide This User s Manual Information for the TO 247 Device Test Board 801...

Page 128: ...tion 3 4 3 5 rear panel 2 1 2 5 Connector and socket cleaning 9 2 contact information 1 3 Contact information 1 3 C V Hi I mode 3 16 3 18 3 19 3 20 C V mode 3 16 3 18 3 19 3 20 D DC measurements leakage current 3 17 Device connections 4 2 Device test boards 3 2 Discharge bias tee and system capacitance 3 15 3 28 Discharge system capacitance with the Model 2657 3 28 E Equipment needed 5 1 Equipment...

Page 129: ...d Crss test connections 7 9 Model 8010 and CVU 3K KIT Cgs test connections 7 11 Model 8010 and CVU 3K KIT Ciss and Coss test connections 7 7 Model 8010 overview 1 1 MOSFET MOSFET characterization 4 1 N Next steps 10 1 Noisy low current measurements 8 1 O Off state MOSFET characterization of a power MOSFET 4 1 On state characterization of a power MOSFET 3 5 6 1 Optimizing cables and connections for...

Page 130: ...erview 3 19 test board about 1 3 3 2 install device 3 4 3 5 installation 2 3 The device is oscillating How do I correct this 8 2 troubleshooting FAQs 8 1 interlock error message 8 1 U Unpacking and inspection 1 3 Use the Model 8020 DP to discharge system capacitance 3 29 Using the 8010 DTB CT 3 6 Using the access port on the Model 8010 2 12 Using the guard terminal 3 12 3 18 Using the insulating p...

Page 131: ...roperty of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 800 935 5595 www tek com keithley 12 15 A Greater Measure of Confidence ...

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